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    Method of compensating sensor data and evaluating an interlock of an interlock system
    1.
    发明申请
    Method of compensating sensor data and evaluating an interlock of an interlock system 有权
    补偿传感器数据和评估互锁系统互锁的方法

    公开(公告)号：US20060086172A1

    公开(公告)日：2006-04-27

    申请号：US11196351

    申请日：2005-08-04

    申请人： Seung-jun Lee ,  Hak-yong Kim ,  Yoo-seok Jang ,  Chang-hun Park ,  Seung-Yong Doh

    发明人： Seung-jun Lee ,  Hak-yong Kim ,  Yoo-seok Jang ,  Chang-hun Park ,  Seung-Yong Doh

    IPC分类号： G01L27/00

    CPC分类号： G01L27/005 ,  G01L27/007

    摘要： A method of compensating sensor data used in an interlock system comprises setting a predetermined drift upper limit and a predetermined drift lower limit, creating a reference pattern information about a reference model, creating a sensor pattern information about the sensor data, determining whether the sensor pattern information satisfies the drift upper limit and the drift lower limit, calculating a drift offset according to the reference pattern information and the sensor pattern information when the sensor pattern information satisfies the drift upper limit and the drift lower limit, and compensating the sensor data according to the calculated drift offset. Thus, a method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which interlock setting/managing for identical sets of equipment under the interlock system is simplified through a statistic drift compensation algorithm, and an allowable variation between wafers is minimized, thereby enhancing detection reliability of a defective wafer. A method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which an allowable variation between sensors varying depending on a driving time for a set of equipment, an RF time, the number of wafers, etc. is minimized, thereby enhancing detection reliability of a defective wafer.

    摘要翻译： 一种对联锁系统中使用的传感器数据进行补偿的方法包括设定预定的漂移上限和预定的漂移下限，创建关于参考模型的参考模式信息，创建关于传感器数据的传感器模式信息，确定传感器模式 信息满足漂移上限和漂移下限，当传感器图案信息满足漂移上限和漂移下限时，根据参考图案信息和传感器图案信息计算漂移偏移量，并根据 计算漂移偏移。 因此，补偿传感器数据的方法和评估互锁系统的互锁的方法，其中通过统计漂移补偿算法简化了互锁系统下的相同设备的互锁设置/管理，以及晶片之间的允许变化 从而提高缺陷晶片的检测可靠性。 一种补偿传感器数据的方法和评估互锁系统的互锁的方法，其中根据一组设备的驱动时间，RF时间，晶片数等而变化的传感器之间的允许变化被最小化 从而提高缺陷晶片的检测可靠性。