公开(公告)号：US08876173B2

公开(公告)日：2014-11-04

申请号：US13041786

申请日：2011-03-07

申请人： Hiroshi Igarashi ,  Toshihiko Miyajima ,  Tsutomu Okabe

发明人： Hiroshi Igarashi ,  Toshihiko Miyajima ,  Tsutomu Okabe

IPC分类号： E05C1/06 ,  E05F11/02 ,  B65D85/00

CPC分类号： E05F11/02 ,  Y10S292/11 ,  Y10S292/25 ,  Y10T292/0803 ,  Y10T292/0805 ,  Y10T292/0808 ,  Y10T292/0811 ,  Y10T292/0824 ,  Y10T292/0845 ,  Y10T292/0859 ,  Y10T292/0886 ,  Y10T292/1021 ,  Y10T292/1038

摘要： The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external space; the insertion slot is formed in a flange portion arranged around the periphery of an opening in the pod and into which the lid can be fitted, and a latch mechanism supported so as to be slidable in a direction parallel to a flange side wall in a pod main body-surface of the flange portion. An engaging portion of the latch mechanism reaches the engagement portion via the insertion slot. The engagement portion is switched between an engaged state and a non-engaged state in response to movement of the latch mechanism.

摘要翻译： 所述基板收容容器在所述容器的盖的外侧面上具有接合部，所述插入槽能够从外部空间接合所述卡合部; 插入槽形成在布置在容器中的开口的周边周围的凸缘部分中，并且盖可以被装配到该凸缘部分中;以及闩锁机构，该闩锁机构被支撑以能够在平行于壳体中的凸缘侧壁的方向上滑动 凸缘部分的主体表面。 闩锁机构的接合部分经由插入槽到达接合部分。 响应于闩锁机构的移动，接合部分在接合状态和非接合状态之间切换。

公开(公告)号：US08657346B2

公开(公告)日：2014-02-25

申请号：US12624579

申请日：2009-11-24

申请人： Tsutomu Okabe ,  Toshihiko Miyajima ,  Hiroshi Igarashi

发明人： Tsutomu Okabe ,  Toshihiko Miyajima ,  Hiroshi Igarashi

IPC分类号： E05C1/06 ,  B65D85/00

CPC分类号： H01L21/67772 ,  Y10T292/0808 ,  Y10T292/0824 ,  Y10T292/0845 ,  Y10T292/1021 ,  Y10T292/1038

摘要： The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that engages the engaged portion as it moves along a predetermined axis to fix the lid to the pod. The FIMS system has a latch mechanism drive means for driving the latch mechanism along a certain axis and an engagement portion position sensor that can generate a signal indicating whether the engagement portion is at an engagement position or non-engagement position when the latch mechanism drive means drives the latch mechanism. The latch mechanism drive means and the engagement portion position sensor are provided in the vicinity of a first opening portion of the FIMS system.

摘要翻译： FIMS系统用于由盖子组成的盒盖，盖子具有设置在其外表面上的接合部分，以及盒体，其具有闩锁机构，该闩锁机构包括接合部分，该接合部分沿着预定轴线移动时与接合部分接合以固定 盖到荚。 FIMS系统具有用于沿着某个轴线驱动闩锁机构的闩锁机构驱动装置和接合部位置传感器，当闩锁机构驱动装置可以产生指示接合部分是否处于接合位置或非接合位置的信号 驱动闩锁机构。 闩锁机构驱动装置和接合部位置传感器设置在FIMS系统的第一开口部分附近。

公开(公告)号：US20110215028A1

公开(公告)日：2011-09-08

申请号：US13041786

申请日：2011-03-07

申请人： Hiroshi Igarashi ,  Toshihiko Miyajima ,  Tsutomu Okabe

发明人： Hiroshi Igarashi ,  Toshihiko Miyajima ,  Tsutomu Okabe

IPC分类号： B65D85/86 ,  E05F11/02

CPC分类号： E05F11/02 ,  Y10S292/11 ,  Y10S292/25 ,  Y10T292/0803 ,  Y10T292/0805 ,  Y10T292/0808 ,  Y10T292/0811 ,  Y10T292/0824 ,  Y10T292/0845 ,  Y10T292/0859 ,  Y10T292/0886 ,  Y10T292/1021 ,  Y10T292/1038

摘要： The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external space; the insertion slot is formed in a flange portion arranged around the periphery of an opening in the pod and into which the lid can be fitted, and a latch mechanism supported so as to be slidable in a direction parallel to a flange side wall in a pod main body-surface of the flange portion. An engaging portion of the latch mechanism reaches the engagement portion via the insertion slot. The engagement portion is switched between an engaged state and a non-engaged state in response to movement of the latch mechanism.

