Power supply circuit for plasma generation, plasma generating apparatus, plasma processing apparatus and plasma processed object
    21.
    发明授权
    Power supply circuit for plasma generation, plasma generating apparatus, plasma processing apparatus and plasma processed object 有权
    等离子体发生电源电路,等离子体发生装置,等离子体处理装置和等离子体处理物体

    公开(公告)号:US07719198B2

    公开(公告)日:2010-05-18

    申请号:US10594980

    申请日:2005-02-17

    IPC分类号: H01J7/24

    CPC分类号: H05H1/36 H05H1/48

    摘要: A power supply circuit for plasma generation by which a large quantity of generated plasma can be smoothly obtained without increasing the sizes of an apparatus. An electric discharge generating electrode is composed of two or more first electrodes and one or more second electrodes. An LC series circuit is provided by connecting a capacitor C and a coil L in series between one of outputs of an alternating high voltage generating circuit which generates an alternating high voltage to be applied between the electrodes of electric discharge generating electrode, and the first electrode. When electricity is discharged in one of the electrode pair, voltage drop is suppressed by the coil, and since electric discharge from the other electrode pair is induced without being disturbed, a large quantity of plasma can be smoothly generated by common use of the alternating high voltage generating circuit.

    摘要翻译: 一种用于等离子体产生的电源电路,通过该电源电路可以平稳地获得大量的等离子体,而不增加装置的尺寸。 放电产生电极由两个或更多个第一电极和一个或多个第二电极组成。 通过将电容器C和线圈L串联连接在产生施加在放电产生电极的电极之间的交流高电压的交流高压发生电路的输出之一和第一电极之间来提供LC串联电路 。 当在一个电极对中放电时,由于线圈抑制了电压降,并且由于不会受到干扰而引起来自另一个电极对的放电,所以通常使用交替高电平可以平滑地产生大量的等离子体 电压发生电路。

    Metal nanoparticles and method for manufacturing same
    22.
    发明授权
    Metal nanoparticles and method for manufacturing same 有权
    金属纳米粒子及其制造方法

    公开(公告)号:US07648554B2

    公开(公告)日:2010-01-19

    申请号:US10522941

    申请日:2003-08-01

    IPC分类号: B22F9/20

    摘要: The main object of the present invention is to manufacture, on an industrial scale, metal nanoparticles with excellent dispersion stability, and therefore provides metal nanoparticles containing a metal component, further containing at least one of phosphorus, nitrogen, and oxygen, and the average particle size being from 1 to 100 nm.

    摘要翻译: 本发明的主要目的是在工业规模上制造具有优异的分散稳定性的金属纳米粒子,因此提供含有金属成分的金属纳米粒子,其还含有磷,氮,氧中的至少一种,平均粒子 尺寸为1至100nm。

    Catalysts for manufacturing carbon substances
    23.
    发明授权
    Catalysts for manufacturing carbon substances 失效
    用于制造碳物质的催化剂

    公开(公告)号:US07405178B2

    公开(公告)日:2008-07-29

    申请号:US10328105

    申请日:2002-12-23

    IPC分类号: B01J23/58

    摘要: A catalyst for manufacturing carbon substances, such as carbon nanotube that has a diameter of 1000 nm or less, the catalyst containing at least iron, cobalt or nickel of a first element group and tin or indium of a second element group. The catalyst can be formed by at least tin and indium in addition to cobalt or nickel. The former catalyst provides a 2-component type catalyst and a multi-component type catalyst that is composed on the basis of the 2-component type catalyst, and the later catalyst provides a 3-component type catalyst and a multi-component type catalyst that is composed on the basis of the 3-component type catalyst.

    摘要翻译: 用于制造直径为1000nm以下的碳纳米管等碳材料的催化剂,所述催化剂至少含有第一元素基团的铁,钴或镍,以及第二元素基团的锡或铟。 除了钴或镍之外,催化剂可以至少由锡和铟形成。 前一种催化剂提供基于2-组分型催化剂组成的2-组分型催化剂和多组分型催化剂,后催化剂提供一种3-组分型催化剂和多组分型催化剂, 是基于3组分型催化剂组成的。

    Noble-Metal Nanoparticles and Method for Production Thereof
    24.
    发明申请
    Noble-Metal Nanoparticles and Method for Production Thereof 审中-公开
    贵金属纳米粒子及其生产方法

    公开(公告)号:US20070278457A1

    公开(公告)日:2007-12-06

    申请号:US10591708

    申请日:2005-03-08

    IPC分类号: H01B1/12

    摘要: An object of the present invention is to manufacture of an industrial scale noble metal nanoparticles with superior dispersion stability. The present invention relates to a noble metal nanoparticle controlled to a mean particle size of 20 nm or less that is a metal nanoparticle comprising a noble metal component, and that contains at least one type of an organic component containing N and an organic component containing S.

