公开(公告)号：US20070291248A1

公开(公告)日：2007-12-20

申请号：US11892608

申请日：2007-08-24

Applicant: Matthew McCarthy

Inventor： Matthew McCarthy

IPC: G03B27/72

CPC classification number: G02B17/0892 ,  G02B27/286 ,  G03F7/70191 ,  G03F7/70566

Abstract: A polarization control device for a lithography system selectively polarizes light in horizontal, vertical and/or circular orientations. A pair of relatively rotatable quarter-wave plates move to provide the desired polarization. When the quarter-wave plates are at a relative angle of 45 degrees, the polarization is circular. When the quarter-wave plates are both at zero or 45 degrees, the resulting polarization is vertical or horizontal. The polarization is selected based on the orientation of an image to be projected. Horizontal polarization is preferably used for images with a strong horizontal orientation, and vertical polarization is selected for images with a strong vertical orientation. Circular orientation is selected when the image has no strong horizontal or vertical orientation.

公开(公告)号：US07271874B2

公开(公告)日：2007-09-18

申请号：US10978367

申请日：2004-11-02

Applicant: Matthew McCarthy

Inventor： Matthew McCarthy

IPC: G03B27/42 ,  G03B27/54

CPC classification number: G02B17/0892 ,  G02B27/286 ,  G03F7/70191 ,  G03F7/70566

Abstract: A polarization control device for a lithography system selectively polarizes light in horizontal, vertical and/or circular orientations. A pair of relatively rotatable quarter-wave plates move to provide the desired polarization. When the quarter-wave plates are at a relative angle of 45 degrees, the polarization is circular. When the quarter-wave plates are both at zero or 45 degrees, the resulting polarization is vertical or horizontal. The polarization is selected based on the orientation of an image to be projected. Horizontal polarization is preferably used for images with a strong horizontal orientation, and vertical polarization is selected for images with a strong vertical orientation. Circular orientation is selected when the image has no strong horizontal or vertical orientation.

Abstract translation: 用于光刻系统的偏振控制装置选择性地偏振水平，垂直和/或圆形取向中的光。 一对相对可旋转的四分之一波片移动以提供期望的极化。 当四分之一波片的相对角度为45度时，极化是圆形的。 当四分之一波片均为零度或45度时，所得到的极化是垂直或水平的。 基于要投影的图像的取向来选择极化。 水平偏振优选用于具有强水平方向的图像，并且对于具有强垂直取向的图像，选择垂直偏振。 当图像没有强的水平或垂直方向时，选择圆形方向。

公开(公告)号：US06447308B1

公开(公告)日：2002-09-10

申请号：US09999599

申请日：2001-10-31

Applicant: Matthew McCarthy ,  Everett Simons

Inventor： Matthew McCarthy ,  Everett Simons

IPC: H01R458

CPC classification number: H01R13/2414

Abstract: An elastomeric device for interconnecting two or more electrical components. The device includes an elastomeric matrix having one or more outer surfaces, one or more electrically conductive pathways through the matrix, and a frame for stretching the elastomer perpendicular to the electrical pathways.

Abstract translation: 用于互连两个或多个电气部件的弹性体装置。 该装置包括具有一个或多个外表面的弹性体基体，穿过该基质的一个或多个导电通路，以及用于垂直于电通路拉伸弹性体的框架。