公开(公告)号：US20240091902A1

公开(公告)日：2024-03-21

申请号：US18229026

申请日：2023-08-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangyun LEE ,  Younghun KIM

IPC: B24B37/32 ,  B24B57/02

CPC classification number: B24B37/32 ,  B24B57/02

Abstract: Provided is a retainer ring, a chemical mechanical polishing apparatuses including the same, and a substrate polishing method using the same. A slurry groove is upwardly recessed from a bottom surface of the retainer ring. The slurry groove extends in an arc shape from an inner surface of the retainer ring toward an outer surface of the retainer ring. A curvature radius of the slurry groove is greater than a distance between a center of the retainer ring and a curvature center of the slurry groove.

公开(公告)号：US20240079429A1

公开(公告)日：2024-03-07

申请号：US18236652

申请日：2023-08-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungmo AHN ,  Sangeun MUN ,  Choonlae CHO ,  Sookyoung ROH ,  Hyunsung PARK ,  Seokho YUN ,  Sangyun LEE ,  Junho LEE

IPC: H01L27/146

CPC classification number: H01L27/14625 ,  H01L27/14605 ,  H01L27/14621

Abstract: An image sensor includes a sensor substrate including a plurality of unit pixel groups each including a first pixel, a second pixel, a third pixel, and a fourth pixel arranged in a Bayer pattern, and a color separating lens array which separates incident light according to wavelengths and condenses the light on each of the first to fourth pixels, wherein the color separating lens array a plurality of pixel corresponding groups respectively corresponding to the plurality of unit pixel groups, and the plurality of pixel corresponding groups each include first to fourth pixel corresponding regions corresponding to the first to fourth pixels and a plurality of nanoposts. From among the plurality of pixel corresponding groups, relative positional relationships between the nanoposts of the first to fourth pixel corresponding regions in each of the plurality of peripheral groups that are located out of the center of the color separating lens array may be different from each other.

公开(公告)号：US20230246044A1

公开(公告)日：2023-08-03

申请号：US18102489

申请日：2023-01-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seokho YUN ,  Sookyoung ROH ,  Sangyun LEE ,  Junho LEE ,  Choonlae CHO ,  Jungho CHA

IPC: H01L27/146

CPC classification number: H01L27/14621 ,  H01L27/14645 ,  H01L27/1463

Abstract: An image sensor includes a sensor substrate including a plurality of light sensing cells configured to sense light, and a color filter array provided on the sensor substrate. The color filter includes a plurality of filters provided to respectively face the plurality of light sensing cells to filter light of different wavelengths and a fence structure configured to separate the plurality of filters from each other. A width of the fence structure may have a plurality of different values according to types of two filters provided adjacent to each other with the width interposed therebetween. Crosstalk between adjacent cells may be reduced by the image sensor.

公开(公告)号：US20230044798A1

公开(公告)日：2023-02-09

申请号：US17882108

申请日：2022-08-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungmo AHN ,  Sookyoung ROH ,  Sangyun LEE ,  Sangeun MUN ,  Seokho YUN

IPC: H01L27/146

Abstract: Provided is an image sensor including a color separating lens array and an electronic device including the color sensor. The image sensor includes a sensor substrate including a plurality of first pixels and a plurality of second pixels and having a two-dimensional array of unit pixels including the first pixel and the second pixel; and a color separating lens array configured to concentrate light of a first wavelength on each of the first pixels, and concentrate light of a second wavelength on each of the second pixels, wherein at least one pixel of the unit pixel includes a plurality of light sensing cells for independently sensing light by being electrically separated by a deep trench isolation (DTI) structure, and the color separating lens array includes a nanopost array, which does not include a nanopost provided on the DTI structure.

公开(公告)号：US20220150453A1

公开(公告)日：2022-05-12

申请号：US17518181

申请日：2021-11-03

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY

Inventor： Sangyun LEE ,  Moongi KANG ,  Seokho YUN ,  Jonghyun KIM ,  Kyeonghoon JEONG

IPC: H04N9/077 ,  G02B27/10 ,  H04N9/04 ,  H04N9/64 ,  H04N9/73

Abstract: An apparatus for acquiring images includes an image sensor and a signal processor. The image sensor may include a sensor substrate and a color separation lens array, wherein the sensor substrate includes a plurality of photo-sensing cells, and the color separation lens array may separate an incident light into a plurality of lights having different wavelengths and forms a phase distribution for condensing the plurality of lights having the different wavelengths on adjacent photo-sensing cells of the plurality of photo-sensing cells. The signal processor may perform deconvolution on sensing signals of the plurality of photo-sensing cells to obtain a sub-sampled image, perform demosaicing to restore a full resolution image having a full resolution from the sub-sampled image, and correct a color of the full resolution image using a point spread function (PSF) of the color separation lens array.

公开(公告)号：US20220139994A1

公开(公告)日：2022-05-05

申请号：US17514663

申请日：2021-10-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangyun LEE ,  Sookyoung ROH ,  Seokho YUN

IPC: H01L27/146

Abstract: An image sensor includes: a sensor substrate including a first pixel and a second pixel; and a color separating lens array for condensing light of first wavelength onto the first pixel by changing a phase of light of the first wavelength included in incident light, wherein the sensor substrate further includes: an active pixel area for outputting an active pixel signal for image generation; a first dummy pixel area arranged outside the active pixel area and outputting a dummy pixel signal to correct image data generated from the active pixel signal; and a second dummy pixel area arranged outside the active pixel area and the first dummy pixel area and not outputting any pixel signal.

公开(公告)号：US20220137424A1

公开(公告)日：2022-05-05

申请号：US17515017

申请日：2021-10-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangyun LEE ,  Sookyoung ROH ,  Seokho YUN

IPC: G02B27/10 ,  G02B27/12 ,  H01L27/146 ,  H04N9/077 ,  H04N9/04

Abstract: Provided is an image sensor including a sensor substrate including a first photosensitive cell and a second photosensitive cell which are configured to sense light incident on the sensor substrate, a color separating lens array configured to change a phase of first wavelength light and a phase of second wavelength light such that the first wavelength light travels to the first photosensitive cell and the second wavelength light travels to the second photosensitive cell, and a spectrum shaping layer including a plurality of nanostructures respectively having a first refractive index, and a dielectric material provided between the plurality of nanostructures and having a second refractive index, the spectrum shaping layer being provided between the sensor substrate and the color separating lens array and configured to shape a spectral profile of the light incident on the sensor substrate by reflecting and/or absorbing portion of light passing through the color separating lens array.