    摘要翻译: 本发明的目的是制造具有优异的分散稳定性的工业规模的贵金属纳米颗粒。 本发明涉及控制为平均粒径为20nm以下的贵金属纳米粒子,其为包含贵金属成分的金属纳米粒子,并且含有至少一种含有N的有机成分和含有S的有机成分 。

    Nanotube probe and method for manufacturing same
    25.
    发明授权
    Nanotube probe and method for manufacturing same 有权
    纳米管探头及其制造方法

    公开(公告)号:US07138627B1

    公开(公告)日:2006-11-21

    申请号:US11169380

    申请日:2005-06-29

    IPC分类号: G01N13/16 G01B5/28

    摘要: A nanotube probe assembled under real-time observation inside an electron microscope, the probe including a nanotube; a holder for holding the nanotube; and a fastening means for fastening the nanotube at a base end portion thereof to the holder; and the tip end portion of the nanotube protrudes from the holder. The method for manufacturing a nanotube probe includes the steps of setting up a nanotube and a holder inside an electron microscope; allowing a base end portion of the nanotube, with a tip end portion thereof protruding, to come into contact with the holder; and irradiating electron beam to the base end portion of the nanotube to form a carbon film at the base end portion of the nanotube, or forming a fused part at the base end portion of the nanotube, thus fastening the base end portion of the nanotube to the holder by the carbon film.

    摘要翻译: 在电子显微镜下实时观察组装的纳米管探针,探针包括纳米管; 用于保持纳米管的支架; 以及紧固装置,用于将其基端部的纳米管紧固到保持器; 并且纳米管的前端部从保持器突出。 纳米管探针的制造方法包括在电子显微镜内设置纳米管和保持器的步骤; 允许其顶端突出的纳米管的基端部与保持器接触; 并且将电子束照射到纳米管的基端部,在纳米管的基端部形成碳膜,或者在纳米管的基端部形成熔融部,将纳米管的基端部固定在 持有者由碳膜。

    Diode-type nanotweezers and nanomanipulator device using the same
    27.
    发明授权
    Diode-type nanotweezers and nanomanipulator device using the same 失效
    二极管型纳米针管和使用其的纳米机械手装置

    公开(公告)号:US06981727B2

    公开(公告)日:2006-01-03

    申请号:US10356279

    申请日:2003-01-31

    IPC分类号: B25J15/12 B25J7/00

    摘要: Diode-type nanotweezers including a first arm and a second arm that project from a holder and are opened and closed by an electrostatic force so as to hold a nanosubstance. The first arm is formed by a gate nanotube fastened at its base end to the holder, and its tip end protrudes from the holder. The second arm is formed by a nanotube diode fastened at its two base ends to the holder and have a diode characteristic portion at its tip end. Diode current and diode voltage applied between the base ends of the arms shows a non-linear diode characteristic such as varistor and rectification. When a gate voltage is applied between the gate nanotube and the nanotube diode, the arms are controlled and a grip strength for a nanosubstance held by the arms is detected by changes in the gate voltage or the diode current.

    摘要翻译: 二极管型纳米射入器包括第一臂和第二臂,其从保持器突出并且通过静电力打开和关闭以保持纳米级。 第一臂由其底端固定在保持器上的栅极纳米管形成,其顶端从支架突出。 第二臂由在其两个基端固定到保持器的纳米管二极管形成,并且在其尖端具有二极管特征部分。 在臂的基端之间施加的二极管电流和二极管电压显示出非线性二极管特性,例如变阻器和整流。 当在栅极纳米管和纳米管二极管之间施加栅极电压时,控制臂,并且通过栅极电压或二极管电流的变化来检测由臂保持的纳米级的夹持强度。

    Light receiving and emitting probe and light receiving and emitting probe apparatus
    28.
    发明授权
    Light receiving and emitting probe and light receiving and emitting probe apparatus 失效
    光接收和发射探头和光接收和发射探头设备

