Process for recovering semiconductor industry cleaning compounds
    21.
    发明授权
    Process for recovering semiconductor industry cleaning compounds 失效
    半导体工业清洗剂回收工艺

    公开(公告)号:US5779763A

    公开(公告)日:1998-07-14

    申请号:US813520

    申请日:1997-03-07

    IPC分类号: B01D53/00 B01D53/22

    摘要: A process for separating perfluoro compound gas or vapor from another gas, typically nitrogen, in a gas mixture. The process involves a combination of membrane separation and condensation, and is particularly useful in the semiconductor industry, for treating exhaust gases from cleaning of chemical vapor deposition chambers. Operation of the condensation step at temperatures no lower than about -30.degree. C. reduces the need for refrigeration equipment and controls the amount of gas dissolved in the recovered perfluoro compound.

    摘要翻译: 从气体混合物中的另一种气体(通常为氮)分离全氟化合物气体或蒸气的方法。 该方法涉及膜分离和冷凝的组合,并且在半导体工业中特别有用,用于处理来自清洁化学气相沉积室的废气。 在不低于约-30℃的温度下进行冷凝步骤的操作减少了对制冷设备的需要并控制了溶解在回收的全氟化合物中的气体的量。

    Process for recovering organic components from liquid streams
    22.
    发明授权
    Process for recovering organic components from liquid streams 失效
    从液体流中回收有机成分的方法

    公开(公告)号:US5266206A

    公开(公告)日:1993-11-30

    申请号:US932808

    申请日:1992-08-20

    IPC分类号: B01D17/02 B01D61/36 C02F1/44

    摘要: A separation process for recovering organic components from liquid streams. The process is a combination of pervaporation and decantation. In cases where the liquid stream contains the organic to be separated in dissolved form, the pervaporation step is used to concentrate the organic to a point above the solubility limit, so that a two-phase permeate is formed and then decanted. In cases where the liquid stream is a two-phase mixture, the decantation step is performed first, to remove the organic product phase, and the residue from the decanter is then treated by pervaporation. Embodiments using two decanters, particularly suited to handling feed streams containing multiple organic compounds of different properties, are included.

    摘要翻译: 用于从液体流中回收有机组分的分离方法。 该过程是渗透蒸发和倾析的组合。 在液体流含有溶解形式的待分离有机物的情况下,使用全蒸发步骤将有机物浓缩至高于溶解度极限的一点,从而形成两相渗透物,然后倾析。 在液体物流是两相混合物的情况下,首先进行倾析步骤以除去有机产物相,然后通过全蒸发处理来自滗析器的残余物。 包括使用两个倾析器,特别适用于处理含有多种不同性质的多种有机化合物的进料流的实施方案。

    Two-stage membrane process and apparatus
    23.
    发明授权
    Two-stage membrane process and apparatus 失效
    两级膜工艺及装置

    公开(公告)号:US5256295A

    公开(公告)日:1993-10-26

    申请号:US943857

    申请日:1992-09-11

    IPC分类号: B01D53/22

    CPC分类号: B01D53/229 B01D53/225

    摘要: A membrane separation process and system for removing a component from a fluid stream. An auxiliary membrane module or set of modules is installed across the second stage of a two-stage membrane separation system. The driving force for the auxiliary modules is provided by the pump or other driving unit for the first membrane stage. The auxiliary module or modules provides additional treatment of the residue stream from the second membrane stage, but are driven by the first stage driving unit. The invention is particularly useful in any membrane separation operation involving gas separation, vapor separation or pervaporation in which a two-stage system design is to be used, and where it is desirable to improve the efficiency of the two-stage system.

    摘要翻译: 用于从流体流中去除组分的膜分离过程和系统。 辅助膜组件或一组模块安装在两级膜分离系统的第二阶段。 辅助模块的驱动力由用于第一膜级的泵或其他驱动单元提供。 辅助模块或模块提供对来自第二膜级的残余物流的附加处理,但由第一级驱动单元驱动。 本发明特别适用于涉及使用两级系统设计的气体分离,蒸气分离或渗透蒸发的任何膜分离操作,并且其中期望提高两级系统的效率。

    Process for reducing emissions from industrial sterilizers
    24.
    发明授权
    Process for reducing emissions from industrial sterilizers 失效
    减少工业灭菌器排放的工艺

    公开(公告)号:US5069686A

    公开(公告)日:1991-12-03

    申请号:US564030

    申请日:1990-08-07

    IPC分类号: A61L2/20 B01D53/22

    CPC分类号: B01D53/229 B01D53/226

    摘要: A process for treating gas streams containing a sterilant gas and a diluent gas, such as sterilizer exhaust streams. The process involves a sterilant removal step and a diluent removal step. The sterilant removal step can be absorption, catalytic oxidation or some other chemical reaction. The diluent removal step includes a membrane separation step, and may include a condensation step. The permselective membranes used for the membrane separation step are typically selective for the diluent gas over other gases in the stream. The process removes essentially all the sterilant present in the feed stream, and typically removes 90% or more of the diluent. The process is particularly useful for treating ethylene oxide/CFC-12 mixtures.

