公开(公告)号：US20180090344A1

公开(公告)日：2018-03-29

申请号：US15470044

申请日：2017-03-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： SungHyup KIM ,  Dong-Wook Kim ,  Sungmoon Park ,  JungHwan Um ,  Taeseok Oh

IPC: H01L21/67 ,  H01L21/673 ,  H01J37/32 ,  H01L21/68 ,  H01L21/3065

Abstract: A ring assembly and a chuck assembly therewith are provided. The ring assembly may include an edge ring that is provided to enclose a chuck body supporting a substrate. The edge ring may include a first top surface, a second top surface positioned outside the first top surface and above the first top surface, a first inner side surface connecting the first top surface to the second top surface, and at least one first flow hole extending outward from one of the first top surface and the first inner side surface, thereby penetrating the edge ring.

公开(公告)号：US20240379386A1

公开(公告)日：2024-11-14

申请号：US18402844

申请日：2024-01-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： YONGSUK CHOI ,  Ilkyu Jeong ,  Hyunwoong Hwang ,  Kyung-Won Kang ,  Dong-Wook Kim ,  Seok Heo

IPC: H01L21/67 ,  H01L21/677

Abstract: A substrate processing system includes a cluster module having substrate processing devices, a load port through which a substrate is loaded, and a substrate cleaning device between the cluster module and the load port, the substrate cleaning device being configured to clean the substrate processed in the substrate processing devices, and the substrate cleaning device including a substrate cleaner having a cleaning chuck to support the substrate, and a cleaning nozzle configured to spray a fluid toward the cleaning chuck.

公开(公告)号：USD987612S1

公开(公告)日：2023-05-30

申请号：US29785816

申请日：2021-05-27

Applicant: Samsung Electronics Co., Ltd.

Designer： Jae-Wook Yoo ,  Sin-Wi Moon ,  Dae-Hun Jung ,  Byung-Min Woo ,  Dong-Wook Kim ,  Jee-Won Kim

Abstract: FIG. 1 is a front perspective view of a television receiver showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left-side view thereof;
FIG. 5 is a right-side view thereof;
FIG. 6 is a top view thereof;
FIG. 7 is a bottom view thereof; and,
FIG. 8 is a rear perspective view thereof; and,
FIG. 9 is an enlarged view of the encircled portion in FIG. 8.
The evenly-dashed broken lines in the figures depict portions of the television receiver which form no part of the claimed design. The dot-dash broken lines encircling portions of the claimed design that are shown in enlargements form no part of the claimed design.