Method for calibrating vibratory gyroscope

    公开(公告)号:US09671247B2

    公开(公告)日:2017-06-06

    申请号:US14332602

    申请日:2014-07-16

    申请人: Innalabs Limited

    摘要: The present invention is concerned with a method of calibrating a vibrating gyroscope. The method comprises exciting a vibration along an excitation axis of a resonant structure wherein the excitation axis is positioned at a first angular position, sensing the vibration of the resonant structure on a first sensing axis of the resonant structure while the excitation axis is positioned at the first angular position, generating a first sensing signal indicative of the sensed vibration of the resonant structure on the first sensing axis, rotating the excitation axis in a continuous manner around the resonant structure to a second angular position, sensing the vibration of the resonant structure on a second sensing axis of the resonant structure while the excitation axis is positioned at the second angular position, generating a second sensing signal indicative of the sensed vibration of the resonant structure on the second sensing axis and adding the first sensing signal to the second sensing signal in order to derive a bias of the gyroscope.

    Method of calibrating bias drift with temperature for a vibrating structure gyroscope

    公开(公告)号:US20050256659A1

    公开(公告)日:2005-11-17

    申请号:US10523399

    申请日:2003-11-12

    IPC分类号: G01C19/567 G06F19/00

    CPC分类号: G01C19/567

    摘要: A method of calibrating bias drift with operating temperature over an operating temperature range for a vibrating structure gyroscope having a substantially planar, substantially ring shaped silicon vibrating structure (1), primary drive means (7) for putting and maintaining the vibrating structure (1) in carrier mode resonance, and secondary drive means (9) for nulling response mode motion of the vibrating structure is described. The secondary drive means (9) includes means to separate a detected response mode motion signal into a real component induced by applied rotation of the vibrating structure gyroscope and a quadrature component which is an error term indicative of error mismatch between carrier mode resonance frequency and response mode resonance frequency. The method includes the steps of measuring, over an operating temperature range of the vibrating structure gyroscope, primary drive means voltage P which is a measure of change in quality factor LQ of the vibrating structure with temperature, vibrating structure frequency f which is a measure of change of temperature of the vibrating structure, secondary drive quadrature component values Sq which is a measure of real component bias errors with temperature, and secondary drive real component values Sr which is a measure of change in bias, that is the zero inertial rate offset, of the vibrating structure gyroscope with temperature, substituting the values obtained in the relationship S r = ∑ k ⁢ f k ⁢ ∑ l ⁢ S q l ⁢ ∑ m ⁢ P m ⁢ a klm where aklm are bias calibration coefficients for the vibrating structure gyroscope over the operating temperature range, and calculating from the relationship the coefficients aklm to provide a set of bias calibration coefficients for the vibrating structure gyroscope over the tested operating temperature range.

    Inertial rotation sensor having its sensing element mounted directly on the body
    4.
    发明申请
    Inertial rotation sensor having its sensing element mounted directly on the body 审中-公开
    惯性旋转传感器,其感测元件直接安装在主体上

    公开(公告)号:US20050039529A1

    公开(公告)日:2005-02-24

    申请号:US10915336

    申请日:2004-08-11

    IPC分类号: G01C19/567 G01P3/00 G01P15/00

    CPC分类号: G01C19/567

    摘要: The inertial rotation sensor comprises a body in which there are mounted sensing elements each comprising a bell-shaped resonator secured facing electrodes carried by an electrode-carrier stand, the body being made of a material having a coefficient of thermal expansion close to that of the electrode-carrier stand, and the electrode-carrier stand being secured directly on the body.

    摘要翻译: 惯性旋转传感器包括主体,其中安装有感测元件,每个感测元件包括保持面对由电极托架支架承载的电极的钟形谐振器,该主体由热膨胀系数接近于 电极载体支架,电极托架支架直接固定在主体上。

    VIBRATION TYPE GYROSCOPE
    5.
    发明申请

    公开(公告)号:US20190310106A1

    公开(公告)日:2019-10-10

    申请号:US16362045

    申请日:2019-03-22

    申请人: DENSO CORPORATION

    IPC分类号: G01C25/00 G01C19/567

    摘要: A gyroscope includes a MEMS sensor having a drive signal input terminal, a drive signal output terminal, and a sense signal output terminal. The gyroscope further includes a quadrature demodulator that demodulates a modulated sense signal and offset canceller circuits that cancel a direct current offset component included in an in-phase signal and a quadrature signal of the sense signal. The gyroscope has a quadrature error detector that detects a quadrature error based on the signals input from the offset canceller circuits and outputs an error signal. The gyroscope also has an IQ corrector circuit that receives the in-phase signal and the quadrature signal of the sense signal as inputs, and outputs a phase signal with a phase based on the error signal.

