公开(公告)号：US20180374679A1

公开(公告)日：2018-12-27

申请号：US16016990

申请日：2018-06-25

Applicant: Tokyo Electron Limited

Inventor： Shunichi Ito ,  Shinji Himori ,  Etsuji Ito ,  Naokazu Furuya ,  Gen Tamamushi

IPC: H01J37/32 ,  H01L21/683

Abstract: A power feed member having high heat insulation and capable of transmitting a power at a low loss is provided. The power feed member configured to supply a power includes a first conductive member; a second conductive member; and a connecting member configured to electrically connect the first conductive member and the second conductive member. At least a part of the connecting member is formed of a porous metal or multiple bulk metals.