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公开(公告)号：US20050234672A1
公开(公告)日：2005-10-20
申请号：US11099688
申请日：2005-04-06
IPC分类号： H01L21/66 , G01N23/225 , G06F19/00
CPC分类号： G01N23/225
摘要： An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
摘要翻译： 公开了其中确定检查顺序以缩短检查时间的电子束检查装置。 通过最小化移动时间和检查时间的总和以及简单地优化覆盖距离来确定检查顺序。 在准备确定检验点和检验顺序的配方时，顺序检查的一系列检查点的顺序进行了更改，以优化检验顺序。 不仅确定了覆盖距离最小化的顺序，还根据充电状态，晶圆翘曲，输送位置等情况优化了检查点的检查顺序。
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公开(公告)号：US07504627B2
公开(公告)日：2009-03-17
申请号：US11878361
申请日：2007-07-24
IPC分类号： H01J37/28 , G01N23/225
CPC分类号： G01N23/225
摘要： An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
摘要翻译： 公开了其中确定检查顺序以缩短检查时间的电子束检查装置。 通过最小化移动时间和检查时间的总和以及简单地优化覆盖距离来确定检查顺序。 在准备确定检验点和检验顺序的配方时，顺序检查的一系列检查点的顺序进行了更改，以优化检验顺序。 不仅确定了覆盖距离最小化的顺序，还根据充电状态，晶圆翘曲，输送位置等情况优化了检查点的检查顺序。
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公开(公告)号：US20070272860A1
公开(公告)日：2007-11-29
申请号：US11878361
申请日：2007-07-24
IPC分类号： G01N23/00
CPC分类号： G01N23/225
摘要： An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
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公开(公告)号：US07256400B2
公开(公告)日：2007-08-14
申请号：US11099688
申请日：2005-04-06
IPC分类号： H01J37/28 , G01N23/225
CPC分类号： G01N23/225
摘要： An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
摘要翻译： 公开了其中确定检查顺序以缩短检查时间的电子束检查装置。 通过最小化移动时间和检查时间的总和以及简单地优化覆盖距离来确定检查顺序。 在准备确定检验点和检验顺序的配方时，顺序检查的一系列检查点的顺序进行了更改，以优化检验顺序。 不仅确定了覆盖距离最小化的顺序，还根据充电状态，晶圆翘曲，输送位置等情况优化了检查点的检查顺序。
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5.发明授权Relay device, wireless communications device, network system, program storage medium, and method 有权中继设备，无线通信设备，网络系统，程序存储介质和方法公开(公告)号：US08504833B2
公开(公告)日：2013-08-06
申请号：US13189590
申请日：2011-07-25
申请人： Satoru Yamaguchi
发明人： Satoru Yamaguchi
CPC分类号： H04W12/04 , H04L9/0841 , H04L9/0891 , H04L9/3213 , H04L63/0478 , H04L2209/80 , H04W12/02
摘要： A relay device first uses latest authentication data to determine whether request-authentication data transmitted from a wireless communications device is valid. If the latest authentication data is used to determine that the request-authentication data is valid, the relay device carries out relayed communications with the wireless communications device. If the latest authentication data is used to determine that the request-authentication data is invalid, the relay device next uses a former authentication data to determine whether the request-authentication data is valid. If the former authentication data is used to determine that the request-authentication data is valid, the relay device provides the wireless communications device with the latest authentication data to update authentication data in the wireless communications device.
摘要翻译： 中继设备首先使用最新认证数据来确定从无线通信设备发送的请求认证数据是否有效。 如果使用最新的认证数据来确定请求认证数据有效，则中继设备执行与无线通信设备的中继通信。 如果使用最新的认证数据来确定请求认证数据无效，则中继设备接下来使用以前的认证数据来确定请求认证数据是否有效。 如果先前的认证数据用于确定请求认证数据有效，则中继设备向无线通信设备提供最新认证数据，以更新无线通信设备中的认证数据。
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6.发明申请RELAY DEVICE, WIRELESS COMMUNICATIONS DEVICE, NETWORK SYSTEM, PROGRAM STORAGE MEDIUM, AND METHOD 有权继电器，无线通信设备，网络系统，程序存储介质和方法公开(公告)号：US20120030466A1
公开(公告)日：2012-02-02
申请号：US13189590
申请日：2011-07-25
申请人： Satoru Yamaguchi
发明人： Satoru Yamaguchi
CPC分类号： H04W12/04 , H04L9/0841 , H04L9/0891 , H04L9/3213 , H04L63/0478 , H04L2209/80 , H04W12/02
摘要： A relay device first uses latest authentication data to determine whether request-authentication data transmitted from a wireless communications device is valid. If the latest authentication data is used to determine that the request-authentication data is valid, the relay device carries out relayed communications with the wireless communications device. If the latest authentication data is used to determine that the request-authentication data is invalid, the relay device next uses a former authentication data to determine whether the request-authentication data is valid. If the former authentication data is used to determine that the request-authentication data is valid, the relay device provides the wireless communications device with the latest authentication data to update authentication data in the wireless communications device.
摘要翻译： 中继设备首先使用最新认证数据来确定从无线通信设备发送的请求认证数据是否有效。 如果使用最新的认证数据来确定请求认证数据有效，则中继设备执行与无线通信设备的中继通信。 如果使用最新的认证数据来确定请求认证数据无效，则中继设备接下来使用以前的认证数据来确定请求认证数据是否有效。 如果先前的认证数据用于确定请求认证数据有效，则中继设备向无线通信设备提供最新认证数据，以更新无线通信设备中的认证数据。
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公开(公告)号：US07800059B2
公开(公告)日：2010-09-21
申请号：US12073359
申请日：2008-03-04
申请人： Mitsugu Sato , Atsushi Takane , Takashi Iizumi , Tadashi Otaka , Hideo Todokoro , Satoru Yamaguchi , Kazutaka Nimura
发明人： Mitsugu Sato , Atsushi Takane , Takashi Iizumi , Tadashi Otaka , Hideo Todokoro , Satoru Yamaguchi , Kazutaka Nimura
CPC分类号： G01N23/22 , H01J37/222 , H01J37/28
摘要： An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed.In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.
