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公开(公告)号：US11686901B2
公开(公告)日：2023-06-27
申请号：US17448804
申请日：2021-09-24
Applicant: GlobalFoundries U.S. Inc.
Inventor： Aboketaf Abdelsalam , Yusheng Bian
IPC: G02B6/27
CPC classification number: G02B6/2773
Abstract: Embodiments of the disclosure provide an optical polarizer with a varying vertical thickness, and methods to form the same. An optical polarizer according to the disclosure may include a first waveguide core over a semiconductor substrate. A first cladding material is on at least an upper surface of the first waveguide core. A second waveguide core over the first waveguide core and above the first cladding material. The second waveguide core includes a first segment having a vertical thickness that varies along a length of the first segment. A second cladding material is at least partially surrounding the second waveguide core. Transfer of one of a transverse electric (TE) mode signal and a transverse magnetic (TM) mode signal from the first waveguide core to the second waveguide core occurs between the first segment of the second waveguide core and the first waveguide core.
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公开(公告)号：US11644695B2
公开(公告)日：2023-05-09
申请号：US17091394
申请日：2020-11-06
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian
CPC classification number: G02F1/011 , G02F1/0102 , G02F1/0126 , G02F1/0147
Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core having an end surface that terminates proximate to an edge of a substrate. The waveguide core contains a material having a first state with a first refractive index in response to an applied stimulus and a second state with a second refractive index different from the first refractive index.
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公开(公告)号：US20230117802A1
公开(公告)日：2023-04-20
申请号：US18083716
申请日：2022-12-19
Applicant: GlobalFoundries U.S. Inc.
Inventor： Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy
Abstract: Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.
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公开(公告)号：US20230097528A1
公开(公告)日：2023-03-30
申请号：US17448804
申请日：2021-09-24
Applicant: GlobalFoundries U.S. Inc.
Inventor： Aboketaf Abdelsalam , Yusheng Bian
IPC: G02B6/27
Abstract: Embodiments of the disclosure provide an optical polarizer with a varying vertical thickness, and methods to form the same. An optical polarizer according to the disclosure may include a first waveguide core over a semiconductor substrate. A first cladding material is on at least an upper surface of the first waveguide core. A second waveguide core over the first waveguide core and above the first cladding material. The second waveguide core includes a first segment having a vertical thickness that varies along a length of the first segment. A second cladding material is at least partially surrounding the second waveguide core. Transfer of one of a transverse electric (TE) mode signal and a transverse magnetic (TM) mode signal from the first waveguide core to the second waveguide core occurs between the first segment of the second waveguide core and the first waveguide core.
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公开(公告)号：US20230083198A1
公开(公告)日：2023-03-16
申请号：US17475689
申请日：2021-09-15
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian , Roderick A. Augur
IPC: G02B6/42
Abstract: Structures including an optical coupler and methods of fabricating a structure including an optical coupler. The structure includes a substrate, a first dielectric layer on the substrate, and an optical coupler having a first grating and a second grating. The first grating has a first plurality of segments positioned in a first level over the first dielectric layer. The second grating has a second plurality of segments positioned in a second level over the first dielectric layer. The second level differs in elevation above the first dielectric layer from the first level. The second plurality of segments are positioned in the second level to overlap with the first plurality of segments of the first grating, and the second plurality of segments comprise a metal. A second dielectric layer is positioned in a vertical direction between the first level and the second level.
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Patent Agency Ranking
公开(公告)号：US20230073958A1
公开(公告)日：2023-03-09
申请号：US18055576
申请日：2022-11-15
Applicant: GlobalFoundries U.S. Inc.
Inventor： Michal Rakowski , Petar I. Todorov , Yusheng Bian , Won Suk Lee , Asif J. Chowdhury , Kenneth J. Giewont
Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).
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227.发明申请公开(公告)号：US20230047046A1
公开(公告)日：2023-02-16
申请号：US17973618
申请日：2022-10-26
Applicant: GlobalFoundries U.S. Inc.
Inventor： Ryan Sporer , George R. Mulfinger , Yusheng Bian
IPC: H01L27/12 , H01L21/762 , H01L27/146 , H01L29/06 , H01L21/84
Abstract: Structures for a photonics chip that include a fully-depleted silicon-on-insulator field-effect transistor and related methods. A first device region of a substrate includes a first device layer, a first portion of a second device layer, and a buried insulator layer separating the first device layer from the first portion of the second device layer. A second device region of the substrate includes a second portion of the second device layer. The first device layer, which has a thickness in a range of about 4 to about 20 nanometers, transitions in elevation to the second portion of the second device layer with a step height equal to a sum of the thicknesses of the first device layer and the buried insulator layer. A field-effect transistor includes a gate electrode on the top surface of the first device layer. An optical component includes the second portion of the second device layer.
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公开(公告)号：US11567266B1
公开(公告)日：2023-01-31
申请号：US17551377
申请日：2021-12-15
Applicant: GlobalFoundries U.S. Inc.
Inventor： Judson Holt , Yusheng Bian , Qizhi Liu , Elizabeth Strehlow
Abstract: Structures for a grating coupler and methods of fabricating a structure for a grating coupler. The structure includes a grating coupler having a central portion and edge portions. The central portion and the edge portions define a sidewall, and the central portion and the edge portions have a first longitudinal axis along which the edge portions are arranged in a spaced relationship. Each edge portion projects from the sidewall at an angle relative to the first longitudinal axis. A waveguide core is optically coupled to the grating coupler. The first longitudinal axis is aligned in a first direction, and the waveguide core has a second longitudinal axis that is aligned in a second direction different from the first direction.
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公开(公告)号：US11567261B2
公开(公告)日：2023-01-31
申请号：US17173639
申请日：2021-02-11
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy
Abstract: Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.
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公开(公告)号：US11550200B2
公开(公告)日：2023-01-10
申请号：US16808613
申请日：2020-03-04
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian , Ajey Poovannummoottil Jacob
IPC: G02F1/313
Abstract: One illustrative device disclosed herein includes a lower waveguide structure and an upper body structure positioned above at least a portion of the lower waveguide structure. In this example, the device also includes a grating structure positioned in the upper body structure, wherein the grating structure comprises a plurality of grating elements that comprise a tunable material whose index of refraction may be changed by application of energy to the tunable material.
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