HEMITOROIDAL RESONATOR GYROSCOPE
    23.
    发明申请
    HEMITOROIDAL RESONATOR GYROSCOPE 有权
    HEMITOROIDAL谐振器GYROSCOPE

    公开(公告)号:US20140068931A1

    公开(公告)日:2014-03-13

    申请号:US14090588

    申请日:2013-11-26

    Abstract: A method for fabricating a vibratory structure gyroscope is provided herein. An annular cavity is formed in a first surface of a substrate, the annular cavity defining an anchor post located in a central portion of the annular cavity. A bubble layer is formed over the first surface of the substrate and over the annular cavity. The substrate and the bubble layer are heated to form a hemitoroidal bubble in the bubble layer over the annular cavity. A sacrificial layer is deposited over the hemitoroidal bubble of the bubble layer and an aperture is formed in the sacrificial layer, the aperture disposed over the anchor post in the annular cavity. A resonator layer is deposited over the sacrificial layer and the sacrificial layer between the bubble layer and the resonator layer is removed.

    Abstract translation: 本文提供了一种用于制造振动结构陀螺仪的方法。 在衬底的第一表面中形成环形空腔,所述环形空腔限定位于所述环形腔的中心部分中的锚固柱。 气泡层形成在衬底的第一表面上方和环形腔上方。 衬底和气泡层被加热,以在环形空腔中的气泡层中形成一个椭圆形气泡。 牺牲层沉积在气泡层的椭圆形气泡上方,并且在牺牲层中形成孔,该孔设置在环形空腔中的锚柱上方。 在牺牲层上沉积谐振器层,并去除气泡层和谐振器层之间的牺牲层。

    VAPOR CELL ATOMIC CLOCK PHYSICS PACKAGE
    24.
    发明申请
    VAPOR CELL ATOMIC CLOCK PHYSICS PACKAGE 有权
    蒸汽细胞原子钟物理包装

    公开(公告)号:US20140062608A1

    公开(公告)日:2014-03-06

    申请号:US14083067

    申请日:2013-11-18

    CPC classification number: G04F5/14 G04F5/145 Y10T29/49117

    Abstract: In an example, a chip-scale atomic clock physics package is provided. The physics package includes a body defining a cavity having a base surface and one or more side walls. The cavity includes a first step surface and a second step surface defined in the one or more side walls. A first scaffold mounted to the base surface in the cavity. One or more spacers defining an aperture therethrough are mounted to the second step surface in the cavity. A second scaffold is mounted to a first surface of the one or more spacers spans across the aperture of the one or more spacers. A third scaffold is mounted to a second surface of the one or more spacers in the cavity and spans across the aperture of the one or more spacers. Other components of the physics package are mounted to the first, second, and third scaffold.

    Abstract translation: 在一个示例中,提供了芯片级原子钟物理包。 物理包装件包括限定具有基面和一个或多个侧壁的空腔的主体。 空腔包括限定在一个或多个侧壁中的第一台阶表面和第二台阶表面。 安装在空腔中的基面的第一脚手架。 限定穿过其中的孔的一个或多个间隔件安装到空腔中的第二台阶表面。 第二个支架安装在穿过一个或多个间隔物的孔的一个或多个间隔物的第一表面上。 第三支架安装到空腔中的一个或多个隔离物的第二表面,跨越一个或多个隔离物的孔。 物理包装的其他部件安装在第一,第二和第三支架上。

    CLOSED LOOP ATOMIC INERTIAL SENSOR
    25.
    发明申请
    CLOSED LOOP ATOMIC INERTIAL SENSOR 有权
    闭环原子惯性传感器

    公开(公告)号:US20140022534A1

    公开(公告)日:2014-01-23

    申请号:US13758370

    申请日:2013-02-04

    CPC classification number: G01P21/00 G01C19/58 G01C21/16 G01P15/08 G01P15/093

    Abstract: An apparatus for inertial sensing is provided. The apparatus comprises at least one atomic inertial sensor, and one or more micro-electrical-mechanical systems (MEMS) inertial sensors operatively coupled to the atomic inertial sensor. The atomic inertial sensor and the MEMS inertial sensors operatively communicate with each other in a closed feedback loop.

