公开(公告)号：US20230146711A1

公开(公告)日：2023-05-11

申请号：US17983463

申请日：2022-11-09

Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN

Inventor： Yimai PENG ,  David BLAAUW ,  Dennis SYLVESTER ,  David Kyojin CHOO

IPC: G01P15/125 ,  H02M3/07

CPC classification number: G01P15/125 ,  H02M3/07 ,  G01P2015/0862

Abstract: A motion sensing system uses high-voltage biasing to achieve high resolution with ultra-low power. The motion sensing system consists of a motion sensor, a readout circuit, and a high-voltage bias circuit to generate the optimized bias voltage for the motion sensor. By using the high-voltage bias, the signal from the motion sensor is raised above the readout circuit's noise floor, eliminating the power-hungry amplifier and signal-chopping used in conventional motion sensing systems. The bias circuit, while producing the programmable bias voltages for the motion sensor, also compensates for the process mismatch raised by the high voltage biases.

公开(公告)号：US20160202366A1

公开(公告)日：2016-07-14

申请号：US14295080

申请日：2014-06-03

Applicant: PGS Geophysical AS ,  Agency for Science Technology and Research (A*STAR)

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01V1/18 ,  G01P15/125 ,  G01V1/09 ,  G01V1/38

CPC classification number: G01V1/18 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0862 ,  G01P2015/0882 ,  G01V1/09 ,  G01V1/38

Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Abstract translation: 公开了具有分离的感测和力反馈电极的微机电系统（MEMS）加速计。 在一些实施例中，单独电极的使用可以增加这种装置的动态范围。 其他可能的优点包括例如更好的灵敏度，更好的噪声抑制和更好的信噪比。 在一个实施例中，加速度计包括三个硅晶片，由感应电极制成，其形成全差分电容结构的电容器，并且具有单独的力反馈电极，形成用于力反馈的电容器。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合间隔物和力反馈电极，其可以对检测质量区域施加恢复力。 具有力反馈电极的MEMS加速度计可用于地球物理勘测，例如用于地震检测或声学定位。

公开(公告)号：US08256291B1

公开(公告)日：2012-09-04

申请号：US12371535

申请日：2009-02-13

Applicant: Mohammad I. Younis

Inventor： Mohammad I. Younis

IPC: G01P15/00 ,  H01L49/00

CPC classification number: G01P15/04 ,  G01P15/0891 ,  G01P2015/0862 ,  H01H1/0036

Abstract: An acceleration-triggered or shock-triggered, smart, tunable MEMS switch that may function as both a classic accelerometer and an acceleration threshold detector. A parallel element MEMS device has a stationary and a movable element forming a capacitor. Varying acceleration moves the movable member with respect to the stationary member, thereby changing the capacitance of the device. The capacitance varying may be used, in cooperation with appropriate circuitry, to provide a signal representative of instantaneous acceleration. By applying a biasing voltage, the movable element may be positioned in a predetermined fashion such that acceleration of a predetermined magnitude causes the movable element to pull in (snap down). The movable and stationary elements may function as a switch such that when the predetermined acceleration or shock level occurs, electrodes close, a current flows between the elements so that an external device such as an air bag may be activated.

Abstract translation: 加速度触发或触发触发的智能可调谐MEMS开关，其可以用作经典加速度计和加速度阈值检测器。 并联元件MEMS器件具有形成电容器的静止元件和可动元件。 不同的加速度使可动构件相对于静止构件移动，从而改变装置的电容。 可以与适当的电路配合使用电容变化来提供代表瞬时加速度的信号。 通过施加偏压电压，可移动元件可以以预定方式定位，使得预定幅度的加速度使得可移动元件拉入（向下）。 可移动和固定元件可以用作开关，使得当预定的加速度或冲击水平发生时，电极闭合，电流在元件之间流动，使得诸如气囊的外部装置可被启动。

公开(公告)号：US07755367B2

公开(公告)日：2010-07-13

申请号：US12131145

申请日：2008-06-02

Applicant: Florian Schoen ,  Markus Loehndorf

Inventor： Florian Schoen ,  Markus Loehndorf

IPC: G01R27/04

CPC classification number: H03H9/2457 ,  B60C23/0488 ,  B60C23/064 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0862 ,  H03H2009/02527

Abstract: The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.