摘要翻译： 所述基板收容容器在所述容器的盖的外侧面上具有接合部，所述插入槽能够从外部空间接合所述卡合部; 插入槽形成在布置在容器中的开口的周边周围的凸缘部分中，并且盖可以被装配到该凸缘部分中;以及闩锁机构，该闩锁机构被支撑以能够在平行于壳体中的凸缘侧壁的方向上滑动 凸缘部分的主体表面。 闩锁机构的接合部分经由插入槽到达接合部分。 响应于闩锁机构的移动，接合部分在接合状态和非接合状态之间切换。

公开(公告)号：US20110210041A1

公开(公告)日：2011-09-01

申请号：US13035335

申请日：2011-02-25

申请人： Tsutomu OKABE ,  Toshihiko Miyajima

发明人： Tsutomu OKABE ,  Toshihiko Miyajima

IPC分类号： B65D85/00

CPC分类号： H01L21/67393

摘要： The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for exhausting a replacement gas in the hollow inner space of the pod case; and an exhaust space which is defined in the hollow inner space so as to communicate to the exhaust port. The exhaust space is defined in the hollow inner space by a multi-hole partition member including multiple holes and by an inner surface of the pod case. In the substrate storage pod, back pressure on an exhaust side can be lowered, and hence dust in the pod can be collected to the exhaust side.

摘要翻译： 基材储存容器包括一个荚壳，它包括用于储存基材的中空内部空间和开口; 能够密封开口的盖构件; 用于排出所述荚壳的中空内部空间中的置换气体的排气口; 以及限定在中空内部空间中以与排气口连通的排气空间。 排气空间通过包括多个孔的多孔分隔构件和荚壳的内表面限定在中空内空间中。 在基材储存容器中，可以降低排气侧的背压，从而可以将荚内的灰尘收集到排气侧。

公开(公告)号：US20100059408A1

公开(公告)日：2010-03-11

申请号：US12491574

申请日：2009-06-25

申请人： Hiroshi IGARASHI ,  Toshihiko Miyajima ,  Tsutomu Okabe

发明人： Hiroshi IGARASHI ,  Toshihiko Miyajima ,  Tsutomu Okabe

IPC分类号： H01L21/673

CPC分类号： H01L21/67772 ,  Y10T292/0808 ,  Y10T292/0824 ,  Y10T292/0845 ,  Y10T292/1021 ,  Y10T292/1038

摘要： In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism.

摘要翻译： 在用于FIMS系统的荚中，减少了附着在荚的盖上的灰尘颗粒等的扩散到系统的内部。 一个啮合部分设置在荚的盖子的外表面内部，并且设置在可以装配盖子的荚壳开口周围的凸缘部分设置有允许从外部空间进入被接合部分的插入孔。 闩锁机构被支撑在凸缘部分的荚体主体侧表面上，使得闩锁机构可以沿着平行于凸缘的侧壁的方向滑动。 闩锁机构的接合部分通过插入孔到达接合部分，并且闩锁机构的状态随着闩锁机构的移动而在接合状态和脱离状态之间变化。

公开(公告)号：US07360985B2

公开(公告)日：2008-04-22

申请号：US10330098

申请日：2002-12-30

申请人： Tsutomu Okabe ,  Hiroshi Igarashi ,  Toshihiko Miyajima

发明人： Tsutomu Okabe ,  Hiroshi Igarashi ,  Toshihiko Miyajima

IPC分类号： B65G1/00 ,  E04H6/00 ,  H01L21/677 ,  A01H5/08

CPC分类号： H01L21/67772

摘要： The semiconductor wafer processing apparatus includes a clean box having an opening, a lid for closing the opening, a door to be in contact with the lid and to detach the lid from the clean box, a first stopper adapted to move in conjunction with movement of the clean box without a change in its relative positional relationship with the clean box, and an unmoved second stopper. With this structure, it is possible to prevent the clean box moved on the semiconductor wafer processing apparatus from colliding with the apparatus, even if the clean box manufactured by molding using a reinforced plastic in accordance with a prescribed standard includes a manufacturing error in its size.

