公开(公告)号：US5214659A

公开(公告)日：1993-05-25

申请号：US604634

申请日：1990-10-29

申请人： Mitsugu Terada ,  Ken Ohmata ,  Kazuo Shimazaki ,  Yasuo Oeda ,  Yuichiro Terashi

发明人： Mitsugu Terada ,  Ken Ohmata ,  Kazuo Shimazaki ,  Yasuo Oeda ,  Yuichiro Terashi

IPC分类号： H01S3/106 ,  H01S3/137 ,  H01S3/225

CPC分类号： H01S3/137 ,  H01S3/1062 ,  H01S3/225

摘要： Angles of inclination of the two wavelength selection elements arranged on an optical path of a laser beam source are varied to make a laser output variable. Light transmitting ranges of the two wavelength selection elements are coincided with each other so as to adjust the light wavelength bands, thereby the laser beam is narrowed without increasing its fineness.

公开(公告)号：US5170224A

公开(公告)日：1992-12-08

申请号：US604635

申请日：1990-10-29

申请人： Mitsugu Terada ,  Ken Ohmata ,  Kazuo Shimazaki ,  Yasuo Oeda ,  Yuichiro Terashi

发明人： Mitsugu Terada ,  Ken Ohmata ,  Kazuo Shimazaki ,  Yasuo Oeda ,  Yuichiro Terashi

IPC分类号： G01J3/30 ,  G01J3/12 ,  G01J3/28 ,  G01J9/00 ,  H01S3/00

CPC分类号： G01J9/00 ,  G01J2003/1239 ,  G01J2003/1243 ,  G01J3/2803

摘要： This invention is provided with a wavelength selecting means for uses in selectively receiving beam in compliance with each of a reference beam and a measured beam in order to simplify a correction or comparison of oscillating wavelengths in the laser device and further to improve a reliability and a controlling responsive speed.

公开(公告)号：US5130999A

公开(公告)日：1992-07-14

申请号：US623094

申请日：1990-12-06

申请人： Mitsuo Maeda ,  Kazuo Shimazaki

发明人： Mitsuo Maeda ,  Kazuo Shimazaki

IPC分类号： H01S3/04 ,  H01S3/042 ,  H01S3/093 ,  H01S5/022

CPC分类号： H01S3/0931 ,  H01S3/042 ,  H01S3/0407

摘要： It is an object of the present invention to provide A laser device of long life. In the laser device, light source is housed in transparent cooling vessel, and the vessel is filled with a cooling liquid which is circulated. The electrodes of the light source project out of the cooling vessel. Reflectors are provided outside the cooling vessel. The electrodes and the reflectors are out of contact with the cooling liquid.It is another object of the present invention to stabilize laser oscillation. A light source is housed in a first transparent cooling vessel. The first cooling vessel is filled with a first cooling liquid. A laser medium is housed in a second transparent cooling vessel. The second cooling vessel is filled with a second cooling liquid. A heat insulation layer is provided between the first and the second cooling vessels so that the first and the second cooling liquids are thermally insulated from each other.

公开(公告)号：US5113402A

公开(公告)日：1992-05-12

申请号：US585925

申请日：1990-09-21

申请人： Akira Itani ,  Kazuo Shimazaki

发明人： Akira Itani ,  Kazuo Shimazaki

IPC分类号： G02F1/35 ,  G02F1/37 ,  G03F7/20 ,  H01L21/027 ,  H01S3/108

CPC分类号： G03F7/70025 ,  G02F1/37 ,  G03F7/2053 ,  G03F7/70575 ,  H01L21/0275 ,  G02F2001/354

摘要： A non-linear optical material is used to convert a solid state laser ray of light output of a first wavelength into light of a shorter wavelength. The light output of shorter wavelength is suitable for use as a light source for lithography. Wavelengths as short as those obtained by excimer laser devices can be achieved. When the light source is used in lithography, the degree of integration of ICs for the new generation of 16MDRAM can be achieved more safely and simply than possible with excimer lasers.

摘要翻译： 本发明是考虑到实际情况而设计的，并尝试实现与作为光刻用光源的准分子激光器的波长相同的波长的紧凑型固体激光器件。 本发明涉及一种设备，其特征在于提供一种固体激光器（1,2,3,4,5,7）和非线性光学材料（8,11），其将固态激光从固态 将波长的激光转换成短波长的光线并将其用作光刻的光源。 另外，本发明涉及一种半导体光刻方法，其特征在于，使用非线性光学材料将从波长固体激光器输出的光的激光射线转换为短波长的光线，并利用 短波长的激光光线。 使用本发明，与准分子激光器相比，可以通过更安全且更简单的固态激光器获得处理16MDRAM之后的IC并且适合于IC制造工艺的集成度的光源，从而允许精确 要形成的半导体电路图案。