    摘要翻译: 一种处理含有杀菌剂气体和稀释气体的气流的方法,例如灭菌器废气流。 该方法包括消毒剂去除步骤和稀释剂去除步骤。 消毒剂除去步骤可以是吸收,催化氧化或其它一些化学反应。 稀释剂去除步骤包括膜分离步骤,并且可以包括缩合步骤。 用于膜分离步骤的选择性渗透膜通常对稀释气体是选择性的,优于流中的其它气体。 该方法基本上除去进料流中存在的所有灭菌剂,并且通常除去90%或更多的稀释剂。 该方法对于处理环氧乙烷/ CFC-12混合物特别有用。

    Multilayer interfacial composite membrane
    25.
    发明授权
    Multilayer interfacial composite membrane 失效
    多层界面复合膜

    公开(公告)号:US5049167A

    公开(公告)日:1991-09-17

    申请号:US450278

    申请日:1989-12-13

    IPC分类号: B01D69/12

    CPC分类号: B01D69/125

    摘要: A composite membrane particularly useful for gas separation or pervaporation. The membrane has three layers: a microporous substrate, an intermediate sealing layer, and a top permselective layer. The permselective layer is made by interfacial polymerization directly on the sealing layer. The sealing layer prevents penetration of the interfacial polymerization reagents into the substrate pores during membrane preparation and provides a gutter layer in the finished membrane.

    摘要翻译: 特别适用于气体分离或渗透蒸发的复合膜。 膜具有三层:微孔基材,中间密封层和顶层选择层。 选择渗透层通过直接在密封层上的界面聚合制成。 密封层防止膜制备过程中界面聚合试剂渗透到基底孔中,并在成品膜中提供沟槽层。

    Membrane fractionation process
    26.
    发明授权
    Membrane fractionation process 失效
    膜分馏过程

    公开(公告)号:US5032148A

    公开(公告)日:1991-07-16

    申请号:US432985

    申请日:1989-11-07

    IPC分类号: B01D53/22

    CPC分类号: B01D53/226

    摘要: A fractionation process for treating a gas stream containing organic vapor in a concentration technically or economically difficult to treat by standard waste control methods. Typically this concentration will be about 0.1-10% organic vapor. The process involves running the stream through a membrane system containing one or more membranes selectively permeable to the organic vapor component of the gas stream. The fractionation produces two streams: a product residue stream containing the organic vapor in a concentration less than about 0.5% and a product permeate stream highly enriched in organic vapor content. Both residue and permeate streams are then suitable for treatment by conventional separations or waste control technologies. The low concentration residue stream might be passed to carbon adsorption beds, for example, and the high concentration permeate stream might be subjected to condensation or incineration.

    摘要翻译: 用于通过标准废物控制方法在技术上或经济上难以处理的浓度中处理含有机蒸汽的气流的分馏方法。 通常该浓度为约0.1-10%的有机蒸气。 该方法包括使流通过含有选择性渗透气流的有机蒸气成分的一种或多种膜的膜系统运行。 分馏产生两股流:含有浓度小于约0.5%的有机蒸气的产物残留物流和高度富含有机蒸汽含量的产物渗透物流。 残渣和渗透物流都适用于常规分离或废物控制技术的处理。 例如,低浓度残留物流可能被传递到碳吸附床,并且高浓度渗透物流可能被冷凝或焚化。

    MEMBRANE LOOP PROCESS FOR SEPARATING CARBON DIOXIDE FOR USE IN GASEOUS FORM FROM FLUE GAS
    30.
    发明申请
    MEMBRANE LOOP PROCESS FOR SEPARATING CARBON DIOXIDE FOR USE IN GASEOUS FORM FROM FLUE GAS 有权
    用于分离二氧化碳的膜循环过程用于来自气体气体的气体形式

    公开(公告)号:US20110260112A1

    公开(公告)日:2011-10-27

    申请号:US13123364

    申请日:2010-09-13

    IPC分类号: C01B31/20

    摘要: The invention is a process involving membrane-based gas separation for separating and recovering carbon dioxide emissions from combustion processes in partially concentrated form, and then transporting the carbon dioxide and using or storing it in a confined manner without concentrating it to high purity. The process of the invention involves building up the concentration of carbon dioxide in a gas flow loop between the combustion step and a membrane separation step. A portion of the carbon dioxide-enriched gas can then be withdrawn from this loop and transported, without the need to liquefy the gas or otherwise create a high-purity stream, to a destination where it is used or confined, preferably in an environmentally benign manner.

    摘要翻译: 本发明是一种涉及膜基气体分离的方法,用于从部分浓缩形式的燃烧过程中分离和回收二氧化碳排放,然后运输二​​氧化碳并以密闭方式使用或储存,而不将其浓缩至高纯度。 本发明的方法涉及在燃烧步骤和膜分离步骤之间建立气流回路中二氧化碳的浓度。 然后可以将一部分富含二氧化碳的气体从该回路中排出并运输,而不需要将气体液化或以其它方式产生高纯度物流到其使用或限制的目的地,优选地以环境友好 方式。