Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program

    公开(公告)号:US08121393B2

    公开(公告)日:2012-02-21

    申请号:US12350783

    申请日:2009-01-08

    IPC分类号: G06K9/00

    摘要: A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.

    INTERFACE DEVICE, DECODED DATA VALIDITY DETERMINATION METHOD AND RECORDING DEVICE
    23.
    发明申请
    INTERFACE DEVICE, DECODED DATA VALIDITY DETERMINATION METHOD AND RECORDING DEVICE 审中-公开
    接口设备,解码数据有效性确定方法和记录设备

    公开(公告)号:US20110296286A1

    公开(公告)日:2011-12-01

    申请号:US13039791

    申请日:2011-03-03

    IPC分类号: H03M13/09 G06F11/10

    CPC分类号: H03M13/09 G06F11/102

    摘要: According to one embodiment, an interface device including a decoding module configured to decode received data, a storage module configured to store data obtained after the decoding module performs decoding, a CRC module configured to detect a CRC error included in the data obtained after the decoding module performs the decoding, an error detection module configured to detect a decoding error included in the data obtained after the decoding module performs the decoding, and a data processing module configured to process, as valid data, the data that is obtained after the decoding module performs the decoding and stored in the storage module when the decoding error detected by the error detection module is non-user data and the CRC module does not detect any CRC error.

    摘要翻译: 根据一个实施例,一种接口装置,包括:解码模块,用于对接收的数据进行解码;存储模块,被配置为存储在解码模块执行解码之后获得的数据; CRC模块,被配置为检测包括在解码之后获得的数据中的CRC错误 模块执行解码,错误检测模块被配置为检测在解码模块执行解码之后获得的数据中包括的解码错误,以及数据处理模块,被配置为处理在解码模块之后获得的数据作为有效数据 当由错误检测模块检测到的解码错误是非用户数据并且CRC模块没有检测到任何CRC错误时,执行解码并存储在存储模块中。

    Bet control method for race game
    24.
    发明授权
    Bet control method for race game 有权
    投注比赛的控制方法

    公开(公告)号:US07607975B2

    公开(公告)日:2009-10-27

    申请号:US10197553

    申请日:2002-07-18

    IPC分类号: G06F17/00

    摘要: When a racing form speculating a race is selected, a bet is automatically made on a speculated possible finish place. A racing form speculated information indication region K1 is provided on the right side of a speculation indication region H5. A speculation racing form indication region K2 is provided on the right side of the racing form speculated information indication region K1. A game player selects a racing form to be used as speculated information. When an all bets button K5 below a racing form release button K4, bets are made maximum 8 sets of horse number combinations speculated by the racing forms. The bet control method can permit game players to easily and quickly bet.

    摘要翻译: 当选择一种投机比赛的赛车形式时,会在推测的可能的完成地点自动进行下注。 比赛形式推测信息指示区域K1设置在投机指示区域H5的右侧。 在赛车形式推测信息指示区域K1的右侧设置有投机赛车形式指示区域K2。 玩家选择要用作推测信息的赛车形式。 当在赛车形式释放按钮K4下方的所有下注按钮K5,由赛车形式推测的最大8组马数组合的投注。 赌注控制方法可以允许游戏玩家轻松快速地下注。

    Electron beam inspection apparatus
    25.
    发明授权
    Electron beam inspection apparatus 有权
    电子束检查装置

    公开(公告)号:US07504627B2

    公开(公告)日:2009-03-17

    申请号:US11878361

    申请日:2007-07-24

    IPC分类号: H01J37/28 G01N23/225

    CPC分类号: G01N23/225

    摘要: An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.

    摘要翻译: 公开了其中确定检查顺序以缩短检查时间的电子束检查装置。 通过最小化移动时间和检查时间的总和以及简单地优化覆盖距离来确定检查顺序。 在准备确定检验点和检验顺序的配方时,顺序检查的一系列检查点的顺序进行了更改,以优化检验顺序。 不仅确定了覆盖距离最小化的顺序,还根据充电状态,晶圆翘曲,输送位置等情况优化了检查点的检查顺序。

    Electron beam inspection apparatus
    26.
    发明申请

    公开(公告)号:US20070272860A1

    公开(公告)日:2007-11-29

    申请号:US11878361

    申请日:2007-07-24

    IPC分类号: G01N23/00

    CPC分类号: G01N23/225

    摘要: An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.

    Electron beam inspection apparatus
    27.
    发明授权
    Electron beam inspection apparatus 有权
    电子束检查装置

    公开(公告)号:US07256400B2

    公开(公告)日:2007-08-14

    申请号:US11099688

    申请日:2005-04-06

    IPC分类号: H01J37/28 G01N23/225

    CPC分类号: G01N23/225

    摘要: An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.