    公开(公告)号:US06703615B2

    公开(公告)日:2004-03-09

    申请号:US10074623

    申请日:2002-02-13

    IPC分类号: H01J4014

    摘要: A light receiving and emitting probe including a conductive nanotube probe needle with its base end fastened to a holder and its tip end protruded, a light receiving and emitting body formed on this probe needle, a lead wire fastened to the light receiving and emitting body, and a power supply that applies an electric voltage between both ends of the lead wire and the probe needle. Light is emitted and received by the light receiving and emitting body when an electric current passes through the light receiving and emitting body. A light receiving and emitting probe apparatus includes the above-described light receiving and emitting probe, a scanning mechanism that allows the light receiving and emitting probe to scan over a sample, and a control circuit that causes the light receiving and emitting body of the light receiving and emitting probe to receive and emit a light.

    摘要翻译: 一种光接收和发射探针,包括导电性纳米管探针,其基端固定在保持器上,其末端突出,形成在该探针上的受光发射体,固定于受光发射体的引线, 以及在引线的两端和探针之间施加电压的电源。 当电流通过光接收和发射体时,光被光接收和发射体发射和接收。 光接收发射探针装置包括上述的光接收和发射探针,允许光接收和发射探针扫描样本的扫描机构,以及使光的受光发射体的控制电路 接收和发射探头以接收和发射光。

    Method for manufacturing carbon nanocoils
    29.
    发明授权
    Method for manufacturing carbon nanocoils 有权
    制造碳纳米线的方法

    公开(公告)号:US06558645B2

    公开(公告)日:2003-05-06

    申请号:US09901991

    申请日:2001-07-10

    IPC分类号: D01F912

    摘要: A method for manufacturing carbon nanocoils which are grown by winding carbon atoms in a helical configuration and which have an external diameter of 1000 nm or less, the method comprising the steps of: placing an indium-tin-iron type catalyst inside a reactor, heating an area around the catalyst to a temperature equal to or greater than temperature at which hydrocarbon used as a raw material is broken down by an action of the catalyst, causing hydrocarbon gas to flow through the reactor so that the gas contacts the catalyst, and allowing carbon nanocoils to grow on a surface of the catalyst while the hydrocarbon is broken down in the vicinity of the catalyst. The indium-tin-iron type catalyst may be obtained by: a mixed catalyst of indium oxide and tin oxide, and a thin film of iron which is formed on a surface of this mixed catalyst.

    摘要翻译: 一种制造碳纳米薄膜的方法,其通过将螺旋形状的碳原子缠绕并且具有1000nm或更小的外径而生长,所述方法包括以下步骤:将铟 - 锡 - 铁型催化剂置于反应器内,加热 催化剂周围的区域达到等于或大于用作原料的烃的温度的温度,通过催化剂的作用被分解,导致烃气体流过反应器,使得气体与催化剂接触,并允许 碳纳米薄膜在催化剂表面生长,同时烃在催化剂附近分解。 铟 - 锡 - 铁型催化剂可以通过以下方法获得:氧化铟和氧化锡的混合催化剂和形成在该混合催化剂的表面上的铁的薄膜。

    Fusion-welded nanotube surface signal probe and method of attaching nanotube to probe holder
    30.
    发明授权
    Fusion-welded nanotube surface signal probe and method of attaching nanotube to probe holder 有权
    融合焊接纳米管表面信号探针和将纳米管附着到探头支架的方法

    公开(公告)号:US06528785B1

    公开(公告)日:2003-03-04

    申请号:US09601668

    申请日:2000-08-03

    IPC分类号: G21K700

    摘要: The fusion-welded nanotube surface signal probe of the present invention is constructed from a nanotube, a holder which holds the nanotube, a fusion-welded part fastening a base end portion of the nanotube to a surface of the holder by fusion-welding, a tip end portion of the nanotube being caused to protrude from the holder; and the tip end portion is used as a probe needle so as to scan surface signals. This fusion-welded nanotube surface signal probe can be used as a probe in AFM (Atomic Force Microscope), STM (Scanning Tunneling Microscope), other SPM (Scanning Probe icroscope) and so on.

    摘要翻译: 本发明的融合熔融纳米管表面信号探针由纳米管,保持纳米管的保持体,通过熔融将纳米管的基端部固定在保持体的表面的熔接部构成, 导致纳米管的前端部从保持器突出; 并且使用尖端部作为探针,以扫描表面信号。 该熔焊纳米管表面信号探头可用作AFM(原子力显微镜),STM(扫描隧道显微镜),其他SPM(扫描探针显微镜)等中的探针。