公开(公告)号：US11448871B2

公开(公告)日：2022-09-20

申请号：US16539109

申请日：2019-08-13

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo′ Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: G02B26/08 ,  H02N2/02 ,  H02N2/04

Abstract: A micromechanical device includes a fixed structure, a mobile portion rotatable about a first rotation axis, and a first actuation structure arranged between the fixed structure and the mobile portion to enable rotation of the mobile portion about the first rotation axis. The mobile portion includes a supporting structure, a tiltable platform rotatable about a second rotation axis, transverse to the first rotation axis, and a second actuation structure coupled between the tiltable platform and the supporting structure. Stiffening elements are arranged between the supporting structure and the fixed structure. The micromechanical device may be used within a pico-projector.

公开(公告)号：US11327295B2

公开(公告)日：2022-05-10

申请号：US16830920

申请日：2020-03-26

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Nicolo' Boni ,  Massimiliano Merli

IPC: G02B26/08 ,  B81B3/00

Abstract: A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.

公开(公告)号：US10048491B2

公开(公告)日：2018-08-14

申请号：US15266063

申请日：2016-09-15

Applicant: STMicroelectronics S.r.l.

Inventor： Massimiliano Merli ,  Roberto Carminati ,  Marco Rossi

IPC: G02B26/08 ,  H01L41/09 ,  H03H9/02 ,  G01L1/18 ,  G01L1/16 ,  G01L5/00 ,  G02B26/10 ,  H04N5/225 ,  G06F3/042

Abstract: A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.

公开(公告)号：US20170285332A1

公开(公告)日：2017-10-05

申请号：US15266063

申请日：2016-09-15

Applicant: STMicroelectronics S.r.l.

Inventor： Massimiliano Merli ,  Roberto Carminati ,  Marco Rossi

IPC: G02B26/08 ,  H03H9/02 ,  G02B26/10 ,  G01L1/16 ,  G01L5/00 ,  H01L41/09 ,  G01L1/18

CPC classification number: G02B26/0858 ,  G01L1/16 ,  G01L1/18 ,  G01L5/00 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105 ,  G06F3/0423 ,  H01L41/09 ,  H03H9/02275 ,  H04N5/225

Abstract: A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.