公开(公告)号：US09927722B2

公开(公告)日：2018-03-27

申请号：US15052201

申请日：2016-02-24

Applicant: ASML NETHERLANDS B.V.

Inventor： Koos Van Berkel ,  Duygu Akbulut ,  Jeroen Johan Maarten Van De Wijdeven ,  Ferry Zijp

IPC: G03F7/20 ,  G03F9/00 ,  G02B21/00 ,  G01N21/956

CPC classification number: G03F7/70775 ,  G01N21/956 ,  G02B21/0016 ,  G03F7/70625 ,  G03F7/70633 ,  G03F9/7019

Abstract: A method and apparatus for position control of a component relative to a surface is disclosed. The method may include calculating an estimated effect of, or derived from, Casimir force acting between the component and the surface, and compensating positioning of the component relative to the surface using the estimated effect.