公开(公告)号：US20110116145A1

公开(公告)日：2011-05-19

申请号：US12674325

申请日：2008-11-13

申请人： Kazunari Fujii ,  Takahisa Kato ,  Yoshio Hotta ,  Suguru Miyagawa ,  Takahiro Akiyama

发明人： Kazunari Fujii ,  Takahisa Kato ,  Yoshio Hotta ,  Suguru Miyagawa ,  Takahiro Akiyama

IPC分类号： G02B26/08 ,  B23P17/04

CPC分类号： G02B26/0833 ,  Y10T29/49826

摘要： A method of manufacturing an oscillator device having first and second oscillators being driven at first and second driving resonance frequencies gf1 and gf2, the method including a first step for processing the two oscillators, wherein, when the two oscillators are going to be processed as oscillators having first and second resonance frequencies different from the two driving resonance frequencies with a certain dispersion range, the two oscillators are so processed that the first and second resonance frequencies different from the two driving resonance frequencies become equal to first and second resonance frequencies f1 and f2, respectively, which are included in adjustable resonance frequency ranges, respectively, and a second step for adjusting the first and second resonance frequencies f1 and f2 so that they become equal to the first and second driving resonance frequencies gf1 and gf2, respectively.

摘要翻译： 一种制造具有第一和第二驱动谐振频率gf1和gf2的第一和第二振荡器的振荡器装置的方法，该方法包括用于处理两个振荡器的第一步骤，其中当两个振荡器将被作为振荡器处理时 具有与具有一定色散范围的两个驱动谐振频率不同的第一和第二谐振频率，两个振荡器被如此处理，使得与两个驱动谐振频率不同的第一和第二谐振频率变得等于第一和第二谐振频率f1和f2 分别包括在可调节的共振频率范围内，第二步骤用于分别调整第一和第二共振频率f1和f2使得它们分别等于第一和第二驱动谐振频率gf1和gf2。

公开(公告)号：US07855819B2

公开(公告)日：2010-12-21

申请号：US12198848

申请日：2008-08-26

申请人： Takahisa Kato ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Suguru Miyagawa ,  Kazunari Fujii ,  Shinichiro Watanabe

发明人： Takahisa Kato ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Suguru Miyagawa ,  Kazunari Fujii ,  Shinichiro Watanabe

IPC分类号： G02B26/08

CPC分类号： G02B26/0866

摘要： A swing member device comprises a swingable part supported by a supporting part to be swingable around a torsional axis on a supporting base in at least one intrinsic oscillation mode: the swing member device having a temperature-raising unit for raising the temperature of ambient atmosphere in the region of swing motion of the swingable part, the temperature-raising unit raising the temperature of the ambient atmosphere to enable decrease of an influence of an unsteady dragging force caused by the ambient atmosphere.

摘要翻译： 摆动构件装置包括由支撑部支撑的可摆动部分，以在至少一个本征振荡模式中在支撑基座上绕扭转轴线摆动：摆动构件装置具有用于将环境气氛的温度升高的升温单元 可摆动部分的摆动区域，升温单元提高环境大气的温度，能够降低由环境气氛引起的不稳定拖曳力的影响。

公开(公告)号：US07643197B2

公开(公告)日：2010-01-05

申请号：US12267803

申请日：2008-11-10

申请人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

发明人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

IPC分类号： G02B26/08

CPC分类号： G02B26/105 ,  Y10S359/90

摘要： A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined width.

