公开(公告)号：US20210229984A1

公开(公告)日：2021-07-29

申请号：US17155429

申请日：2021-01-22

Applicant: STMicroelectronics S.r.l.

Inventor： Enri DUQI ,  Nicolo' BONI ,  Lorenzo BALDO ,  Massimiliano MERLI ,  Roberto CARMINATI

IPC: B81C1/00 ,  H01L41/35

Abstract: To manufacture an oscillating structure, a wafer is processed by: forming torsional elastic elements; forming a mobile element connected to the torsional elastic elements; processing the first side of the wafer to form a mechanical reinforcement structure; and processing the second side of said wafer by steps of chemical etching, deposition of metal material, and/or deposition of piezoelectric material. Processing of the first side of the wafer is carried out prior to processing of the second side of the wafer so as not to damage possible sensitive structures formed on the first side of the wafer.

公开(公告)号：US20210188622A1

公开(公告)日：2021-06-24

申请号：US17126929

申请日：2020-12-18

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' BONI ,  Roberto CARMINATI ,  Massimiliano MERLI

IPC: B81B3/00 ,  H01L41/09 ,  G02B26/08 ,  G03B21/00 ,  H04N9/31

Abstract: A micro-electro-mechanical device is formed by a fixed structure having a cavity. A tiltable structure is elastically suspended over the cavity and has a main extension in a tiltable plane and is rotatable about a rotation axis parallel to the tiltable plane. A piezoelectric actuation structure includes first and second driving arms carrying respective piezoelectric material regions and extending on opposite sides of the rotation axis. The first and the second driving arms are rigidly coupled to the fixed structure and are elastically coupled to the tiltable structure. During operation, a stop structure limits movements of the tiltable structure with respect to the actuation structure along a planar direction perpendicular to the rotation axis. The stop structure has a first planar stop element formed between the first driving arm and the tiltable structure and a second planar stop element formed between the second driving arm and the tiltable structure.

公开(公告)号：US20200310110A1

公开(公告)日：2020-10-01

申请号：US16830920

申请日：2020-03-26

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto CARMINATI ,  Nicolo' BONI ,  Massimiliano MERLI

IPC: G02B26/08 ,  B81B3/00

Abstract: A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.