公开(公告)号：US20220057208A1

公开(公告)日：2022-02-24

申请号：US17410924

申请日：2021-08-24

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  John A. Geen

IPC: G01C19/5712

Abstract: According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.

公开(公告)号：US10746548B2

公开(公告)日：2020-08-18

申请号：US14532256

申请日：2014-11-04

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Igor P. Prikhodko

IPC: G01C19/5677 ,  G01C19/5684 ,  G01C19/567

Abstract: Novel structural features applicable to a variety of inertial sensors. A composite ring composed of concentric subrings is supported by a compliant support structure suspending the composite ring relative to a substrate. The compliant support structure may either be interior or exterior to the composite ring. The compliant support may be composed of multiple substantially concentric rings coupled to neighboring rings by transverse members regularly spaced at intervals that vary with radius relative to a central axis of symmetry. Subrings making up the composite ring may vary in width so as to provide larger displacement amplitudes at intermediate radii, for example. In other embodiments, electrodes are arranged to reduce sensitivity to vibration and temperature, and shock stops are provided to preclude shorting in response to shocks.

公开(公告)号：US20180172445A1

公开(公告)日：2018-06-21

申请号：US15383366

申请日：2016-12-19

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

IPC: G01C19/567 ,  G01C19/5712

CPC classification number: G01C19/574

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

公开(公告)号：US20160123735A1

公开(公告)日：2016-05-05

申请号：US14532256

申请日：2014-11-04

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Igor P. Prikhodko

IPC: G01C19/5677

Abstract: Novel structural features applicable to a variety of inertial sensors. A composite ring composed of concentric subrings is supported by a compliant support structure suspending the composite ring relative to a substrate. The compliant support structure may either be interior or exterior to the composite ring. The compliant support may be composed of multiple substantially concentric rings coupled to neighboring rings by transverse members regularly spaced at intervals that vary with radius relative to a central axis of symmetry. Subrings making up the composite ring may vary in width so as to provide larger displacement amplitudes at intermediate radii, for example. In other embodiments, electrodes are arranged to reduce sensitivity to vibration and temperature, and shock stops are provided to preclude shorting in response to shocks.

Abstract translation: 新颖的结构特征适用于各种惯性传感器。 由同心子环组成的复合环由相对于衬底悬挂复合环的柔性支撑结构支撑。 柔性支撑结构可以在复合环的内部或外部。 顺应性支撑件可以由多个基本上同心的环组成，所述多个基本上同心的环通过相对于中心对称轴线以半径相对规则地间隔开的横向构件联接到相邻环。 构成复合环的子弹的宽度可以变化，以便例如在中间半径处提供较大的位移振幅。 在其他实施例中，电极被布置成降低对振动和温度的敏感性，并且提供冲击停止以防止响应于冲击的短路。