Abstract:
A communication method for use by an input/output (I/O) scanner coupled to a programmable logic controller (PLC) includes coupling at least one I/O module to a backplane, and coupling a maintenance module to the backplane. The communication method also includes selectively enabling and disabling communication between the backplane and the at least one I/O module by actuating a switch in the maintenance module such that network communication is maintained by a network interface regardless of whether communication between the backplane and the at least one I/O module is enabled.
Abstract:
A method and system for modelling data that provides a constrained design space in which data is modelled is described. In particular, the invention provides for a method and system for modelling data wherein any real world entity is defined as an object of some particular type within an object table or data store. Real world entities also include things like databases, relational links between entity objects, as well as link and object types themselves. Relationships between entity objects can then be defined in a separate link database or table, which references entity objects stored within the object database or table with respect to a link type, which is also stored within the object database or table. Representing the data to be modelled within this way leads to the existence of an object hierarchy, which enables a system to define its own definitions. Moreover, since any data will be modelled within the same format, the design space is constrained, and hence it is easy to adapt a database in a format according to the present invention so as to enhance functionality, as well as to use generic software tools between different databases.
Abstract:
An automated system for use in semiconductor manufacturing may include a semiconductor reaction chamber, a solid-state laser mounted above a top surface of the semiconductor reaction chamber, and a gas delivery module connected to the semiconductor reaction chamber. The system may include a gas exhaust pump connected to the semiconductor reaction chamber, a temperature sensor connected to the semiconductor reaction chamber, and a housing surrounding the reaction chamber, the solid-state laser, the gas delivery module, the gas exhaust pump, and the temperature sensor, where the housing is portable.
Abstract:
A system for removing photoresist from semiconductor wafers is disclosed. The system utilizes a solid-state laser having wavelengths in the near-visible and visible portions of the electromagnetic spectrum to remove photoresist without requiring hazardous gases or wet solutions. In addition, the system does not damage the substrate being cleaned, nor leave a carbon residue requiring further processing to remove. The system uses photon energy, oxygen, water vapor and ozone to interact with contaminants on a surface, forming a gas reaction zone (GRZ). The GRZ reacts and completely removes the photoresist or other unwanted contamination.