摘要翻译： 本发明的目的是提供一种在抑制由于带电粒子束的照射引起的充电的影响被抑制的情况下，能够高精度地实现视区域位移的抑制的样本图像形成方法和带电粒子束装置 。 为了实现上述目的，本发明提供一种通过在样品上扫描带电粒子束并基于从样品发射的二次信号形成图像来形成样品图像的方法，该方法包括以下步骤：形成多个 通过叠加通过多个扫描时间获得的多个图像的合成图像; 以及通过校正多个合成图像之间的位置偏移并叠加多个合成图像来形成另一个合成图像，以及用于实现上述方法的带电粒子束装置。
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8.发明申请CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM APPARATUS 审中-公开充电颗粒光束对准方法和充电颗粒光束装置公开(公告)号：US20100006755A1
公开(公告)日：2010-01-14
申请号：US12564511
申请日：2009-09-22
申请人： Mitsugo Sato , Tadashi Otaka , Makoto Ezumi , Atsushi Takane , Shoji Yoshida , Satoru Yamaguchi , Yasuhiko Ozawa
发明人： Mitsugo Sato , Tadashi Otaka , Makoto Ezumi , Atsushi Takane , Shoji Yoshida , Satoru Yamaguchi , Yasuhiko Ozawa
IPC分类号： G01N23/22
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/1501 , H01J2237/153
摘要： An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.
摘要翻译： 本发明的目的是提供一种带电粒子束装置和带电粒子束装置的对准方法，即使当带电粒子束的状态发生变化时，也能够容易地使带电粒子束的光轴对准 。 本发明包括用于计算对物镜执行轴对准的对准偏转器的偏转量的计算装置，用于计算偏转量的多种计算方法被存储在计算装置中，以及选择装置，用于至少选择 提供了一种计算方法。
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公开(公告)号：US20090226096A1
公开(公告)日：2009-09-10
申请号：US12393321
申请日：2009-02-26
IPC分类号： G06K9/48
CPC分类号： G06K9/4609 , G06T7/13
摘要： An object of the present invention is to provide an edge detection technique and equipment which are capable of stably detecting an edge by suppressing the influence of noise even in the case where the image is obtained by charged particle radiation equipment, such as a scanning electron microscope and has a low S/N ratio. More specifically, the present invention is to propose a technique and equipment which are configured to determine a peak position (edge) on the basis of the following two edge extraction techniques. That is, the present invention is to propose a technique and equipment wherein at least two peaks are formed by using, as edge detection techniques, for example, one peak detection technique having a relatively high sensitivity and the other peak detection technique which is relatively less susceptible to the influence of noise than the one peak detection technique, and wherein a position where the peaks coincide with each other is determined as a true peak position (edge position).
摘要翻译： 本发明的目的是提供一种能够通过抑制噪声的影响来稳定地检测边缘的边缘检测技术和设备，即使在通过诸如扫描电子显微镜的带电粒子辐射设备获得图像的情况下 并具有较低的S / N比。 更具体地，本发明是提出一种被配置为基于以下两个边缘提取技术来确定峰值位置（边缘）的技术和设备。 也就是说，本发明提出一种技术和设备，其中通过使用作为边缘检测技术的至少两个峰形成例如具有相对较高灵敏度的一个峰值检测技术和相对较少的另一个峰值检测技术 容易受到噪声的影响而不是一个峰值检测技术，并且其中峰值彼此一致的位置被确定为真正的峰值位置（边缘位置）。
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公开(公告)号：US20070120065A1
公开(公告)日：2007-05-31
申请号：US11599611
申请日：2006-11-15
申请人： Atsushi Takane , Satoru Yamaguchi , Mitsugu Sato
发明人： Atsushi Takane , Satoru Yamaguchi , Mitsugu Sato
IPC分类号： G01K1/08
CPC分类号： H01J37/1471 , H01J37/265 , H01J2237/1501 , H01J2237/216 , H01J2237/28
摘要： A charged particle beam apparatus is provided which can prevent the accuracy of positional shift detection from being degraded owing to differences in picture quality, so that even when the state of a charged particle beam is changed at the time that optical conditions are changed or the optical axis changes with time, an auto adjustment of the optical axis can be realized easily and highly accurately. In the charged particle beam apparatus, evaluation or adjustment of focusing is conducted before the deflection condition of an alignment deflector for optical axis adjustment is changed or a table of focus adjustment amounts in correspondence with deflection conditions of the alignment deflector is provided, whereby when the deflection condition of the alignment deflector is changed, a focus adjustment is carried out in accordance with the table.
摘要翻译： 提供一种带电粒子束装置，其可以防止由于图像质量的差异而导致的位置偏移检测的精度降低，使得即使当光学条件改变时带电粒子束的状态改变或光学条件改变时， 轴随时间变化，可以容易且高精度地实现光轴的自动调节。 在带电粒子束装置中，在用于光轴调节的对准偏转器的偏转状态改变之前进行聚焦的评估或调整，或者提供与对准偏转器的偏转条件相对应的焦点调整量表， 改变对准偏转器的偏转状态，根据该表进行焦点调整。
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