公开(公告)号：US07748942B2

公开(公告)日：2010-07-06

申请号：US11736357

申请日：2007-04-17

申请人： Hitoshi Suzuki ,  Toshihiko Miyajima

发明人： Hitoshi Suzuki ,  Toshihiko Miyajima

IPC分类号： B65G49/07

CPC分类号： H01L21/6719 ,  Y10S414/139

摘要： In a load port apparatus, a slit is formed between an inner circumferential surface of an opening on a wall of the chamber of the apparatus and an outer circumferential surface of a door. In a predetermined section of the slit, the slit width at the chamber side opening of the slit is made larger than the slit width at other positions with respect to the depth direction of the slit. By this feature, gas flow from the interior of the load port apparatus to the exterior through a clearance formed between the inner surface of the opening that allows to bring wafers out of/into a pod and the door that substantially closes the opening can be made stable.

摘要翻译： 在装载口装置中，在装置的室壁的开口的内周面与门的外周面之间形成狭缝。 在狭缝的预定部分中，狭缝的室侧开口处的狭缝宽度比在狭缝的深度方向的其它位置处的狭缝宽度大。 通过这个特征，可以使气流从负载端口装置的内部通过形成在允许将晶片排出/进入荚的开口的内表面之间的间隙和基本上封闭开口的门形成的外部 稳定。

公开(公告)号：US20050069420A1

公开(公告)日：2005-03-31

申请号：US10948223

申请日：2004-09-24

申请人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

发明人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

IPC分类号： H01L21/677 ,  H01L21/00 ,  H01L21/673 ,  F04B1/00

CPC分类号： H01L21/67389 ,  H01L21/67017 ,  H01L21/67393

摘要： A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparatus is disposed in a gas supplying system in a purging system, and pressure in the portable type hermetically sealed container during purge is measured and the result thereof is fed back to thereby control the flow rate of a supplied gas.

摘要翻译： 当便携式密封容器被清除时发生的短时间间隔的精细压力波动被减小，从而防止由于压力波动导致的密封构件的劣化等。 为了达到这个目的，在清洗系统中的气体供给系统中设置有气体流量调节装置，在吹扫时测定便携式气密容器内的压力，并且对其结果进行反馈，从而控制流动 供应气体的速率。

公开(公告)号：US08061738B2

公开(公告)日：2011-11-22

申请号：US12466952

申请日：2009-05-15

申请人： Tsutomu Okabe ,  Toshihiko Miyajima ,  Hitoshi Suzuki

发明人： Tsutomu Okabe ,  Toshihiko Miyajima ,  Hitoshi Suzuki

IPC分类号： F16L17/00

CPC分类号： F16J15/46 ,  F16J15/002 ,  F16J15/025

摘要： A seal member has a configuration including a ring-shaped main body portion, an inner peripheral lip portion protruding from a ring inner peripheral portion of the main body portion and an outer peripheral lip portion protruding from a ring outer peripheral portion of the main body portion. The inner peripheral lip portion takes an O-ring shape deformable in a protruding direction. The outer peripheral lip portion takes a structure deformable in a direction different from an extending direction, corresponding to a pressure in a sealed area. The member preferably seals when in communication with a plurality of spaces separated from an external space, the plurality of spaces from an external environment.

摘要翻译： 密封构件具有环状主体部，从主体部的环内周部突出的内周唇部和从主体部的环外周部突出的外周唇部 。 内周缘部呈O形环状，能够沿突出方向变形。 外周唇部具有与沿着密封区域的压力对应的延伸方向不同的方向变形的构造。 当与从外部空间分离的多个空间与所述多个空间与外部环境隔离时，所述构件优选地密封。

公开(公告)号：US07360346B2

公开(公告)日：2008-04-22

申请号：US10948223

申请日：2004-09-24

申请人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

发明人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

IPC分类号： B65B31/02 ,  B65B31/04

CPC分类号： H01L21/67389 ,  H01L21/67017 ,  H01L21/67393

摘要： A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparatus is disposed in a gas supplying system in a purging system, and pressure in the portable type hermetically sealed container during purge is measured and the result thereof is fed back to thereby control the flow rate of a supplied gas.

