公开(公告)号：US09206036B2

公开(公告)日：2015-12-08

申请号：US13478147

申请日：2012-05-23

Applicant: Jun Fujiyoshi ,  Yasukazu Kimura

Inventor： Jun Fujiyoshi ,  Yasukazu Kimura

IPC: G02B26/00 ,  G02F1/03 ,  G02F1/07 ,  B81C1/00 ,  G02B26/02

CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81C2203/054 ,  G02B26/02

Abstract: A cut which penetrates a resin layer is formed in the resin layer such that the cut surrounds a third upper surface. A film is formed such that the film covers the whole resin layer except for a bottom surface of the resin layer inside the cut and at least a portion of the resin layer is exposed outside the cut. The resin layer which is wholly covered with the film is left inside the cut, and the whole resin layer continuously formed with a surface exposed from the film is removed outside the cut. A bump is formed by the resin layer and the film inside the cut, and a shutter and at least a portion of a drive part are formed by the film outside the cut in a state where these parts are floated from a first substrate.

Abstract translation: 在树脂层中形成穿过树脂层的切口，使得切口围绕第三上表面。 形成膜，使得膜覆盖除了切口内部的树脂层的底表面以外的整个树脂层，并且至少一部分树脂层露出切口外。 完全被膜覆盖的树脂层留在切口内，并且在切割外面除去连续形成有从膜暴露的表面的整个树脂层。 通过树脂层和切口内的膜形成凸块，并且在这些部件从第一基板浮起的状态下，通过切口外部的薄膜形成活门和驱动部分的至少一部分。