公开(公告)号：US20200234925A1

公开(公告)日：2020-07-23

申请号：US16743788

申请日：2020-01-15

申请人： Tokyo Electron Limited

发明人： Yusuke AOKI ,  Shinya MORIKITA ,  Toshikatsu TOBANA ,  Fumiya TAKATA

IPC分类号： H01J37/32

摘要： A plasma processing apparatus according to an exemplary embodiment includes a chamber, a substrate support, an upper electrode, a radio frequency power source, and a direct-current power source device. The substrate support includes a lower electrode. The lower electrode is provided in the chamber. The upper electrode is provided above the substrate support. The radio frequency power source generates a plasma in the chamber. The direct-current power source device is electrically connected to the upper electrode. The direct-current power source device is configured to periodically generate a pulsed negative direct-current voltage. An output voltage of the direct-current power source device is alternately switched between a negative direct-current voltage and zero volts.