摘要翻译： 当便携式密封容器被清除时发生的短时间间隔的精细压力波动被减小，从而防止由于压力波动导致的密封构件的劣化等。 为了达到这个目的，在清洗系统中的气体供给系统中设置有气体流量调节装置，在吹扫时测定便携式气密容器内的压力，并且对其结果进行反馈，从而控制流动 供应气体的速率。

公开(公告)号：US20080019807A1

公开(公告)日：2008-01-24

申请号：US11736357

申请日：2007-04-17

申请人： Hitoshi SUZUKI ,  Toshihiko Miyajima

发明人： Hitoshi SUZUKI ,  Toshihiko Miyajima

IPC分类号： H01L21/677

CPC分类号： H01L21/6719 ,  Y10S414/139

摘要： In a load port apparatus, a slit is formed between an inner circumferential surface of an opening on a wall of the chamber of the apparatus and an outer circumferential surface of a door. In a predetermined section of the slit, the slit width at the chamber side opening of the slit is made larger than the slit width at other positions with respect to the depth direction of the slit. By this feature, gas flow from the interior of the load port apparatus to the exterior through a clearance formed between the inner surface of the opening that allows to bring wafers out of/into a pod and the door that substantially closes the opening can be made stable.

摘要翻译： 在装载口装置中，在装置的室壁的开口的内周面与门的外周面之间形成狭缝。 在狭缝的预定部分中，狭缝的室侧开口处的狭缝宽度比在狭缝的深度方向的其它位置处的狭缝宽度大。 通过这个特征，可以使气流从负载端口装置的内部通过形成在允许将晶片排出/进入荚的开口的内表面之间的间隙和基本上封闭开口的门形成的外部 稳定。

公开(公告)号：US20100254786A1

公开(公告)日：2010-10-07

申请号：US12815727

申请日：2010-06-15

申请人： Hitoshi SUZUKI ,  Toshihiko Miyajima

发明人： Hitoshi SUZUKI ,  Toshihiko Miyajima

IPC分类号： H01L21/677

CPC分类号： H01L21/6719 ,  Y10S414/139

摘要： In a load port apparatus, a clearance is formed between an inner circumferential surface of an opening of the chamber and an outer circumferential surface of a door. The area of the clearance between the plate and the opening portion on a plane flush with an interior side of the chamber is larger than the area of the clearance between the plate and the opening portion on a plane flush with the exterior of the chamber. A fan located at an upper side of the chamber generates a first flow of air in the downward direction. The clearance generates a second flow of air from the interior of the chamber to the exterior of the chamber. The second flow of air is generated by the difference in the area of the interior cross section of the clearance and area of the exterior cross section of the clearance.

摘要翻译： 在负载端口装置中，在室的开口的内周面与门的外周面之间形成间隙。 在与室的内侧齐平的平面上的板与开口部之间的间隙的面积大于与室的外部齐平的平面上的板与开口部之间的间隙的面积。 位于室的上侧的风扇沿向下的方向产生第一空气流。 间隙产生从室的内部到室的外部的第二空气流。 空气的第二流动是通过间隙的内部横截面和间隙的外部横截面的面积的差异而产生的。

公开(公告)号：US07523769B2

公开(公告)日：2009-04-28

申请号：US11257307

申请日：2005-10-25

申请人： Toshihiko Miyajima ,  Hitoshi Suzuki ,  Hiroshi Igarashi

发明人： Toshihiko Miyajima ,  Hitoshi Suzuki ,  Hiroshi Igarashi

IPC分类号： B65B31/04 ,  B65D85/86 ,  B65G1/133 ,  H01L21/673

CPC分类号： H01L21/67017 ,  H01L21/67772

摘要： In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to the upper surfaces of the wafers stored in the inner portion of the pod through the gas supply pipe to remove the contaminants or the like from wafers.

