MICROELECTROMECHANICAL GAS SENSOR BASED ON KNUDSEN THERMAL FORCE

    公开(公告)号:US20200209174A1

    公开(公告)日:2020-07-02

    申请号:US16233023

    申请日:2018-12-26

    Abstract: A microelectromechanical (MEMS) gas sensor operating based on Knudsen thermal force is disclosed. The sensor includes a substrate, at least one stationary assembly that is fixedly coupled to the substrate, and at least one moveable assembly that is positioned above the substrate which is biased to move substantially according to a main axis and juxtaposed with the at least one stationary assembly.

    CONTINUOUS ROLL-TO-ROLL FREEZE-DRYING SYSTEM AND PROCESS

    公开(公告)号:US20190226760A1

    公开(公告)日:2019-07-25

    申请号:US16338532

    申请日:2017-10-10

    Abstract: Roll-to-roll freeze-drying (lyophilization) system and process for facilitating freeze-drying processes and enabling the collection of data by which a freeze-drying process can be monitored and evaluated. Such a system includes a roll-to-roll freeze-drying apparatus adapted to continuously freeze and dry a liquid to form a freeze-dried and encapsulate freeze-dried sheet portions of the freeze-dried sheet to create premeasured pouches containing the freeze-dried sheet portions. The system further includes a metrology section that monitors any of the freeze-dried sheet and the freeze-dried sheet portions during the freezing and drying of the liquid to generate data for controlling the freezing and drying of the liquid.

    Microelectromechanical gas sensor based on knudsen thermal force

    公开(公告)号:US10161818B2

    公开(公告)日:2018-12-25

    申请号:US15183259

    申请日:2016-06-15

    Abstract: A system operating based on Knudsen thermal force includes a microelectromechanical (MEMS) gas sensor, the MEMS gas sensor includes a substrate. The sensor further includes at least one stationary assembly fixedly coupled to the substrate, the at least one stationary assembly terminating at corresponding pads configured to receive an electrical current for heating the at least one stationary assembly. Additionally, the sensor includes at least one moveable assembly disposed above the substrate and biased to move substantially according to a main axis and juxtaposed with the at least one stationary assembly.

Patent Agency Ranking