公开(公告)号：US10081033B2

公开(公告)日：2018-09-25

申请号：US14591107

申请日：2015-01-07

Applicant: Tokyo Electron Limited

Inventor： Satoshi Kaneko ,  Kazuki Motomatsu

IPC: B05C11/10 ,  H01L21/67

CPC classification number: B05C11/1042 ,  H01L21/67017

Abstract: A heat exchange system 62 includes heat exchangers 69a and 69b that heat or cool a fluid passing therethrough; a fluid supply unit 81 that supplies the heating target fluid or the cooling target fluid into lower portions thereof; and a fluid discharge unit 82 that discharges the heated fluid or the cooled fluid from upper portions thereof. The fluid supply unit includes inlet lines 85 and 86 through which the fluid is introduced; a first manifold 87 located above the upper end portion of the heat exchangers and connected with the inlet lines; a gas exhaust line 88 that is connected to the first manifold and exhausts a gas mixed in the fluid; a supply line 89 that supplies the fluid from the first manifold. While passing through the heat exchangers from the lower portions toward the upper portions thereof, the fluid is heated or cooled.

公开(公告)号：US20150190838A1

公开(公告)日：2015-07-09

申请号：US14591107

申请日：2015-01-07

Applicant: Tokyo Electron Limited

Inventor： Satoshi Kaneko ,  Kazuki Motomatsu

IPC: B05C11/10

CPC classification number: B05C11/1042 ,  H01L21/67017

Abstract: A heat exchange system 62 includes heat exchangers 69a and 69b that heat or cool a fluid passing therethrough; a fluid supply unit 81 that supplies the heating target fluid or the cooling target fluid into lower portions thereof; and a fluid discharge unit 82 that discharges the heated fluid or the cooled fluid from upper portions thereof. The fluid supply unit includes inlet lines 85 and 86 through which the fluid is introduced; a first manifold 87 located above the upper end portion of the heat exchangers and connected with the inlet lines; a gas exhaust line 88 that is connected to the first manifold and exhausts a gas mixed in the fluid; a supply line 89 that supplies the fluid from the first manifold. While passing through the heat exchangers from the lower portions toward the upper portions thereof, the fluid is heated or cooled.

Abstract translation: 热交换系统62包括加热或冷却通过其中的流体的热交换器69a和69b; 将加热对象流体或冷却对象流体供给到其下部的流体供给单元81; 以及从其上部排出被加热流体或冷却流体的流体排出单元82。 流体供应单元包括引入流体的入口管线85和86; 第一歧管87，其位于热交换器的上端部分的上方并与入口管线相连; 排气管线88，其连接到第一歧管并排出混入流体中的气体; 从第一歧管供应流体的供应管线89。 在从下部向上部通过热交换器的同时，流体被加热或冷却。