公开(公告)号：US5552884A

公开(公告)日：1996-09-03

申请号：US358204

申请日：1994-12-16

申请人： Yufeng Li ,  Peter R. Goglia

发明人： Yufeng Li ,  Peter R. Goglia

IPC分类号： G11B21/21 ,  G11B33/10 ,  G01J1/02

CPC分类号： G11B21/21 ,  G11B33/10

摘要： The present invention provides a calibration standard for the uniform calibration of flying height testers. The calibration standard comprises a head assembly held in contact with a transparent disc through the use of a load spring. The transparent disc has a plurality of grooves formed in a surface facing the head assembly. A cover case is attached to the glass disc at one end and provides a sealed environment for the interface between the head assembly and the transparent disc.

摘要翻译： 本发明提供了用于飞行高度测试仪的均匀校准的校准标准。 校准标准包括通过使用负载弹簧与透明盘保持接触的头组件。 透明盘具有形成在面向头组件的表面中的多个槽。 一个盖子在一端连接到玻璃盘上，并为头部组件和透明盘之间的界面提供一个密封的环境。

公开(公告)号：US5453831A

公开(公告)日：1995-09-26

申请号：US303418

申请日：1994-09-09

申请人： Yufeng Li ,  Peter R. Goglia ,  Christopher C. Zahn

发明人： Yufeng Li ,  Peter R. Goglia ,  Christopher C. Zahn

IPC分类号： G11B5/60 ,  G11B33/10 ,  G01J1/02 ,  G01B11/02

CPC分类号： G11B5/6005 ,  G11B33/10

摘要： A calibration standard for uniformly calibrating flying height testers. The calibration standard includes a wedge slider held in contact with a glass disc by a load bridge, load spring and cover case. The wedge slider has a first rail and a second rail extending along its length and has a raised end to form an optical wedge between the glass disc and the first and second rails. A profilometer is used to map any surface irregularities on the surfaces of the first and second rails facing the disc, allowing the calculation of an accurate expected distance, or flying height, between the surfaces and the disc at each horizontal location along the length of the wedge slider. The expected flying height is compared to a flying height measured through optical interference techniques to calibrate the flying height tester.

摘要翻译： 用于统一校准飞行高度测试仪的校准标准。 校准标准包括通过负载桥，负载弹簧和盖壳与玻璃盘保持接触的楔形滑块。 楔形滑块具有沿其长度延伸的第一轨道和第二轨道，并且具有升高的端部，以在玻璃盘和第一和第二轨道之间形成光学楔块。 轮廓仪用于映射面对盘的第一和第二轨道的表面上的任何表面凹凸，允许计算在每个水平位置处的表面和盘之间的准确预期距离或飞行高度，沿着 楔形滑块。 将预期的飞行高度与通过光学干涉技术测量的飞行高度进行比较，以校准飞行高度测试仪。