摘要翻译： 为了容易且可靠地从存储在容器（FOUP）中的晶片中除去污染物等，气体供给管位于FIMS系统中的开口部分的上方。 通过气体供给管将清洁气体吹送到容纳在容器内部的晶片的上表面，以从晶片去除污染物等。

公开(公告)号：US20070210533A1

公开(公告)日：2007-09-13

申请号：US11675901

申请日：2007-02-16

申请人： Tsutomu Okabe ,  Toshihiko Miyajima ,  Hitoshi Suzuki

发明人： Tsutomu Okabe ,  Toshihiko Miyajima ,  Hitoshi Suzuki

IPC分类号： F16J15/00

CPC分类号： F16J15/46 ,  F16J15/002 ,  F16J15/025

摘要： A seal member has a configuration including a ring-shaped main body portion, an inner peripheral lip portion protruding from a ring inner peripheral portion of the main body portion and an outer peripheral lip portion protruding from a ring outer peripheral portion of the main body portion. The inner peripheral lip portion takes an O-ring shape deformable in a protruding direction. The outer peripheral lip portion takes a structure deformable in a direction different from an extending direction, corresponding to a pressure in a sealed area. The member preferably sealing, when communicating a plurality of spaces separated from an external space, these spaces from an external environment, is thereby provided.

摘要翻译： 密封构件具有环状主体部，从主体部的环内周部突出的内周唇部和从主体部的环外周部突出的外周唇部 。 内周缘部呈O形环状，能够沿突出方向变形。 外周唇部具有与沿着密封区域的压力对应的延伸方向不同的方向变形的构造。 优选地，当将与外部空间分离的多个空间连通时，该构件优选地密封，从而提供这些空间与外部环境。

公开(公告)号：US20060088406A1

公开(公告)日：2006-04-27

申请号：US11257307

申请日：2005-10-25

申请人： Toshihiko Miyajima ,  Hitoshi Suzuki ,  Hiroshi Igarashi

发明人： Toshihiko Miyajima ,  Hitoshi Suzuki ,  Hiroshi Igarashi

IPC分类号： B65H1/00 ,  B65B69/00 ,  B65G1/00 ,  H01L21/677

CPC分类号： H01L21/67017 ,  H01L21/67772

摘要： In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to the upper surfaces of the wafers stored in the inner portion of the pod through the gas supply pipe to remove the contaminants or the like from wafers.

公开(公告)号：US08029227B2

公开(公告)日：2011-10-04

申请号：US12815727

申请日：2010-06-15

申请人： Hitoshi Suzuki ,  Toshihiko Miyajima

发明人： Hitoshi Suzuki ,  Toshihiko Miyajima

IPC分类号： B65G49/07

CPC分类号： H01L21/6719 ,  Y10S414/139

摘要： In a load port apparatus, a clearance is formed between an inner circumferential surface of an opening of the chamber and an outer circumferential surface of a door. The area of the clearance between the plate and the opening portion on a plane flush with an interior side of the chamber is larger than the area of the clearance between the plate and the opening portion on a plane flush with the exterior of the chamber. A fan located at an upper side of the chamber generates a first flow of air in the downward direction. The clearance generates a second flow of air from the interior of the chamber to the exterior of the chamber. The second flow of air is generated by the difference in the area of the interior cross section of the clearance and area of the exterior cross section of the clearance.

摘要翻译： 在负载端口装置中，在室的开口的内周面与门的外周面之间形成间隙。 在与室的内侧齐平的平面上的板与开口部之间的间隙的面积大于与室的外部齐平的平面上的板与开口部之间的间隙的面积。 位于室的上侧的风扇沿向下的方向产生第一空气流。 间隙产生从室的内部到室的外部的第二空气流。 空气的第二流动是通过间隙的内部横截面和间隙的外部横截面的面积的差异而产生的。