公开(公告)号：US07126139B2

公开(公告)日：2006-10-24

申请号：US10683488

申请日：2003-10-09

Applicant: Thomas Schenkel ,  Ivo W. Rangelow ,  Jan Meijer

Inventor： Thomas Schenkel ,  Ivo W. Rangelow ,  Jan Meijer

IPC: G02B6/26 ,  H01J37/00

CPC classification number: H01J37/3172 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3045 ,  H01J37/3174 ,  H01J2237/30438 ,  H01J2237/30488 ,  H01J2237/3171 ,  H01J2237/31737

Abstract: A device and a method for positionally accurate implantation of individual particles in a substrate surface (1a) are described. A diaphragm for a particle beam to be directed onto the substrate surface (1a) and a detector provided thereon in the form of a p-n junction for determining a secondary electron flow produced upon impact of a particle onto the substrate surface (1a) are provided on a tip (4) which is formed on a free end portion of a flexible arm (2) to be mounted on one side. The device is part of a scanning device operating according to the AFM method.

Abstract translation: 描述了用于将单个颗粒定位在衬底表面（1a）中的位置精确植入的装置和方法。 用于将粒子束引导到衬底表面（1a）上的膜片和以pn结形式设置在其上的检测器，用于确定在颗粒撞击到衬底表面（1a）上产生的二次电子流时， 设置在安装在一侧的柔性臂（2）的自由端部上的尖端（4）上。 该设备是根据AFM方法操作的扫描设备的一部分。

公开(公告)号：US06291820B1

公开(公告)日：2001-09-18

申请号：US09227997

申请日：1999-01-08

Applicant: Alex V. Hamza ,  Thomas Schenkel ,  Alan V. Barnes ,  Dieter H. Schneider

Inventor： Alex V. Hamza ,  Thomas Schenkel ,  Alan V. Barnes ,  Dieter H. Schneider

IPC: B01D5944

CPC classification number: G01N23/22

Abstract: A secondary ion mass spectrometer using slow, highly charged ions produced in an electron beam ion trap permits ultra-sensitive surface analysis and high spatial resolution simultaneously. The spectrometer comprises an ion source producing a primary ion beam of highly charged ions that are directed at a target surface, a mass analyzer, and a microchannel plate detector of secondary ions that are sputtered from the target surface after interaction with the primary beam. The unusually high secondary ion yield permits the use of coincidence counting, in which the secondary ion stops are detected in coincidence with a particular secondary ion. The association of specific molecular species can be correlated. The unique multiple secondary nature of the highly charged ion interaction enables this new analytical technique.

Abstract translation: 在电子束离子阱中产生的使用慢，高电荷的离子的二次离子质谱仪同时允许超灵敏表面分析和高空间分辨率。 光谱仪包括离子源，其产生指向目标表面的高电荷离子的一次离子束，质量分析器和在与主光束相互作用之后从目标表面溅射的二次离子的微通道板检测器。 异常高的二次离子产率允许使用重合计数，其中检测到二次离子停止与特定二次离子一致。 特定分子种类的关联可以相关。 高度带电的离子相互作用的独特的二次性质使得这种新的分析技术成为可能。