    Abstract translation: 提供了一种用于惯性感测的装置。 该装置包括至少一个原子惯性传感器和可操作地耦合到原子惯性传感器的一个或多个微机电系统(MEMS)惯性传感器。 原子惯性传感器和MEMS惯性传感器在闭合反馈回路中可操作地相互连通。

    THERMAL METAMATERIAL FOR LOW POWER MEMS THERMAL CONTROL

    公开(公告)号:US20220276615A1

    公开(公告)日:2022-09-01

    申请号:US17187296

    申请日:2021-02-26

    Abstract: A thermal metamaterial device comprises at least one MEMS thermal switch, comprising a substrate layer including a first material having a first thermal conductivity, and a thermal bus over a first portion of the substrate layer. The thermal bus includes a second material having a second thermal conductivity higher than the first thermal conductivity. An insulator layer is over a second portion of the substrate layer and includes a third material that is different from the first and second materials. A thermal pad is supported by a first portion of the insulator layer, the thermal pad including the second material and having an overhang portion located over a portion of the thermal bus. When a voltage is applied to the thermal pad, an electrostatic interaction occurs to cause a deflection of the overhang portion toward the thermal bus, thereby providing thermal conductivity between the thermal pad and the thermal bus.

    Quantum vector magnetometer based on nanoscale fin waveguide

    公开(公告)号:US11119163B2

    公开(公告)日:2021-09-14

    申请号:US16786495

    申请日:2020-02-10

    Abstract: A device includes a substrate and nanoscale fin formed from a first material, a RF emitter that emits energy in a range of radio frequencies, and a waveguide formed from a second material. The device further includes a bichromatic directional coupler configured to couple pump and probe laser light into the waveguide. The waveguide is positioned proximate to the nanoscale fin along a coupling length such that the pump laser light propagating within the waveguide is coupled into the nanoscale fin from evanescent wave overlap along the coupling length. The pump laser light causes the first material to absorb the probe laser light when energy emitted by the RF emitter is at one or more frequencies dependent on a magnetic field. The device further includes a processor configured to determine a magnetic field strength of the magnetic field based on an identification of the one or more frequencies.

    OPTICAL GIMBAL
    28.
    发明申请

    公开(公告)号:US20210102809A1

    公开(公告)日:2021-04-08

    申请号:US16595320

    申请日:2019-10-07

    Abstract: In an example, an optical gimbal is described, the optical gimbal comprising: a pulse generator configured to generate at least two coherent beam splitting pulses; a first optical beam director configured to tilt the vector of the beam splitting pulses by an angle θ; an atom source configured to allow the beam splitting pulses to manipulate trapped atoms within the atom source; a processor configured to receive the angle θ, and control the pulse generator and the beam director; a detector coupled to the atom source configured to measure a final population of the atoms in different states.

    Fully reciprocal atomic interferometric gyroscope

    公开(公告)号:US10352702B2

    公开(公告)日:2019-07-16

    申请号:US15418990

    申请日:2017-01-30

    Inventor: Robert Compton

    Abstract: A fully reciprocal atomic interferometric gyroscope is provided. The fully reciprocal atomic interferometric gyroscope includes an atomic chamber, a plurality of lasers, a controller and measurement sensor. The atomic chamber is used to hold an atom cloud. The plurality of lasers are selectively positioned to selectively direct laser beams into the atomic chamber. The controller is configured to control the plurality lasers to initially cool the atom cloud to a point where at least one optical lattice can be formed that is used to move wave function halves of atoms of the atom cloud along split wave function paths that form an interferometer cycle. The measurement sensor is configured to conduct a phase readout of a wave function upon the completion of at least one interferometer cycle around the split wave function paths.

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