Method for forming structure for reducing noise in CMOS image sensors
    11.
    发明授权
    Method for forming structure for reducing noise in CMOS image sensors 有权
    用于形成CMOS图像传感器中降低噪声的结构的方法

    公开(公告)号:US08283196B2

    公开(公告)日:2012-10-09

    申请号:US13044445

    申请日:2011-03-09

    IPC分类号: H01L21/00 H01L31/062

    摘要: A method and device is disclosed for reducing noise in CMOS image sensors. An improved CMOS image sensor includes a light sensing structure surrounded by a support feature section. An active section of the light sensing structure is covered by no more than optically transparent materials. A light blocking portion includes a black light filter layer and an opaque layer covering the support feature section. The light blocking portion may also cover a peripheral portion of the light sensing structure. The method for forming the CMOS image sensors includes using film patterning and etching processes to selectively form the opaque layer where the light blocking portion is desired but not over the active section.

    摘要翻译: 公开了用于降低CMOS图像传感器中的噪声的方法和装置。 改进的CMOS图像传感器包括由支撑特征部分包围的光感测结构。 感光结构的有源部分不被光学透明材料覆盖。 遮光部分包括黑色光过滤层和覆盖支撑特征部分的不透明层。 遮光部分还可以覆盖光感测结构的周边部分。 用于形成CMOS图像传感器的方法包括使用膜图案化和蚀刻工艺来选择性地形成其中需要遮光部分而不是在有源部分上的不透明层。

    Method and structure for reducing noise in CMOS image sensors
    12.
    发明申请
    Method and structure for reducing noise in CMOS image sensors 有权
    降低CMOS图像传感器噪声的方法和结构

    公开(公告)号:US20060202295A1

    公开(公告)日:2006-09-14

    申请号:US11077576

    申请日:2005-03-11

    IPC分类号: H01L31/0232

    摘要: A method and device is disclosed for reducing noises in CMOS image sensors. An improved CMOS image sensor includes a light sensing structure surrounded by a support feature section. An active section of the light sensing structure is covered by no more than optically transparent materials. A light blocking portion includes a black light filter layer and an opaque layer covering the support feature section. The light blocking portion may also cover a peripheral portion of the light sensing structure. The method for forming the CMOS image sensors includes using film patterning and etching processes to selectively form the opaque layer where the light blocking portion is desired but not over the active section.

    摘要翻译: 公开了一种降低CMOS图像传感器噪声的方法和装置。 改进的CMOS图像传感器包括由支撑特征部分包围的光感测结构。 感光结构的有源部分不被光学透明材料覆盖。 遮光部分包括黑色光过滤层和覆盖支撑特征部分的不透明层。 遮光部分还可以覆盖光感测结构的周边部分。 用于形成CMOS图像传感器的方法包括使用膜图案化和蚀刻工艺来选择性地形成其中需要遮光部分而不是在有源部分上的不透明层。