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公开(公告)号：US20160107926A1
公开(公告)日：2016-04-21
申请号：US14404634
申请日：2014-10-23
发明人： Jiangbo Yao
IPC分类号： C03C17/00
CPC分类号： C03C17/32 , B32B17/064 , B32B27/281 , C03C2218/328 , G03F7/039
摘要： A manufacturing method of a flexible substrate is provided. The method comprises: coating a flexible substrate material and drying it; using a mask to expose the dried flexible substrate material, wherein the mask has a plurality of opaque regions distanced from each other, and the opaque regions form a designed pattern; developing the flexible substrate material to remove a portion of the flexible substrate material except the opaque regions; and curing the flexible substrate material to form a plurality of films comprising the flexible substrate material, which correspond to the designed pattern.
摘要翻译： 提供柔性基板的制造方法。 该方法包括：涂覆柔性基材并干燥; 使用掩模露出干燥的柔性基底材料，其中所述掩模具有彼此远离的多个不透明区域，并且所述不透明区域形成设计图案; 展开所述柔性基底材料以除去所述柔性基底材料的除所述不透明区域之外的部分; 以及固化所述柔性基材材料，以形成与所设计的图案相对应的包含所述柔性基材的多个薄膜。
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公开(公告)号：US20150155191A1
公开(公告)日：2015-06-04
申请号：US14240332
申请日：2014-01-17
发明人： Jiangbo Yao , Chunliang Lee
IPC分类号： H01L21/673
CPC分类号： H01L21/67326 , B25H3/04
摘要： The present disclosure relates to a substrate storage rack, including a hollow rack body with a first, a second, a third, and a fourth lateral surfaces, wherein at least one substrate laying layer is arranged in the rack body along a vertical direction. The substrate laying layer includes: a first support connected with the rack body and arranged at the second lateral surface; first supporting bars transversely arranged on the first support and extending to the interior of the rack body; a second support connected with the rack body and arranged at the fourth lateral surface; and second supporting bars transversely arranged on the second support and extending to the interior of the rack body. Since the first and the second supporting bars are arranged on the second and the fourth lateral surfaces of the rack body respectively, storing substrates in the rack body can be ensured. Then, the first lateral surface can be used as a fetching and feeding port for an automatic manipulator arm and the fourth lateral surface can be used as a manual fetching and feeding port, so that bidirectional fetching and feeding of the substrates in the substrate storage rack can be realized, and thus the production efficiency can be effectively improved.
摘要翻译： 本公开涉及一种基板存储架，其包括具有第一，第二，第三和第四侧表面的中空框体，其中至少一个基板铺设层沿着垂直方向布置在所述齿条体中。 衬底敷设层包括：第一支撑件，其与所述齿条体连接并且布置在所述第二侧表面处; 第一支撑杆横向布置在第一支撑件上并延伸到齿条体的内部; 第二支撑件，其与所述齿条体连接并且布置在所述第四侧表面处; 横向布置在第二支撑件上并延伸到机架主体内部的第二支撑杆。 由于第一支撑杆和第二支撑杆分别布置在齿条体的第二和第四侧面上，因此可以确保在基座上存储基板。 然后，第一侧面可以用作自动操纵臂的取出和进给口，并且第四侧面可以用作手动取出和进给口，使得基板存储架中的基板的双向取入和进给 可以实现，从而可以有效地提高生产效率。
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