摘要翻译： 一种制造基于蚀刻单晶硅衬底的振荡器的方法，所述方法包括掩模形成步骤，用于在单晶硅衬底上形成具有由多个相互耦合的振荡器组成的重复形状的图案的蚀刻掩模，每个包括 在支撑基板和可动部件之间的扭转弹簧，在使用蚀刻掩模作为掩模的同时蚀刻单晶硅基板的蚀刻步骤，在单晶硅基板上形成由多个对应的相互耦合的振荡器 以及切割步骤，用于确定每个振荡器的可移动部件和支撑基板的重复形状的宽度，该宽度有效地确定当这些振荡器用作振荡器时所需的各个振荡器的谐振频率，以及 用于通过在相邻振荡之间切割可移动部件和支撑基板进行切割 ator，以确定的宽度。

公开(公告)号：US20090235502A1

公开(公告)日：2009-09-24

申请号：US12481472

申请日：2009-06-09

申请人： Takahisa Kato ,  Yukio Furukawa ,  Takahiro Akiyama

发明人： Takahisa Kato ,  Yukio Furukawa ,  Takahiro Akiyama

IPC分类号： H01L41/22

CPC分类号： G02B26/085 ,  B81B3/0067 ,  B81B2201/042 ,  B81B2203/0181 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T156/1052

摘要： An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis 17 and it includes a movable element 11 and a mass adjusting member 19, a cavity 30 being defined between the movable member 11 and a portion of the mass adjusting member 19, such that, in response to irradiation of the mass adjusting member 19 with a laser beam, a material of the mass adjusting member contiguous to the cavity 30 is partly removed, the material being removed thereby including a portion of the mass adjusting member not irradiated with the laser beam.

摘要翻译： 一种振荡器装置及其制造方法，其能够通过宽范围和高速度调节摆动构件的惯性矩或重心位置，其中振荡构件围绕振荡轴线17摆动，并且其包括可移动 元件11和质量调节构件19，空腔30限定在可动构件11和质量调节构件19的一部分之间，使得响应于用激光束照射质量调节构件19，材料 部分地去除与空腔30相邻的质量调节构件，从而被去除的材料包括未被激光束照射的质量调节构件的一部分。

公开(公告)号：US20090067019A1

公开(公告)日：2009-03-12

申请号：US12198848

申请日：2008-08-26

申请人： Takahisa Kato ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Suguru Miyagawa ,  Kazunari Fujii ,  Shinichiro Watanabe

发明人： Takahisa Kato ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Suguru Miyagawa ,  Kazunari Fujii ,  Shinichiro Watanabe

IPC分类号： G02B26/08

CPC分类号： G02B26/0866

摘要： A swing member device comprises a swingable part supported by a supporting part to be swingable around a torsional axis on a supporting base in at least one intrinsic oscillation mode: the swing member device having a temperature-raising unit for raising the temperature of ambient atmosphere in the region of swing motion of the swingable part, the temperature-raising unit raising the temperature of the ambient atmosphere to enable decrease of an influence of an unsteady dragging force caused by the ambient atmosphere.

摘要翻译： 摆动构件装置包括由支撑部支撑的可摆动部分，以在至少一个本征振荡模式中在支撑基座上绕扭转轴线摆动：摆动构件装置具有用于将环境气氛的温度升高的升温单元 可摆动部分的摆动区域，升温单元提高环境大气的温度，能够降低由环境气氛引起的不稳定拖曳力的影响。

公开(公告)号：US5224404A

公开(公告)日：1993-07-06

申请号：US863301

申请日：1992-06-24

申请人： Shinichi Kono ,  Takahiro Akiyama

发明人： Shinichi Kono ,  Takahiro Akiyama

IPC分类号： B23B5/44 ,  B23Q15/00 ,  B23Q27/00 ,  G05B19/18

CPC分类号： G05B19/184 ,  B23Q27/00 ,  G05B2219/34388 ,  G05B2219/45124 ,  G05B2219/45236 ,  G05B2219/50216 ,  Y10T82/10 ,  Y10T82/13

摘要： A polygon working method in which a polygonal portion can be formed on a workpiece in such a manner that a specific region of the polygonal portion is accurately in alignment with a predetermined circumferential position on the workpiece. In this method, the workpiece and a tool are simultaneously rotated in a manner such that a cutter of the tool is opposed to a circumferential workpiece position deviated from a predetermined circumferential position of the workpiece by the amount corresponding to the difference between a first positional deviation (PE1), which is produced during the time interval between the start of the rotation of a first main spindle (3a) fitted with the workpiece (1) and the establishment of a steady-state operation mode, in which the first and second main spindles (3a, 3b) rotate with a predetermined rotational speed ratio, and a second positional deviation (PE2), which is produced during the time interval between the start of the rotation of the second main spindle fitted with the tool and the establishment of the steady-state operation mode, and tool feed is started when the steady-state operation mode is established.

