公开(公告)号：US06624403B2

公开(公告)日：2003-09-23

申请号：US09975515

申请日：2001-10-11

Applicant: Li Chen ,  Martin Ebert ,  Dale Linseth

Inventor： Li Chen ,  Martin Ebert ,  Dale Linseth

IPC: G02B2740

CPC classification number: G02B7/32

Abstract: An autofocus system for maintaining a sample in the focal plane of a primary lens is disclosed. A light source generates a monitor beam which is focused onto the sample through the primary lens. The reflected beam passes back through the primary lens and is directed to a secondary lens. The beam is then split by a reflective wedge into two portions with different path lengths such that the beam waists of the two portions are spatially separated. An aperture is located between the two beam waists. A bi-cell photodetector measures the intensity of the two beam portions transmitted by the aperture. The measured intensity levels vary with respect to the position of the sample. By comparing the measured intensity levels, an indication of the position of the sample can be obtained.

公开(公告)号：US06411381B1

公开(公告)日：2002-06-25

申请号：US09562256

申请日：2000-05-02

Applicant: David E. Aspnes ,  Martin Ebert

Inventor： David E. Aspnes ,  Martin Ebert

IPC: G01J304

CPC classification number: G01J3/10 ,  G01J3/024 ,  G01J3/04

Abstract: A spectroscopy system having enhanced noise reduction that comprises (i) an arc lamp light source of emitted light, which emitted light is projected as an image of the light source; (ii) a slit aperture through which the emitted light is projected; and (iii) a detector operably associated with the slit aperture for detecting the emitted light. The slit aperture, the arc lamp, and the image of the arc lamp each have a major axis. The major axis of the slit aperture is oriented essentially orthogonally to the major axis of the image of the arc lamp, so that the signal-to-noise ratio of the spectroscopy system is improved as compared to the signal-to-noise ratio of the spectroscopy system when the major axis of the slit aperture is oriented essentially parallel to the major axis of the image of the arc lamp.

Abstract translation: 一种具有增强的噪声降低的光谱系统，其包括（i）发射的光的弧光灯光源，其被发射为光源的图像; （ii）狭缝孔，所述发射的光被投射通过所述狭缝孔; 和（iii）与狭缝孔可操作地相关联的检测发射光的检测器。 狭缝孔径，弧光灯和弧光灯的图像各自具有长轴。 狭缝孔的长轴基本上与弧光灯的图像的主轴正交地定向，使得与信号噪声比的信噪比相比，光谱系统的信噪比得到改善 当狭缝孔的长轴基本上平行于电弧灯的图像的长轴取向时，光谱系统。