公开(公告)号：US20050104690A1

公开(公告)日：2005-05-19

申请号：US10969744

申请日：2004-10-19

申请人： John Larson ,  Stephen Ellis ,  Paul Bradley ,  Yury Oshmyansky

发明人： John Larson ,  Stephen Ellis ,  Paul Bradley ,  Yury Oshmyansky

IPC分类号： H03H9/02 ,  H03H9/13 ,  H03H9/58 ,  H03H9/60 ,  H03H9/56

CPC分类号： H03H9/589 ,  H03H9/02102 ,  H03H9/132 ,  H03H9/175 ,  H03H9/584 ,  H03H9/587 ,  H03H9/605

摘要： The film bulk acoustic resonator (FBAR) device comprises a substrate, an acoustic Bragg reflector over the substrate, a piezoelectric element over the acoustic Bragg reflector, and a remote-side electrode over the piezoelectric element. The acoustic Bragg reflector comprises a metal Bragg layer juxtaposed with a plastic Bragg layer. The large ratio between the acoustic impedances of the plastic material of the plastic Bragg layer and the metal of the metal Bragg layer provides sufficient acoustic isolation between the FBAR and the substrate for the frequency response of the FBAR device to exhibit minor, if any, spurious artifacts arising from undesirable acoustic coupling between the FBAR and the substrate.

摘要翻译： 膜体声波谐振器（FBAR）器件包括衬底，衬底上的声布拉格反射器，声布拉格反射器上方的压电元件以及压电元件上的远端侧电极。 声布拉格反射器包括与塑料布拉格层并置的金属布拉格层。 塑料布拉格层的塑料材料的声阻抗与金属布拉格层的金属之间的较大的比率在FBAR和衬底之间提供足够的声学隔离，以使FBAR器件的频率响应显示较小的（如果有的话）杂散 FBAR和基片之间的不良声耦合产生的伪影。

公开(公告)号：US20050093654A1

公开(公告)日：2005-05-05

申请号：US10965541

申请日：2004-10-13

申请人： John Larson ,  Stephen Ellis

发明人： John Larson ,  Stephen Ellis

IPC分类号： H03H9/02 ,  H03H9/13 ,  H03H9/58 ,  H03H9/60 ,  H03H9/56

CPC分类号： H03H9/605 ,  H03H9/02102 ,  H03H9/132 ,  H03H9/175 ,  H03H9/584 ,  H03H9/587 ,  H03H9/589

摘要： The band-pass filter has an upper film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic decoupling material. Each of the FBARs has opposed planar electrodes and a piezoelectric element between the electrodes. The acoustic decoupler controls the coupling of acoustic energy between the FBARs. Specifically, the acoustic decoupler couples less acoustic energy between the FBARs than would be coupled by direct contact between the FBARs. The reduced acoustic coupling gives the band-pass filter desirable in-band and out-of-band properties.

摘要翻译： 带通滤波器具有上膜体声波谐振器（FBAR），堆叠在下FBAR上的上FBAR，以及在FBAR之间，包括声解耦材料层的声解耦器。 每个FBAR具有相对的平面电极和电极之间的压电元件。 声耦合器控制FBAR之间的声能耦合。 具体来说，声耦合器耦合FBAR之间较少的声能，而不是FBAR之间的直接接触。 减少的声耦合给出带通滤波器所需的带内和带外特性。