公开(公告)号：US10225917B2

公开(公告)日：2019-03-05

申请号：US16001441

申请日：2018-06-06

Applicant: GIGAPHOTON INC.

Inventor： Takahisa Fujimaki ,  Takayuki Yabu ,  Yuta Takashima ,  Fumio Iwamoto ,  Yutaka Shiraishi

IPC: H05G2/00 ,  G05D16/20 ,  G05D23/19

Abstract: A target supply device may include a nozzle configured to output a liquid target substance contained in a tank, an excitation element, a droplet detection unit configured to detect a droplet output from the nozzle, a passage time interval measurement unit configured to measure a passage time interval of droplets, and a control unit. The control unit may be configured to set a proper range of the passage time interval, change the duty value of the electric signal to be input to the excitation element, store the passage time interval measurement values of the droplets generated with respect to a plurality of duty values and variation thereof in association with the duty values, and determine an operation duty value based on the variation from among the duty values with which the passage time interval measurement values are within the proper range, among the duty values.

公开(公告)号：US10143074B2

公开(公告)日：2018-11-27

申请号：US14992477

申请日：2014-06-13

Applicant: GIGAPHOTON INC.

Inventor： Tomohide Ichinose ,  Fumio Iwamoto ,  Yutaka Shiraishi ,  Tsukasa Hori ,  Hideo Hoshino

IPC: H05G2/00 ,  B01D25/00 ,  B01D46/40 ,  B01D29/46 ,  G03F7/20

Abstract: A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area.

公开(公告)号：US10073353B2

公开(公告)日：2018-09-11

申请号：US15260625

申请日：2016-09-09

Applicant: Gigaphoton Inc.

Inventor： Yutaka Shiraishi ,  Hideki Shishiba

IPC: G03B27/42 ,  G03F7/20 ,  H01L21/027 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H01L21/027 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A target supply device may include a tank for storing a target material, a nozzle which is connected to the tank and outputs the target material, and a gas supply section for supplying the tank with gas. The gas supply section may include a booster which is connected to a gas line, boosts the gas supplied from the gas line, and outputs the boosted gas to the tank, a pressure sensor for measuring the pressure inside the tank, and a pressure controller which adjusts the pressure of the gas to be supplied to the tank on the basis of a measurement result from the pressure sensor.