    Electronic circuit for measuring rotational speed in a MEMS gyroscope and method for actuating the circuit
    6.
    发明授权
    Electronic circuit for measuring rotational speed in a MEMS gyroscope and method for actuating the circuit 有权
    用于测量MEMS陀螺仪中的转速的电子电路和用于致动电路的方法

    公开(公告)号:US09528831B2

    公开(公告)日:2016-12-27

    申请号:US14552891

    申请日:2014-11-25

    IPC分类号: G01C19/5776 G01C19/567

    CPC分类号: G01C19/567 G01C19/5776

    摘要: The electronic circuit measures angular speed in a gyroscope, which includes a mass connected to a spring and a damping element, an actuation capacitor for actuating the mass and a detection capacitor for detecting motion of the mass. The electronic circuit includes a measurement resistor, which is connected to the moving mass and has a variation in resistive value equal to the oscillation frequency of the mass. The resistor is polarized to supply a measurement signal, which includes a carrier signal in phase with the oscillation of the mass and an angular speed signal phase shifted by π/2 relative to the carrier signal The measurement signal is supplied to an integration unit clocked by a clocking signal phase shifted by π/2 relative to the carrier signal and originating from the drive circuit. The angular speed signal is demodulated at the integration unit output.

    摘要翻译: 电子电路测量陀螺仪中的角速度,其包括连接到弹簧和阻尼元件的质量,用于致动质量的致动电容器和用于检测质量块的运动的检测电容器。 电子电路包括测量电阻,其连接到移动质量块,并具有等于质量的振荡频率的电阻值的变化。 电阻器被极化以提供测量信号,其包括与质量的振荡同相的载波信号和相对于载波信号偏移π/ 2的角速度信号相位。测量信号被提供给由时钟由 时钟信号相位相对于载波信号移位π/ 2并源自驱动电路。 角速度信号在积分单元输出处被解调。

    Method of angular measurement by means of a vibrating sensor to which modulated controls are applied
    7.
    发明授权
    Method of angular measurement by means of a vibrating sensor to which modulated controls are applied 有权
    通过施加调制控制的振动传感器进行角度测量的方法

    公开(公告)号:US08997567B2

    公开(公告)日:2015-04-07

    申请号:US13581787

    申请日:2011-03-23

    申请人: Vincent Ragot

    发明人: Vincent Ragot

    IPC分类号: G01C19/00 G01C19/567

    CPC分类号: G01C19/567

    摘要: Method of angular measurement by means of a sensor comprising an axisymmetric resonator associated with means for setting the resonator into vibration and with means for detecting an orientation of the vibration with respect to a reference frame of the sensor, comprising the steps of applying a precession control so as to slave an orientation of the vibration to an angular setpoint value and of determining an angular measurement on the basis of the precession control. The method comprises a phase of modulating the angular setpoint value in such a way that the said setpoint value uniformly sweeps an angular span of π radians and that a temporal derivative of the setpoint is deducted from the precession control prior to the determination of the angular measurement.

    摘要翻译: 一种通过传感器进行角度测量的方法,所述传感器包括与用于将所述谐振器设置为振动的装置相关联的轴对称共振器和用于检测所述振动相对于所述传感器的参考系的取向的装置,包括以下步骤:施加进动控制 从而将振动的取向从属于角度设定值,并且基于进动控制来确定角度测量。 该方法包括以这样的方式调制角度设定值的相位,使得所述设定值均匀地扫过角度跨度, 并且在确定角度测量之前从进动控制中扣除设定点的时间导数。

    MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED READING STAGE AND METHOD
    8.
    发明申请
    MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED READING STAGE AND METHOD 审中-公开
    具有改进的阅读阶段和方法的微电子机械陀螺仪

    公开(公告)号:US20130025368A1

    公开(公告)日:2013-01-31

    申请号:US13558266

    申请日:2012-07-25

    IPC分类号: G01C19/567

    CPC分类号: G01C19/5726 G01C19/5762

    摘要: A gyroscope, including: a body; a driving mass, mobile along a driving axis; a driving device that keeps the driving mass in oscillation according to the driving axis at a driving frequency; a sensing mass, coupled to the driving mass to move according to the driving axis and is mobile with respect to the driving mass along a sensing axis; and a reading device, which receives a sensing signal associated with the movement of the sensing mass and supplies an output signal indicating a position of the sensing mass. The reading device includes an analog-to-digital converter, which receives a voltage signal associated with the sensing signal. The voltage signal includes a useful signal component and a spurious signal component, phase-shifted with respect to one another by approximately 90°, and the analog-to-digital converter is configured for sampling the voltage signal at maximum values assumed by the useful signal component.