摘要翻译： PCT No.PCT / JP91 / 01476 Sec。 371日期：1992年6月24日 102（e）日期1992年6月24日PCT 1991年10月29日PCT公布。 出版物WO92 / 07684 日期：1992年5月14日。一种多边形加工方法，其中可以在工件上形成多边形部分，使得多边形部分的特定区域准确地与工件上的预定圆周位置对准。 在该方法中，工件和工具同时旋转，使得刀具的刀具与从工件的预定圆周位置偏离的圆周工件位置相对应于与第一位置偏差 （PE1），其在装配有工件（1）的第一主轴（3a）的旋转开始之间的时间间隔和建立稳态操作模式之间产生，其中第一和第二主体 主轴（3a，3b）以预定的转速比旋转，并且在与工具配合的第二主轴的旋转开始之间的时间间隔期间产生的第二位置偏差（PE2） 稳态运行模式，并在稳态运行模式建立时开始进刀。

公开(公告)号：US09314820B2

公开(公告)日：2016-04-19

申请号：US13393918

申请日：2010-10-28

申请人： Takahiro Akiyama ,  Makoto Takagi ,  Kazunari Fujii ,  Hidemasa Mizutani

发明人： Takahiro Akiyama ,  Makoto Takagi ,  Kazunari Fujii ,  Hidemasa Mizutani

IPC分类号： B06B1/00 ,  B06B1/02 ,  G01N29/24

CPC分类号： G01N29/2418 ,  B06B1/0292 ,  G01N29/2406 ,  G01N2291/101

摘要： Provided is an ultrasonic detection device including: a capacitive electromechanical transducer including a cell that includes a first electrode and a second electrode disposed so as to oppose with a space; a voltage source for developing a potential difference between the first electrode and the second electrode; and an electric circuit for converting a current, which is caused by a change in electrostatic capacitance between the first electrode and the second electrode due to vibration of the second electrode, into a voltage, in which the capacitive electromechanical transducer provides an output current with a high-pass characteristic having a first cutoff frequency with respect to a frequency, the electric circuit provides an output with a low-pass characteristic having a second cutoff frequency with respect to the frequency, and the second cutoff frequency is smaller than the first cutoff frequency.

摘要翻译： 本发明提供一种超声波检测装置，其特征在于，包括：电容式机电换能器，其包括具有与空间对置配置的第一电极和第二电极的电池单元; 用于在第一电极和第二电极之间形成电位差的电压源; 以及用于将由于第二电极的振动而由第一电极和第二电极之间的静电电容的变化引起的电流转换成电压的电路，其中电容式机电换能器提供输出电流 具有相对于频率具有第一截止频率的高通特性，所述电路提供具有相对于所述频率具有第二截止频率的低通特性的输出，并且所述第二截止频率小于所述第一截止频率 。

公开(公告)号：US08412075B2

公开(公告)日：2013-04-02

申请号：US12992569

申请日：2009-05-11

申请人： Takahiro Akiyama ,  Kazunari Fujii ,  Yukio Furukawa ,  Shinichiro Iimura

发明人： Takahiro Akiyama ,  Kazunari Fujii ,  Yukio Furukawa ,  Shinichiro Iimura

IPC分类号： G03G15/04

CPC分类号： G02B26/127

摘要： A light deflector device includes a light deflector having an oscillation system, a driving unit for driving the oscillation system and a drive controlling unit for supplying a drive signal. The oscillation system simultaneously generates a first oscillating motion of a first frequency and a second oscillating motion of a second frequency. The drive controlling unit supplies a drive signal formed by synthetically combining a first signal having the first frequency and a second signal having the second frequency to the driving unit and, at the same time, another drive signal for changing at least the amplitude of the first oscillating motion, the amplitude of second oscillating motion or the relative phase difference of the first oscillating motion and the second oscillating motion to the driving unit in order to correct an offset of scanning light deflected by the light deflector.

