公开(公告)号：US20090297651A1

公开(公告)日：2009-12-03

申请号：US11917331

申请日：2006-03-16

申请人： Hak-Yong Kim

发明人： Hak-Yong Kim

IPC分类号： B29C47/30

CPC分类号： D01D4/02 ,  D01D5/0069 ,  D01F8/00 ,  D04H1/728 ,  D04H3/00 ,  D04H3/005 ,  D04H3/033 ,  D04H3/16

摘要： Disclosed is a nozzle block for electrospinning which is able to simultaneously electrically spin two or more different types of polymer spinning dopes, wherein a single-layer distribution plate for dividing a planar space within the nozzle block into two or more segments is installed within the nozzle block. The apparatus is simple because a single-layer distribution plate is installed instead of a conventional multi layer distribution plate. A hybrid nano fiber laminate can be prepared without any additional laminating procedure because two or more different polymer spinning dopes can be simultaneously electrically spun through different nozzles arranged within the same nozzle block. It is possible to prepare a hybrid nano fiber nonwoven fabric or filaments or the like composed of two or more types of nano fibers different in thermal properties or physical properties because their fiber diameter or polymer type are different from each other.

摘要翻译： 公开了一种用于静电纺丝的喷嘴块，其能够同时电动旋转两种或更多种不同类型的聚合物纺丝剂，其中用于将喷嘴块内的平面空间分成两个或更多个部分的单层分配板安装在喷嘴内 块。 该装置简单，因为安装了单层分配板而不是传统的多层分配板。 可以制备混合纳米纤维层压体而不需要任何另外的层压方法，因为两个或多个不同的聚合物纺丝剂可以通过布置在相同喷嘴块内的不同喷嘴同时电纺丝。 由于它们的纤维直径或聚合物类型彼此不同，可以制备由热性能或物理性质不同的两种或更多种纳米纤维组成的混合纳米纤维非织造织物或长丝等。

公开(公告)号：US20060086172A1

公开(公告)日：2006-04-27

申请号：US11196351

申请日：2005-08-04

申请人： Seung-jun Lee ,  Hak-yong Kim ,  Yoo-seok Jang ,  Chang-hun Park ,  Seung-Yong Doh

发明人： Seung-jun Lee ,  Hak-yong Kim ,  Yoo-seok Jang ,  Chang-hun Park ,  Seung-Yong Doh

IPC分类号： G01L27/00

CPC分类号： G01L27/005 ,  G01L27/007

摘要： A method of compensating sensor data used in an interlock system comprises setting a predetermined drift upper limit and a predetermined drift lower limit, creating a reference pattern information about a reference model, creating a sensor pattern information about the sensor data, determining whether the sensor pattern information satisfies the drift upper limit and the drift lower limit, calculating a drift offset according to the reference pattern information and the sensor pattern information when the sensor pattern information satisfies the drift upper limit and the drift lower limit, and compensating the sensor data according to the calculated drift offset. Thus, a method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which interlock setting/managing for identical sets of equipment under the interlock system is simplified through a statistic drift compensation algorithm, and an allowable variation between wafers is minimized, thereby enhancing detection reliability of a defective wafer. A method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which an allowable variation between sensors varying depending on a driving time for a set of equipment, an RF time, the number of wafers, etc. is minimized, thereby enhancing detection reliability of a defective wafer.

摘要翻译： 一种对联锁系统中使用的传感器数据进行补偿的方法包括设定预定的漂移上限和预定的漂移下限，创建关于参考模型的参考模式信息，创建关于传感器数据的传感器模式信息，确定传感器模式 信息满足漂移上限和漂移下限，当传感器图案信息满足漂移上限和漂移下限时，根据参考图案信息和传感器图案信息计算漂移偏移量，并根据 计算漂移偏移。 因此，补偿传感器数据的方法和评估互锁系统的互锁的方法，其中通过统计漂移补偿算法简化了互锁系统下的相同设备的互锁设置/管理，以及晶片之间的允许变化 从而提高缺陷晶片的检测可靠性。 一种补偿传感器数据的方法和评估互锁系统的互锁的方法，其中根据一组设备的驱动时间，RF时间，晶片数等而变化的传感器之间的允许变化被最小化 从而提高缺陷晶片的检测可靠性。