摘要翻译： 半导体晶片处理装置包括具有开口的清洁盒，用于封闭开口的盖，与盖接触并将盖与清洁盒分离的门，第一挡块，其适于随着 干净的盒子与其相对的位置关系不会改变，并且有一个不动的第二个止动器。 利用这种结构，即使根据规定的标准通过使用强化塑料的成型而制造的清洁盒包括其尺寸的制造误差，也可以防止在半导体晶片处理装置上移动的清洁盒与装置碰撞 。

公开(公告)号：US07748942B2

公开(公告)日：2010-07-06

申请号：US11736357

申请日：2007-04-17

申请人： Hitoshi Suzuki ,  Toshihiko Miyajima

发明人： Hitoshi Suzuki ,  Toshihiko Miyajima

IPC分类号： B65G49/07

CPC分类号： H01L21/6719 ,  Y10S414/139

摘要： In a load port apparatus, a slit is formed between an inner circumferential surface of an opening on a wall of the chamber of the apparatus and an outer circumferential surface of a door. In a predetermined section of the slit, the slit width at the chamber side opening of the slit is made larger than the slit width at other positions with respect to the depth direction of the slit. By this feature, gas flow from the interior of the load port apparatus to the exterior through a clearance formed between the inner surface of the opening that allows to bring wafers out of/into a pod and the door that substantially closes the opening can be made stable.

摘要翻译： 在装载口装置中，在装置的室壁的开口的内周面与门的外周面之间形成狭缝。 在狭缝的预定部分中，狭缝的室侧开口处的狭缝宽度比在狭缝的深度方向的其它位置处的狭缝宽度大。 通过这个特征，可以使气流从负载端口装置的内部通过形成在允许将晶片排出/进入荚的开口的内表面之间的间隙和基本上封闭开口的门形成的外部 稳定。

公开(公告)号：US20050069420A1

公开(公告)日：2005-03-31

申请号：US10948223

申请日：2004-09-24

申请人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

发明人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

IPC分类号： H01L21/677 ,  H01L21/00 ,  H01L21/673 ,  F04B1/00

CPC分类号： H01L21/67389 ,  H01L21/67017 ,  H01L21/67393

摘要： A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparatus is disposed in a gas supplying system in a purging system, and pressure in the portable type hermetically sealed container during purge is measured and the result thereof is fed back to thereby control the flow rate of a supplied gas.

摘要翻译： 当便携式密封容器被清除时发生的短时间间隔的精细压力波动被减小，从而防止由于压力波动导致的密封构件的劣化等。 为了达到这个目的，在清洗系统中的气体供给系统中设置有气体流量调节装置，在吹扫时测定便携式气密容器内的压力，并且对其结果进行反馈，从而控制流动 供应气体的速率。

公开(公告)号：US07360346B2

公开(公告)日：2008-04-22

申请号：US10948223

申请日：2004-09-24

申请人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

发明人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

IPC分类号： B65B31/02 ,  B65B31/04

CPC分类号： H01L21/67389 ,  H01L21/67017 ,  H01L21/67393

摘要： A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparatus is disposed in a gas supplying system in a purging system, and pressure in the portable type hermetically sealed container during purge is measured and the result thereof is fed back to thereby control the flow rate of a supplied gas.

摘要翻译： 当便携式密封容器被清除时发生的短时间间隔的精细压力波动被减小，从而防止由于压力波动导致的密封构件的劣化等。 为了达到这个目的，在清洗系统中的气体供给系统中设置有气体流量调节装置，在吹扫时测定便携式气密容器内的压力，并且对其结果进行反馈，从而控制流动 供应气体的速率。

公开(公告)号：US20080019807A1

公开(公告)日：2008-01-24

申请号：US11736357

申请日：2007-04-17

申请人： Hitoshi SUZUKI ,  Toshihiko Miyajima

发明人： Hitoshi SUZUKI ,  Toshihiko Miyajima

IPC分类号： H01L21/677

CPC分类号： H01L21/6719 ,  Y10S414/139

摘要： In a load port apparatus, a slit is formed between an inner circumferential surface of an opening on a wall of the chamber of the apparatus and an outer circumferential surface of a door. In a predetermined section of the slit, the slit width at the chamber side opening of the slit is made larger than the slit width at other positions with respect to the depth direction of the slit. By this feature, gas flow from the interior of the load port apparatus to the exterior through a clearance formed between the inner surface of the opening that allows to bring wafers out of/into a pod and the door that substantially closes the opening can be made stable.

摘要翻译： 在装载口装置中，在装置的室壁的开口的内周面与门的外周面之间形成狭缝。 在狭缝的预定部分中，狭缝的室侧开口处的狭缝宽度比在狭缝的深度方向的其它位置处的狭缝宽度大。 通过这个特征，可以使气流从负载端口装置的内部通过形成在允许将晶片排出/进入荚的开口的内表面之间的间隙和基本上封闭开口的门形成的外部 稳定。