公开(公告)号：US20140224018A1

公开(公告)日：2014-08-14

申请号：US13557861

申请日：2012-07-25

Applicant: George Whitesides ,  Xinyu Liu ,  XiuJun Li ,  Martin M. Thuo ,  Michael O'Brien ,  Yu Sun

Inventor： George Whitesides ,  Xinyu Liu ,  XiuJun Li ,  Martin M. Thuo ,  Michael O'Brien ,  Yu Sun

IPC: G01P15/12 ,  B81B7/02

CPC classification number: B81B7/02 ,  B81C1/0015 ,  G01G3/13 ,  G01L1/18 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0862

Abstract: MEMS devices fabricated using inexpensive substrate materials such as paper or fabric, are provided. Using paper as a substrate, low cost, simple to prepare, lightweight, disposable piezoresistive sensors, including accelerometers are prepared. Signal-processing circuitry can also be patterned on the substrate material.The sensors can be utilized as two-dimensional sensors, or the paper substrate material can be folded to arrange the sensors in a three dimensional conformation. For example, three sensors can be patterned on a paper substrate and folded into a cube such that the three sensors are orthogonally positioned on the faces of a cube, permitting simultaneous measurement of accelerations along three orthogonal directions (x-y-z). These paper-based sensors can be mass produced by incorporating highly developed technologies for automatic paper cutting, folding, and screen-printing.Also provided are methods of modifying paper for use as a substrate material in MEMS devices.

Abstract translation: 提供了使用诸如纸或织物之类的便宜的基底材料制造的MEMS器件。 使用纸作为基材，成本低，制备简单，重量轻，一次性压阻式传感器，包括加速度计。 信号处理电路也可以在衬底材料上图案化。 传感器可以用作二维传感器，或者可以将纸基材料折叠成三维构型。 例如，可以将三个传感器图案化在纸基底上并折叠成立方体，使得三个传感器正交地放置在立方体的表面上，允许沿着三个正交方向（x-y-z）同时测量加速度。 这些纸基传感器可以通过结合高度开发的自动切纸，折叠和丝网印刷技术进行批量生产。 还提供了修改用作MEMS器件中的基底材料的纸的方法。