Abstract translation: 本发明涉及MEMS谐振器。 在一个实施例中，集成谐振器和传感器装置包括微机电系统（MEMS）谐振器和耦合到MEMS谐振器并被配置为允许MEMS谐振器在第一运动平面和MEMS的移动中的谐振的锚定部分 谐振器在第二运动平面。 在其他实施例中，公开了附加的装置，装置，系统和方法。

公开(公告)号：US11874291B2

公开(公告)日：2024-01-16

申请号：US17661039

申请日：2022-04-27

Applicant: Robert Bosch GmbH

Inventor： Amin Jemili ,  Jochen Reinmuth ,  Dusan Radovic ,  Rolf Scheben ,  Steffen Becker

IPC: G01P1/00 ,  G01P15/08

CPC classification number: G01P1/006 ,  G01P15/08 ,  G01P2015/0862

Abstract: A method for temperature compensation of a MEMS sensor. The method includes: in a balancing step, a temperature gradient is produced by a thermal element and a first and a second temperature are determined at a first and a second temperature measurement point, wherein a deflection of a movable structure produced by the temperature gradient is measured and a compensation value is ascertained dependent on the first and second temperature and the deflection; in a measurement step, a physical stimulus is measured by way of a deflection of the movable structure and a third and fourth temperature is determined at the first and second temperature measurement points; in a compensation step, a measured value of the physical stimulus is ascertained dependent on the measured deflection, the third and fourth temperature and the compensation value. A method is also provided including: a regulation step, and a measurement step.

公开(公告)号：US20170291811A1

公开(公告)日：2017-10-12

申请号：US15508130

申请日：2015-09-04

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Mohammad YOUNIS

IPC: B81B7/00 ,  G01P15/125 ,  G02B26/08

CPC classification number: B81B7/008 ,  B81B2201/0235 ,  B81B2201/0271 ,  B81B2201/042 ,  G01P15/125 ,  G01P2015/0862 ,  G02B26/0833 ,  H03H3/0076 ,  H03H9/02259 ,  H03H9/02393 ,  H03H9/467 ,  H03H9/525

Abstract: Embodiments of multi-frequency excitation are described. In various embodiments, a natural frequency of a device may be determined. In turn, a first voltage amplitude and first fixed frequency of a first source of excitation can be selected for the device based on the natural frequency. Additionally, a second voltage amplitude of a second source of excitation can be selected for the device, and the first and second sources of excitation can be applied to the device. After applying the first and second sources of excitation, a frequency of the second source of excitation can be swept. Using the methods of multi-frequency excitation described herein, new operating frequencies, operating frequency ranges, resonance frequencies, resonance frequency ranges, and/or resonance responses can be achieved for devices and systems.

公开(公告)号：US09016124B1

公开(公告)日：2015-04-28

申请号：US13602456

申请日：2012-09-04

Applicant: Mohammad I. Younis

Inventor： Mohammad I. Younis

IPC: G01P15/04 ,  G01P15/08

CPC classification number: G01P15/04 ,  G01P15/0891 ,  G01P2015/0862 ,  H01H1/0036

Abstract: An acceleration-triggered or shock-triggered, smart, tunable MEMS switch that may function as both a classic accelerometer and an acceleration threshold detector. A parallel element MEMS device has a stationary and a movable element forming a capacitor. Varying acceleration moves the movable member with respect to the stationary member, thereby changing the capacitance of the device. The capacitance varying may be used, in cooperation with appropriate circuitry, to provide a signal representative of instantaneous acceleration. By applying a biasing voltage, the movable element may be positioned in a predetermined fashion such that acceleration of a predetermined magnitude causes the movable element to pull in (snap down). The movable and stationary elements may function as a switch such that when the predetermined acceleration or shock level occurs, electrodes close, a current flows between the elements so that an external device such as an air bag may be activated.

公开(公告)号：US20150035093A1

公开(公告)日：2015-02-05

申请号：US14447696

申请日：2014-07-31

Applicant: Robert Bosch GmbH

Inventor： Ando Feyh ,  Gary O'Brien

IPC: G01P15/08 ,  G01L1/14 ,  G01P15/125 ,  G01P15/14 ,  G01P1/02

CPC classification number: G01P15/0802 ,  B81B3/0021 ,  B81B7/02 ,  B81B2201/025 ,  B81B2201/0264 ,  G01C19/5769 ,  G01C19/5783 ,  G01L1/14 ,  G01L1/18 ,  G01P1/023 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0862 ,  G01P2015/088

Abstract: In one embodiment, the process flow for a capacitive pressures sensor is combined with the process flow for an inertial sensor. In this way, an inertial sensor is realized within the membrane layer of the pressure sensor. The device layer is simultaneously used as z-axis electrode for out-of-plane sensing in the inertial sensor, and/or as the wiring layer for the inertial sensor. The membrane layer (or cap layer) of the pressure sensor process flow is used to define the inertial sensor sensing structures. Insulating nitride plugs in the membrane layer are used to electrically decouple the various sensing structures for a multi-axis inertial sensor, allowing for fully differential sensing.

