Abstract:
The present invention provides an electromagnetic wave detecting element that can suppress occurrence of cracking at a substrate peripheral portion, and occurrence of breakage of lead-out wires. An interlayer insulating film is formed so as to cover TFT switches on a substrate. An interlayer insulating film is formed so as to cover semiconductor layer of sensor portions that generate charges due to electromagnetic waves that are an object of detection being irradiated, and cover a region on the substrate where the interlayer insulating film is formed.
Abstract:
The present invention provides a radiographic image detector that may maintain even resolution in 6 directions before and after 3-pixel binning process or 4-pixel binning process. A radiation detector is disposed with plural pixels that have hexagonal shaped pixel regions, arrayed in a honeycomb pattern. Scan lines connected to TFT switches in each of the pixels are disposed one for each of the pixel rows. Grouped scan lines are also disposed one for each of the pixel rows for reading and combining 3 pixels or 4 pixels worth of charges at the same timing for plural pixel groups, each configured from 3 pixels or 4 pixels in a radiation detection element. ON signals are simultaneously sent by the grouped scanned lines to the TFT switches to perform 3-pixel binning or 4-pixel binning.
Abstract:
The present invention provides a radiographic imaging including, provided at an insulating substrate, sensor portions for radiation detection that generate charges due to receive radiation or light converted from radiation, first signal lines that are connected to the sensor portions for radiation detection and through which flow electric signals that correspond to the charges generated at the sensor portions for radiation detection, and second signal lines having a substantially same wiring pattern as the first signal lines. Detection of radiation is carried out on the basis of a difference between an electric signal flowing through the first signal line and an electric signal flowing through the second signal line, or a difference between values of digital data obtained by digitally converting an electric signal flowing through the first signal line and an electric signal flowing through the second signal line, respectively.