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Patent Agency Ranking
公开(公告)号：US20160266503A1
公开(公告)日：2016-09-15
申请号：US15065674
申请日：2016-03-09
Applicant: ASML NETHERLANDS B.V.
Inventor： Peter Danny Van Voorst , Duygu Akbulut , Koos Van Berkel , Jeroen Johan Maarten Van De Wijdeven , Ferry Zijp
CPC classification number: G03F7/70483 , G01B11/00 , G01N21/956 , G02B21/0016 , G02B21/33 , G02B27/0988 , G03F7/70625 , G03F7/70633
Abstract: A method of position control of an optical component relative to a surface is disclosed. The method may include: obtaining a first signal by a first position measurement process; controlling relative movement between the optical component and the surface for a first range of motion using the first signal; obtaining a second signal by a second position measurement process different than the first position measurement process; and controlling relative movement between the optical component and the surface for a second range of motion using the second signal, the second range of motion being nearer the surface than the first range of motion.
Abstract translation: 公开了一种光学部件相对于表面的位置控制的方法。 该方法可以包括：通过第一位置测量处理获得第一信号; 使用所述第一信号来控制所述光学部件和所述表面之间的第一运动范围的相对运动; 通过与第一位置测量处理不同的第二位置测量处理获得第二信号; 以及使用所述第二信号来控制所述光学部件和所述表面之间的相对运动的第二运动范围，所述第二运动范围比所述第一运动范围更靠近所述表面。
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公开(公告)号：US11828344B2
公开(公告)日：2023-11-28
申请号：US17633000
申请日：2020-07-09
Applicant: ASML Netherlands B.V.
Inventor： Jeroen Johan Maarten Van De Wijdeven , Johannes Petrus Martinus Bernardus Vermeulen , Jeroen Pieter Starreveld , Stan Henricus Van Der Meulen
CPC classification number: F16F15/022 , F16F13/005 , G03F7/709 , G03F7/70833 , F16F2222/08
Abstract: The invention provides a support with first and second end portions. The second end portion is on the side opposite to the first end portion in a longitudinal direction of the support. A coil spring is arranged between the first and second end portions. The coil spring comprises a first spiral member that extends between the first and second end portions in a circumferential direction of the support, and a second spiral member that extends between the first and second end portions in a circumferential direction of the support. The first and second spiral members extend in the longitudinal direction around a longitudinal axis of the support, wherein the first spiral member of the coil spring and the second spiral member of the coil spring are moveable relative to each other, and wherein the support further comprises a damper device that is attached to the first spiral member.
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公开(公告)号：US09811001B2
公开(公告)日：2017-11-07
申请号：US15065674
申请日：2016-03-09
Applicant: ASML NETHERLANDS B.V.
Inventor： Peter Danny Van Voorst , Duygu Akbulut , Koos Van Berkel , Jeroen Johan Maarten Van De Wijdeven , Ferry Zijp
IPC: G01B11/04 , G02B7/02 , G03B27/32 , G03B27/74 , G03F7/20 , G02B21/00 , G01N21/956 , G01B11/00 , G02B27/09
CPC classification number: G03F7/70483 , G01B11/00 , G01N21/956 , G02B21/0016 , G02B21/33 , G02B27/0988 , G03F7/70625 , G03F7/70633
Abstract: A method of position control of an optical component relative to a surface is disclosed. The method may include: obtaining a first signal by a first position measurement process; controlling relative movement between the optical component and the surface for a first range of motion using the first signal; obtaining a second signal by a second position measurement process different than the first position measurement process; and controlling relative movement between the optical component and the surface for a second range of motion using the second signal, the second range of motion being nearer the surface than the first range of motion.
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公开(公告)号：US10185224B2
公开(公告)日：2019-01-22
申请号：US15569086
申请日：2016-04-19
Applicant: ASML Netherlands B.V.
Inventor： Ferry Zijp , Duygu Akbulut , Peter Danny Van Voorst , Jeroen Johan Maarten Van De Wijdeven , Koos Van Berkel
Abstract: A method involving providing incident radiation of a first polarization state by an optical component into an interface of an object with an external environment, wherein a surface is provided adjacent the interface and separated by a gap from the interface, detecting, from incident radiation reflected from the interface and from the surface, radiation of a second different polarization state arising from the reflection of incident radiation of the first polarization at the interface as distinct from the radiation of the first polarization state in the reflected radiation, and producing a position signal representative of a relative position between the focus of the optical component and the object.
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公开(公告)号：US09927722B2
公开(公告)日：2018-03-27
申请号：US15052201
申请日：2016-02-24
Applicant: ASML NETHERLANDS B.V.
Inventor： Koos Van Berkel , Duygu Akbulut , Jeroen Johan Maarten Van De Wijdeven , Ferry Zijp
IPC: G03F7/20 , G03F9/00 , G02B21/00 , G01N21/956
CPC classification number: G03F7/70775 , G01N21/956 , G02B21/0016 , G03F7/70625 , G03F7/70633 , G03F9/7019
Abstract: A method and apparatus for position control of a component relative to a surface is disclosed. The method may include calculating an estimated effect of, or derived from, Casimir force acting between the component and the surface, and compensating positioning of the component relative to the surface using the estimated effect.
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