公开(公告)号：US20120206462A1

公开(公告)日：2012-08-16

申请号：US13453844

申请日：2012-04-23

申请人： Ana R. Londergan ,  Bangalore R. Natarajan ,  Evgeni Gousev ,  James Randolph Webster ,  David Heald

发明人： Ana R. Londergan ,  Bangalore R. Natarajan ,  Evgeni Gousev ,  James Randolph Webster ,  David Heald

IPC分类号： G02B26/00 ,  B05D5/06 ,  G06T1/00

CPC分类号： G02B26/001 ,  B81B3/0008 ,  B81B2201/047

摘要： Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.

摘要翻译： 包括MEMS器件（例如干涉式调制器）的器件，方法和系统，其包括其中层涂覆多个表面的空腔。 该层是保形的或非保形的。 在一些实施例中，该层由原子层沉积（ALD）形成。 优选地，该层包括电介质材料。 在一些实施例中，MEMS器件还表现出改进的特性，例如移动电极之间的改善的电绝缘性，降低的静摩擦力和/或改善的机械性能。

公开(公告)号：US08164815B2

公开(公告)日：2012-04-24

申请号：US12795294

申请日：2010-06-07

申请人： Ana R. Londergan ,  Bangalore R. Natarajan ,  Evgeni Gousev ,  James Randolph Webster ,  David Heald

发明人： Ana R. Londergan ,  Bangalore R. Natarajan ,  Evgeni Gousev ,  James Randolph Webster ,  David Heald

IPC分类号： G02F1/00

CPC分类号： G02B26/001 ,  B81B3/0008 ,  B81B2201/047

摘要： Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.

摘要翻译： 包括MEMS器件（例如干涉式调制器）的器件，方法和系统，其包括其中层涂覆多个表面的空腔。 该层是保形的或非保形的。 在一些实施例中，该层由原子层沉积（ALD）形成。 优选地，该层包括电介质材料。 在一些实施例中，MEMS器件还表现出改进的特性，例如移动电极之间的改善的电绝缘性，降低的静摩擦力和/或改善的机械性能。

公开(公告)号：US07851239B2

公开(公告)日：2010-12-14

申请号：US12133813

申请日：2008-06-05

申请人： James Randolph Webster ,  Thanh Nghia Tu ,  Xiaoming Yan ,  Wonsuk Chung

发明人： James Randolph Webster ,  Thanh Nghia Tu ,  Xiaoming Yan ,  Wonsuk Chung

IPC分类号： H01L21/00

CPC分类号： B81B3/0008 ,  B81B2201/042 ,  B81C2201/0107 ,  B81C2201/0109 ,  B81C2201/115 ,  G02B26/001 ,  Y10T428/24917

摘要： Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

摘要翻译： 提供了减轻设备的可移动部件的永久性粘附或静电的机电系统装置的制造方法。 该方法提供了具有改进和可再现的表面粗糙度的非晶硅牺牲层。 非晶硅牺牲层对于机电系统器件中常用的材料进一步表现出优异的附着性。

公开(公告)号：US20100187422A1

公开(公告)日：2010-07-29

申请号：US12559085

申请日：2009-09-14

申请人： Manish Kothari ,  James Randolph Webster ,  Gaurav Sethi ,  Alok Govil ,  Jonathan Charles Griffiths

发明人： Manish Kothari ,  James Randolph Webster ,  Gaurav Sethi ,  Alok Govil ,  Jonathan Charles Griffiths

IPC分类号： F21V23/00 ,  F21V8/00 ,  G01J1/42

CPC分类号： H05B37/0227 ,  G06F3/0428 ,  G06F2203/04109 ,  Y10T29/49117

摘要： Methods and systems for providing a light device that can emit light and sense light are disclosed. In one embodiment, a lighting device includes a light guide having a planar first surface, the light guide configured such that at least some ambient light enters the light guide through the first surface and propagates therein, and at least one light detector disposed along an edge of the light guide, the at least one detector optically coupled to the light guide to receive light propagating therein. The light detector can be configured to produce a control signal. In some embodiments, the lighting device also includes at least one light turning feature disposed on the first surface, the at least one light turning feature configured to direct light incident into the light guide through the first surface.

摘要翻译： 公开了用于提供可以发光并感测光的光装置的方法和系统。 在一个实施例中，照明装置包括具有平面第一表面的光导，所述光导构造成使得至少一些环境光通过第一表面进入光导并在其中传播，并且沿着边缘设置的至少一个光检测器 所述至少一个检测器光耦合到所述光导以接收在其中传播的光。 光检测器可以被配置为产生控制信号。 在一些实施例中，照明装置还包括设置在第一表面上的至少一个光转向特征，所述至少一个光转向特征被配置为引导通过第一表面入射到光导中的光。

公开(公告)号：US20090244543A1

公开(公告)日：2009-10-01

申请号：US12060078

申请日：2008-03-31

申请人： James Randolph Webster

发明人： James Randolph Webster

IPC分类号： G01B9/02

CPC分类号： G02B26/001 ,  G01N21/45 ,  G01N21/75

摘要： An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movable member of the interferometric modulator. The reactive layer, coating, or proof mass can expand, contract, bend, or otherwise move when exposed to a predefined chemical, level of humidity, temperature threshold, type of radiation, and/or level of mechanical shock, causing the interferometric modulator to collapse and permanently indicate such exposure.