公开(公告)号：US07459692B2

公开(公告)日：2008-12-02

申请号：US11272193

申请日：2005-11-10

申请人： Anthony Renau ,  Joseph C. Olson ,  Shengwu Chang ,  James Buff

发明人： Anthony Renau ,  Joseph C. Olson ,  Shengwu Chang ,  James Buff

IPC分类号： H01J1/50

CPC分类号： H01J37/1475 ,  H01J37/026 ,  H01J37/3171 ,  H01J2237/0041 ,  H01J2237/0042 ,  H01J2237/055

摘要： A method and apparatus are disclosed for improving space charge neutralization adjacent a magnet of an ion implanter by confining the electrons inside a magnetic region thereof to reduce electron losses and therefore improve the transport efficiency of a low energy beam. A magnetic pole member for a magnet of an ion implanter is provided that includes an outer surface having a plurality of magnetic field concentration members that form magnetic field concentrations adjacent the magnetic pole member. Electrons that encounter this increased magnetic field are repelled back along the same magnetic field line rather than allowed to escape. An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.

摘要翻译： 公开了一种用于通过将电子限制在其磁性区域内以减少电子损失并因此提高低能量束的传输效率来改进邻近离子注入机的磁体的空间电荷中和的方法和装置。 提供了一种用于离子注入机的磁体的磁极构件，其包括具有与磁极构件相邻形成磁场浓度的多个磁场浓度构件的外表面。 遇到这种增加的磁场的电子沿着相同的磁场线被击退，而不是允许逃逸。 还提供了包括磁极的分析器磁体和离子注入机，从而实现了在离子注入机中提高低能量离子束空间电荷中和的方法。

公开(公告)号：US07045799B1

公开(公告)日：2006-05-16

申请号：US10993346

申请日：2004-11-19

申请人： Shengwu Chang ,  Joseph C. Olson ,  Donald Anderson ,  Daniel McGillicuddy

发明人： Shengwu Chang ,  Joseph C. Olson ,  Donald Anderson ,  Daniel McGillicuddy

IPC分类号： H01J37/317

CPC分类号： H01J37/3171 ,  H01J2237/047 ,  H01J2237/12

摘要： A method and apparatus for weakening a strong focus effect of an acceleration-deceleration column of an ion implanter during a deceleration mode are disclosed. The apparatus includes a tube lens surrounding the ion beam adjacent to a deceleration lens of the acceleration-deceleration column. The tube lens causes a defocusing of the ion beam at the entrance of the tube lens, which reduces the ion dispersion problem generated by the column. The invention also includes an accel-decel column and ion implanter incorporating the tube lens. An additional deceleration-suppression electrode may also be added subsequent to the tube lens for confining electrons within the tube lens.

摘要翻译： 公开了一种用于在减速模式期间减弱离子注入机的加速 - 减速列的强焦点效应的方法和装置。 该装置包括围绕加速减速柱的减速透镜的离子束的管透镜。 管透镜引起离子束在管透镜入口处的散焦，这降低了柱产生的离子色散问题。 本发明还包括加速减速柱和并入管透镜的离子注入机。 还可以在管透镜之后添加附加减速抑制电极，以将电子限制在管透镜内。