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公开(公告)号:US5170224A
公开(公告)日:1992-12-08
申请号:US604635
申请日:1990-10-29
申请人: Mitsugu Terada , Ken Ohmata , Kazuo Shimazaki , Yasuo Oeda , Yuichiro Terashi
发明人: Mitsugu Terada , Ken Ohmata , Kazuo Shimazaki , Yasuo Oeda , Yuichiro Terashi
CPC分类号: G01J9/00 , G01J2003/1239 , G01J2003/1243 , G01J3/2803
摘要: This invention is provided with a wavelength selecting means for uses in selectively receiving beam in compliance with each of a reference beam and a measured beam in order to simplify a correction or comparison of oscillating wavelengths in the laser device and further to improve a reliability and a controlling responsive speed.