    摘要翻译: 公开了其中确定检查顺序以缩短检查时间的电子束检查装置。 通过最小化移动时间和检查时间的总和以及简单地优化覆盖距离来确定检查顺序。 在准备确定检验点和检验顺序的配方时,顺序检查的一系列检查点的顺序进行了更改,以优化检验顺序。 不仅确定了覆盖距离最小化的顺序,还根据充电状态,晶圆翘曲,输送位置等情况优化了检查点的检查顺序。

    Gas sensor
    28.
    发明授权
    Gas sensor 失效
    气体传感器

    公开(公告)号:US07082810B2

    公开(公告)日:2006-08-01

    申请号:US10379710

    申请日:2003-03-06

    IPC分类号: G01N29/02

    摘要: A gas sensor (10) including a measurement chamber (28) into which a gas GS is flown and a detection element main body (40) facing the measurement chamber (28). The detection element main body (40) includes an element case 42, and a protective film (48) is adhered to a bottom surface thereof. An acoustic matching plate (50) and a piezoelectric element (51) of a substantially columnar shape and a tube body (52) provided in a position surrounding the acoustic matching plate 50 and the piezoelectric element 51 are housed in the element case (42). A filler is then introduced into the element case (42), whereby the acoustic matching plate (50), the piezoelectric element (51), and the tube body (52) are sealed by a filled layer (99).

    摘要翻译: 一种气体传感器(10),包括气体GS流入的测量室(28)和面向测量室(28)的检测元件主体(40)。 检测元件主体(40)包括元件壳体42,并且保护膜(48)粘附到其底面。 设置在围绕声匹配板50和压电元件51的位置的声匹配板(50)和基本上柱状的压电元件(51)和管体(52)容纳在元件壳体(42)中, 。 然后将填料引入到元件壳体(42)中,由此,声匹配板(50),压电元件(51)和管体(52)被填充层(99)密封。

    Pigment for sensing gas leakage and process for producing the same
    29.
    发明授权
    Pigment for sensing gas leakage and process for producing the same 失效
    用于感测气体泄漏的颜料及其制造方法

    公开(公告)号:US5849073A

    公开(公告)日:1998-12-15

    申请号:US25338

    申请日:1998-02-18

    IPC分类号: C09C1/36 C09C3/06 C09D7/12

    摘要: A pigment for sensing gas leakage can be produced by adding at least one of salts of platinum group metals to a slurry of particulate substrate, neutralizing the resultant mixture to deposit at least one of oxides, hydroxides and hydrated oxides of platinum group metals on the surfaces of said particulate substrate, and if necessary, further adding to said slurry at least one of compounds of aluminum, silicon, titanium, zinc, zirconium, tin, antimony and cerium, neutralizing the resultant mixture to deposit at least one of compounds such as oxides, hydroxides and hydrated oxides of aluminum, silicon, titanium, zinc, zirconium, tin, antimony and cerium, on the particles. The pigment for sensing gas leakage allows any combustible gas such as hydrogen, carbon monoxide, acetylene, methane and the like leaking from chemical reaction apparatuses and various factories using reducing gases to be definitely and conveniently detected by applying the pigment onto the surfaces of the outer walls and pipes of chemical reaction apparatuses as well as the surfaces of the rooms of the factories.

    摘要翻译: 用于感测气体泄漏的颜料可以通过将铂族金属的至少一种盐添加到颗粒基质的浆料中,中和所得混合物以在表面上沉积铂族金属的氧化物,氢氧化物和水合氧化物中的至少一种 的所述颗粒基材,并且如果需要,向所述浆料中进一步添加铝,硅,钛,锌,锆,锡,锑和铈的化合物中的至少一种,中和所得混合物以沉积至少一种化合物如氧化物 ,铝,硅,钛,锌,锆,锡,锑和铈的氢氧化物和水合氧化物。 用于感测气体泄漏的颜料允许从化学反应装置泄漏的任何可燃气体,例如氢气,一氧化碳,乙炔,甲烷等,并且使用还原气体的各种工厂通过将颜料施加到外部表面上来确定地和方便地检测 化学反应设备的墙壁和管道以及工厂房间的表面。

    Cyclohexanedione derivatives
    30.
    发明授权
    Cyclohexanedione derivatives 失效
    环己酮衍生物

    公开(公告)号:US5480858A

    公开(公告)日:1996-01-02

    申请号:US373218

    申请日:1995-01-13

    CPC分类号: C07D335/06 A01N43/18

    摘要: Cyclohexanedione derivatives of the formula (I), ##STR1## wherein R.sup.1 is a C.sub.1 -C.sub.6 alkyl group, R.sup.2 is a C.sub.1 -C.sub.4 alkyl group, each of R.sup.3, R.sup.4 and R.sup.5 is independently hydrogen or a C.sub.1 -C.sub.4 alkyl group, and n is an integer of 0 to 2, or salts thereof exhibit high selectivity for corn, wheat and barley, and can control gramineous weeds and broad-leaved weeds at low dosages.

    摘要翻译: PCT No.PCT / JP93 / 01107 Sec。 371日期1995年1月13日 102(e)日期1995年1月13日PCT提交1993年8月6日PCT公布。 出版物WO94 / 0452400 日本3月3日公开了式(I)的环己二酮衍生物,其中R1是C1-C6烷基,R2是C1-C4烷基,R3,R4和R5各自独立地是 氢或C1-C4烷基,n为0〜2的整数,或其盐对玉米,小麦和大麦表现出高选择性,并且可以以低剂量控制禾本科杂草和阔叶杂草。