公开(公告)号：US5307568A

公开(公告)日：1994-05-03

申请号：US942501

申请日：1992-09-09

申请人： Takenobu Matsuo ,  Tsuyoshi Wakabayashi ,  Shjui Moriya

发明人： Takenobu Matsuo ,  Tsuyoshi Wakabayashi ,  Shjui Moriya

IPC分类号： C23C16/44 ,  H01J37/32 ,  H01L21/00 ,  F26B13/30

CPC分类号： H01L21/67017 ,  C23C16/4401 ,  C23C16/45561 ,  H01J37/3244 ,  H01J37/32871 ,  H01J2237/022

摘要： A gas supply system includes a gas source containing a process gas to be supplied in a reduced-pressure container, a piping unit including a metallic pipe through which the process gas circulates and arranged between the gas supply source and the reduced-pressure container, and a duct formed of a metallic and/or nonmetallic pipe and arranged between the piping unit and the reduced-pressure container. At least part of the duct is formed of an austenitic stainless steel containing 6% or more of molybdenum by weight.

摘要翻译： 气体供给系统包括：气体源，其包含供给到减压容器内的处理气体;管道单元，包括金属管，工业气体通过该金属管在气体供给源和减压容器之间循环配置;以及 由金属管和/或非金属管形成的管道，布置在管道单元和减压容器之间。 管道的至少一部分由含有6重量％以上的钼的奥氏体不锈钢形成。