METHOD AND APPARATUS FOR MAINTAINING NETWORK COMMUNICATION DURING MAINTENANCE
    21.
    发明申请
    METHOD AND APPARATUS FOR MAINTAINING NETWORK COMMUNICATION DURING MAINTENANCE 审中-公开
    在维护过程中维护网络通信的方法和装置

    公开(公告)号:US20130124761A1

    公开(公告)日:2013-05-16

    申请号:US13576150

    申请日:2010-02-08

    CPC classification number: G06F13/122 G05B19/058 G05B2219/14072

    Abstract: A communication method for use by an input/output (I/O) scanner coupled to a programmable logic controller (PLC) includes coupling at least one I/O module to a backplane, and coupling a maintenance module to the backplane. The communication method also includes selectively enabling and disabling communication between the backplane and the at least one I/O module by actuating a switch in the maintenance module such that network communication is maintained by a network interface regardless of whether communication between the backplane and the at least one I/O module is enabled.

    Abstract translation: 耦合到可编程逻辑控制器(PLC)的输入/输出(I / O)扫描器使用的通信方法包括将至少一个I / O模块耦合到背板,以及将维护模块耦合到背板。 通信方法还包括通过启动维护模块中的交换机来选择性地启用和禁用背板和至少一个I / O模块之间的通信,使得网络通信由网络接口​​维护,而不管背板和at 至少有一个I / O模块被启用。

    Method and system for modelling data
    22.
    发明申请
    Method and system for modelling data 审中-公开
    数据建模方法和系统

    公开(公告)号:US20070255685A1

    公开(公告)日:2007-11-01

    申请号:US11415871

    申请日:2006-05-01

    CPC classification number: G06F16/289 G06F16/284

    Abstract: A method and system for modelling data that provides a constrained design space in which data is modelled is described. In particular, the invention provides for a method and system for modelling data wherein any real world entity is defined as an object of some particular type within an object table or data store. Real world entities also include things like databases, relational links between entity objects, as well as link and object types themselves. Relationships between entity objects can then be defined in a separate link database or table, which references entity objects stored within the object database or table with respect to a link type, which is also stored within the object database or table. Representing the data to be modelled within this way leads to the existence of an object hierarchy, which enables a system to define its own definitions. Moreover, since any data will be modelled within the same format, the design space is constrained, and hence it is easy to adapt a database in a format according to the present invention so as to enhance functionality, as well as to use generic software tools between different databases.

    Abstract translation: 描述了提供数据被建模的约束设计空间的用于对数据进行建模的方法和系统。 特别地,本发明提供了一种用于建模数据的方法和系统,其中任何真实世界实体被定义为对象表或数据存储内的某种特定类型的对象。 实体实体还包括数据库,实体对象之间的关系链接以及链接和对象类型本身。 然后可以在单独的链接数据库或表中定义实体对象之间的关系,该链接数据库或表中的对象数据库或表中存储的实体对象相对于也存储在对象数据库或表中的链接类型进行引用。 以这种方式表示要建模的数据导致存在对象层次结构,这使得系统能够定义自己的定义。 此外,由于任何数据将以相同的格式进行建模,所以设计空间受到限制,因此可以容易地以根据本发明的格式来适配数据库,以便增强功能,以及使用通用软件工具 在不同的数据库之间。

    PORTABLE SYSTEM FOR SEMICONDUCTOR MANUFACTURING
    23.
    发明申请
    PORTABLE SYSTEM FOR SEMICONDUCTOR MANUFACTURING 审中-公开
    半导体制造便携式系统

    公开(公告)号:US20060231204A1

    公开(公告)日:2006-10-19

    申请号:US11426499

    申请日:2006-06-26

    CPC classification number: B08B7/0042 G03F7/427 H01L21/31138 H01L21/67005

    Abstract: An automated system for use in semiconductor manufacturing may include a semiconductor reaction chamber, a solid-state laser mounted above a top surface of the semiconductor reaction chamber, and a gas delivery module connected to the semiconductor reaction chamber. The system may include a gas exhaust pump connected to the semiconductor reaction chamber, a temperature sensor connected to the semiconductor reaction chamber, and a housing surrounding the reaction chamber, the solid-state laser, the gas delivery module, the gas exhaust pump, and the temperature sensor, where the housing is portable.

    Abstract translation: 用于半导体制造的自动化系统可以包括半导体反应室,安装在半导体反应室的顶表面上方的固态激光器和连接到半导体反应室的气体输送模块。 该系统可以包括连接到半导体反应室的排气泵,连接到半导体反应室的温度传感器和围绕反应室的壳体,固体激光器,气体输送模块,排气泵和 温度传感器,其中壳体是便携式的。

    System and methods for surface cleaning
    24.
    发明申请
    System and methods for surface cleaning 审中-公开
    表面清洁的系统和方法

    公开(公告)号:US20050279453A1

    公开(公告)日:2005-12-22

    申请号:US10870646

    申请日:2004-06-17

    CPC classification number: B08B7/0042 G03F7/427 H01L21/31138 H01L21/67005

    Abstract: A system for removing photoresist from semiconductor wafers is disclosed. The system utilizes a solid-state laser having wavelengths in the near-visible and visible portions of the electromagnetic spectrum to remove photoresist without requiring hazardous gases or wet solutions. In addition, the system does not damage the substrate being cleaned, nor leave a carbon residue requiring further processing to remove. The system uses photon energy, oxygen, water vapor and ozone to interact with contaminants on a surface, forming a gas reaction zone (GRZ). The GRZ reacts and completely removes the photoresist or other unwanted contamination.

    Abstract translation: 公开了一种用于从半导体晶片去除光致抗蚀剂的系统。 该系统利用在电磁光谱的近可见和可见部分中具有波长的固态激光去除光致抗蚀剂而不需要有害气体或湿溶液。 此外,该系统不会损坏被清洁的基板,也不会留下需要进一步处理以除去的碳残留物。 该系统使用光子能量,氧气,水蒸汽和臭氧与表面上的污染物相互作用,形成气体反应区(GRZ)。 GRZ反应并完全去除光致抗蚀剂或其他不需要的污染物。

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