摘要翻译： 光偏转器装置包括具有振荡系统的光偏转器，用于驱动振荡系统的驱动单元和用于提供驱动信号的驱动控制单元。 振荡系统同时产生第一频率的第一振荡运动和第二频率的第二振荡运动。 驱动控制单元将通过将具有第一频率的第一信号和具有第二频率的第二信号合成组合的驱动信号提供给驱动单元，并且同时提供用于至少改变第一频率的振幅的另一个驱动信号 振荡运动，第二振荡运动的幅度或第一振荡运动和第二振荡运动的相对相位差到驱动单元，以便校正由偏光板偏转的扫描光的偏移。

公开(公告)号：US08305674B2

公开(公告)日：2012-11-06

申请号：US12673694

申请日：2008-10-28

申请人： Suguru Miyagawa ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Takahisa Kato ,  Kazunari Fujii

发明人： Suguru Miyagawa ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Takahisa Kato ,  Kazunari Fujii

IPC分类号： G02B26/10

CPC分类号： G02B26/105 ,  G02B26/085 ,  H04N1/1135 ,  Y10T29/49774

摘要： A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount.

摘要翻译： 一种制造振荡器装置的方法，该振荡器装置具有通过用于围绕扭转轴线摆动并被以共振频率驱动的扭转弹簧相对于固定构件支撑的振荡器的方法，该方法包括用于确定惯性的假定值的第一步骤 振荡器的力矩，用于测量共振频率的第二步骤，用于计算扭簧的弹簧常数的第三步骤，根据在所述第一和第二步骤获得的惯性力矩的假定值和测得的共振频率， 基于在所述第三步骤计算的弹簧常数和相对于振荡器的共振频率确定的目标共振频率，计算用于振荡器的惯性矩或扭簧的弹簧常数的调节量的第四步骤 ，以便将谐振频率调节到目标谐振频率，以及用于调整res的第五步骤 基于计算出的调整量，振荡器的频率与目标谐振频率成正比。

公开(公告)号：US20110234146A1

公开(公告)日：2011-09-29

申请号：US13030252

申请日：2011-02-18

申请人： Yasusuke Iwashita ,  Tadashi Okita ,  Takahiro Akiyama ,  Geng Li

发明人： Yasusuke Iwashita ,  Tadashi Okita ,  Takahiro Akiyama ,  Geng Li

IPC分类号： H02P23/00

CPC分类号： G05D13/64 ,  B23Q17/10 ,  G05B19/404 ,  G05B2219/41136 ,  G05B2219/41319 ,  G05B2219/49254

摘要： The controller controls a spindle connected to an induction motor via a belt by controlling the rotational velocity of the induction motor. The spindle has an encoder attached thereto for detecting the position of the spindle, but the induction motor does not have a velocity detector attached thereto. The velocity of the induction motor is estimated from the spindle velocity obtained from output of the encoder, and slip of the belt is detected based on the estimated velocity of the induction motor. When occurrence of slip of the belt is detected, the estimated velocity of the induction motor will not be used for the control of the induction motor.

摘要翻译： 控制器通过控制感应电机的旋转速度通过皮带控制连接到感应电机的主轴。 主轴具有附接到其上的编码器，用于检测主轴的位置，但是感应电动机没有连接有速度检测器。 感应电动机的速度是根据从编码器的输出获得的主轴速度来估计的，并且基于感应电动机的估计速度来检测皮带的滑移。 当检测到皮带的滑动发生时，感应电动机的估计速度将不被用于感应电动机的控制。