Abstract translation: 在一个实施例中，电容式压力传感器的工艺流程与惯性传感器的工艺流程相结合。 以这种方式，在压力传感器的膜层内实现惯性传感器。 器件层同时用作惯性传感器中的平面外感测的z轴电极，和/或用作惯性传感器的布线层。 压力传感器工艺流程的膜层（或盖层）用于定义惯性传感器感测结构。 膜层中的绝缘氮化物塞用于电耦合用于多轴惯性传感器的各种感测结构，允许完全差分感测。

公开(公告)号：US20150007656A1

公开(公告)日：2015-01-08

申请号：US13936938

申请日：2013-07-08

Applicant: Honeywell International Inc.

Inventor： Mark W. Weber ,  Timothy J. Hanson

IPC: G01P15/08

CPC classification number: G01P15/08 ,  B81C1/00698 ,  G01P2015/0862 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: A method of controlling exposed glass charging in a micro-electro-mechanical systems (MEMS) device is disclosed. The method includes providing a MEMS device comprising a proof mass positioned apart from at least one sense plate and at least one outboard metallization layer, wherein at least one conductive glass layer is coupled to the sense plate and the outboard metallization layer, the conductive glass layer including at least one exposed glass portion near the proof mass; and applying a first voltage to the sense plate and a second voltage to the outboard metallization layer. The first voltage is separated from the second voltage by a predetermined voltage level such that the exposed glass portion has an average voltage corresponding to a voltage midway between the first voltage and the second voltage.

Abstract translation: 公开了一种在微机电系统（MEMS）装置中控制暴露的玻璃充电的方法。 该方法包括提供MEMS器件，其包括与至少一个感测板和至少一个外侧金属化层隔开的检测质量块，其中至少一个导电玻璃层耦合到感测板和外侧金属化层，导电玻璃层 包括靠近证明物质的至少一个暴露的玻璃部分; 以及向所述感测板施加第一电压，并向所述外侧金属化层施加第二电压。 第一电压与第二电压分开预定的电压电平，使得暴露的玻璃部分具有对应于第一电压和第二电压之间的电压的平均电压。

公开(公告)号：US20140224018A1

公开(公告)日：2014-08-14

申请号：US13557861

申请日：2012-07-25

Applicant: George Whitesides ,  Xinyu Liu ,  XiuJun Li ,  Martin M. Thuo ,  Michael O'Brien ,  Yu Sun

Inventor： George Whitesides ,  Xinyu Liu ,  XiuJun Li ,  Martin M. Thuo ,  Michael O'Brien ,  Yu Sun

IPC: G01P15/12 ,  B81B7/02

CPC classification number: B81B7/02 ,  B81C1/0015 ,  G01G3/13 ,  G01L1/18 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0862

Abstract: MEMS devices fabricated using inexpensive substrate materials such as paper or fabric, are provided. Using paper as a substrate, low cost, simple to prepare, lightweight, disposable piezoresistive sensors, including accelerometers are prepared. Signal-processing circuitry can also be patterned on the substrate material.The sensors can be utilized as two-dimensional sensors, or the paper substrate material can be folded to arrange the sensors in a three dimensional conformation. For example, three sensors can be patterned on a paper substrate and folded into a cube such that the three sensors are orthogonally positioned on the faces of a cube, permitting simultaneous measurement of accelerations along three orthogonal directions (x-y-z). These paper-based sensors can be mass produced by incorporating highly developed technologies for automatic paper cutting, folding, and screen-printing.Also provided are methods of modifying paper for use as a substrate material in MEMS devices.

Abstract translation: 提供了使用诸如纸或织物之类的便宜的基底材料制造的MEMS器件。 使用纸作为基材，成本低，制备简单，重量轻，一次性压阻式传感器，包括加速度计。 信号处理电路也可以在衬底材料上图案化。 传感器可以用作二维传感器，或者可以将纸基材料折叠成三维构型。 例如，可以将三个传感器图案化在纸基底上并折叠成立方体，使得三个传感器正交地放置在立方体的表面上，允许沿着三个正交方向（x-y-z）同时测量加速度。 这些纸基传感器可以通过结合高度开发的自动切纸，折叠和丝网印刷技术进行批量生产。 还提供了修改用作MEMS器件中的基底材料的纸的方法。