    摘要翻译: 陀螺仪,包括:身体; 驱动质量,沿着驱动轴移动; 驱动装置,其以驱动频率使驱动质量按照驱动轴保持在振荡状态; 耦合到所述驱动质量块的感测质量块,其根据所述驱动轴线移动并且沿着感测轴线可相对于所述驱动质量块移动; 以及读取装置,其接收与感测质量的移动相关联的感测信号,并提供指示感测质量的位置的输出信号。 读取装置包括模拟数字转换器,其接收与感测信号相关联的电压信号。 电压信号包括相对于彼此相移大约90°的有用信号分量和寄生信号分量,并且模数转换器被配置用于以由有用信号假定的最大值对电压信号进行采样 零件。

    Method and apparatus for measuring scalefactor variation in a vibrating structure gyroscope
    9.
    发明申请
    Method and apparatus for measuring scalefactor variation in a vibrating structure gyroscope 有权
    用于测量振动结构陀螺仪中的比例因子变化的方法和装置

    公开(公告)号:US20050257596A1

    公开(公告)日:2005-11-24

    申请号:US10523398

    申请日:2003-11-12

    IPC分类号: G01C19/567 G01P21/00

    CPC分类号: G01C19/567

    摘要: Apparatus for measuring variation in scalefactor from a predetermined value for a vibrating structure gyroscope has a vibrating structure (R), a fixed primary and a fixed secondary drive means (1, 13) for putting and maintaining the vibrating structure (R) in vibrating resonance, a fixed primary and a fixed secondary pick off means (2, 6) for detecting vibration of the vibrating structure (R), with the drive and pick off means (1, 13, 2, 6) being located radially around the vibrating structure (R), quadrature component and real component loop systems (7, 8), automatic gain control and phase locked loop systems (5, 22), a sin/cos pick off resolver (38) for receiving signals from the primary and secondary pick off means (2, 6) and for outputting signals to the quadrature component and real component loop systems (7, 8) and to the automatic gain control and phase locked loop systems (5, 22), a sin/cos drive resolver (37) for receiving output signals from the quadrature component and real component loop systems (7, 8) and from the automatic gain control and phase locked loop systems (5, 22) and for feeding control signals to the primary and secondary drive means (1, 13), and an angular displacement control (40) for feeding angular displacement control signals to the sin/cos drive and pick off resolvers (38, 37) to control uniform displacement of the resolved carrier and response mode drives and pick offs axes angularly around the vibrating structure (R), with respect to a central axis of the vibrating structure, at a known rate.

    摘要翻译: 用于测量振幅结构陀螺仪的预定值的比例因子变化的装置具有振动结构(R),固定的初级和固定次级驱动装置(1,3),用于将振动结构(R)放置和保持在振动共振 ,用于检测所述振动结构(R)的振动的固定的初级和固定次级检测装置(2,6),所述驱动和拾取装置(1,13,2,6)位于所述振动结构 (7),自动增益控制和锁相环系统(5,22),用于从初级和次级接收信号接收信号的sin / cos拾取解析器(38) 关闭装置(2,6),并且用于将信号输出到正交分量和实部环路系统(7,8)以及自动增益控制和锁相环系统(5,22),sin / cos驱动解算器(37 ),用于接收来自正交的输出信号 分量和实部环路系统(7,8)以及来自自动增益控制和锁相环系统(5,22),并且用于将控制信号馈送到主驱动装置和次驱动装置(1,13),以及角位移控制 (40),用于将角位移控制信号馈送到sin / cos驱动器并拾取分解器(38,37)以控制分辨的载体和响应模式的均匀位移驱动和拾取轴围绕振动结构(R)成角度地移动, 相对于振动结构的中心轴线。

    Vibration type gyroscope
    10.
    发明授权

    公开(公告)号:US11262212B2

    公开(公告)日:2022-03-01

    申请号:US16362045

    申请日:2019-03-22

    申请人: DENSO CORPORATION

    IPC分类号: G01C19/567 G01C25/00

    摘要: A gyroscope includes a MEMS sensor having a drive signal input terminal, a drive signal output terminal, and a sense signal output terminal. The gyroscope further includes a quadrature demodulator that demodulates a modulated sense signal and offset canceller circuits that cancel a direct current offset component included in an in-phase signal and a quadrature signal of the sense signal. The gyroscope has a quadrature error detector that detects a quadrature error based on the signals input from the offset canceller circuits and outputs an error signal. The gyroscope also has an IQ corrector circuit that receives the in-phase signal and the quadrature signal of the sense signal as inputs, and outputs a phase signal with a phase based on the error signal.