公开(公告)号：US20050117235A1

公开(公告)日：2005-06-02

申请号：US11000004

申请日：2004-12-01

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho

IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B26/10 ,  G02B7/182

CPC分类号： G02B26/0833 ,  G02B26/105

摘要： A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

摘要翻译： 微镜结构在高速驱动的同时具有增大的驱动角度。 微反射镜包括反射光的可旋转镜部分，用于支撑镜部分的一对弹簧部分，并且当镜部被旋转地驱动时用作镜部分的旋转轴线，用于连接镜部分的椭圆形邻接部分和 一对弹簧部分，以及包括设置在相邻部分上的移动梳状物的驱动部分。 在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。 根据本发明，通过存在椭圆形邻接部分，可以在不大幅度增加旋转惯性力矩的情况下增加力矩。 因此，可以提供具有增加的驱动角度的高速光学扫描仪，这是高分辨率激光电视所需要的。

公开(公告)号：US20080168670A1

公开(公告)日：2008-07-17

申请号：US11858183

申请日：2007-09-20

申请人： Young-chul Ko ,  Jin-woo Cho ,  U-hyuk Choi ,  Seong-ho Shin

发明人： Young-chul Ko ,  Jin-woo Cho ,  U-hyuk Choi ,  Seong-ho Shin

IPC分类号： G01B7/30

CPC分类号： G01D5/18 ,  G02B6/359 ,  G02B26/0841

摘要： A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a group direction.

摘要翻译： 提供了具有压电阻传感器的旋转微机电系统（MEMS）。 旋转MEMS装置包括一对扭转弹簧，其支撑一级，四个电阻器，至少一个电阻器沿扭转弹簧的中心轴线形成，以及连接到四个电阻器的电信号电缆，其中至少一个 在具有（100）面的n型硅衬底上沿<100>方向形成扭转弹簧，并且形成在至少一个扭转弹簧上的电阻器形成为<110>组方向。

公开(公告)号：US20060284514A1

公开(公告)日：2006-12-21

申请号：US11341460

申请日：2006-01-30

申请人： Young-chul Ko ,  Jin-woo Cho

发明人： Young-chul Ko ,  Jin-woo Cho

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： H02N1/008 ,  G02B26/0841

摘要： An actuator having a vertical comb electrode structure is provided. The actuator includes: a stage seesawing in a first direction; a support unit supporting the seesawing motion of the stage; and a stage driving unit including vertical driving comb electrodes extending outward from opposite sides of the stage in the first direction, and vertical fixed comb electrodes disposed on a substrate to alternate with the driving comb electrodes, wherein the fixed comb electrodes include first fixed comb electrodes lower than the driving comb electrodes, insulation layers formed on the first fixed comb electrodes, and second fixed comb electrodes formed on the insulation layers to be higher than bottom surfaces of the driving comb electrodes.

摘要翻译： 提供具有垂直梳状电极结构的致动器。 致动器包括：在第一方向上跷跷板的台阶; 支撑台架的跷跷板运动; 以及舞台驱动单元，其包括从第一方向的相对侧向外延伸的垂直驱动梳状电极，以及设置在基板上以与驱动梳状电极交替的垂直固定梳状电极，其中固定梳状电极包括第一固定梳状电极 低于驱动梳状电极，形成在第一固定梳状电极上的绝缘层，以及形成在绝缘层上的第二固定梳电极高于驱动梳状电极的底表面。

公开(公告)号：US20060268383A1

公开(公告)日：2006-11-30

申请号：US11387958

申请日：2006-03-24

申请人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

发明人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： G02B26/0841 ,  H02N1/008

摘要： Optical scanners having a multi-layered comb electrode structure and methods to increase driving force and angle are provided. The optical scanner includes: a stage which performs a seesaw motion in a first direction; a support unit which supports the seesaw motion of the stage; and a stage driving unit including driving comb electrodes extending outward from opposite sides of the stage in the first direction and fixed comb electrodes extending from the support unit facing the driving comb electrodes such that the driving comb electrodes and the fixed comb electrodes alternate with each other. Each of the stage, the support unit, and the stage driving unit is made of a plurality of conductive layers and insulation layers between the conductive layers.

摘要翻译： 提供具有多层梳状电极结构的光学扫描器和增加驱动力和角度的方法。 光学扫描器包括：在第一方向上执行跷跷板运动的平台; 支撑台架的跷跷板运动的支撑单元; 以及舞台驱动单元，其包括从第一方向的舞台的相对侧向外延伸的驱动梳状电极和从支撑单元向着驱动梳状电极延伸的固定梳状电极，使得驱动梳状电极和固定梳状电极彼此交替 。 舞台，支撑单元和舞台驱动单元中的每一个由导电层之间的多个导电层和绝缘层制成。

公开(公告)号：US07508111B2

公开(公告)日：2009-03-24

申请号：US11248169

申请日：2005-10-13

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： H02N1/00 ,  G02B26/08

CPC分类号： H02N1/008 ,  G02B26/0841

摘要： Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.

摘要翻译： 提供双轴致动器及其制造方法。 双轴致动器包括：在第一方向上跷跷板的平台单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元，包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极，使得第一驱动和固定梳状电极 互相交替; 第二支撑单元，其支撑所述第一支撑单元，使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元，包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极，其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处，使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。

公开(公告)号：US20070258120A1

公开(公告)日：2007-11-08

申请号：US11707956

申请日：2007-02-20

申请人： Young-chul Ko ,  Jin-woo Cho ,  Yong-hwa Park

发明人： Young-chul Ko ,  Jin-woo Cho ,  Yong-hwa Park

IPC分类号： B81B7/02

CPC分类号： G02B26/105 ,  G02B26/0833

摘要： A micro-electro mechanical system (MEMS) scanner. The MEMS scanner includes a first frame rotationally vibrated about an axle according to a low-frequency vertical scan function, a second frame supported coaxially with and rotationally on the first frame, a vibration member disposed between the first frame and the second frame so as to vibrate the second frame with respect to the first frame according to a high-frequency vertical scan function. A MEMS mirror which receives a vertical scan motion of the second frame and simultaneously operates in a rotational vibration mode about an axle according to a high-frequency horizontal scan function so as to two-dimensionally scan a screen with incident light. Therefore, scan lines are uniformly produced in a scanning direction and, thus, pixels can be uniformed arranged across a screen, increasing the vertical resolution of the screen and providing high-quality images.

摘要翻译： 微机电系统（MEMS）扫描仪。 MEMS扫描器包括：根据低频垂直扫描功能围绕轴旋转振动的第一框架，与第一框架同轴并且旋转地支撑在其上的第二框架;设置在第一框架和第二框架之间的振动构件，以便 根据高频垂直扫描功能，相对于第一帧振动第二帧。 MEMS反射镜，其接收第二帧的垂直扫描运动，并且根据高频水平扫描功能以围绕轴的旋转振动模式同时操作，以便二维扫描具有入射光的屏幕。 因此，扫描线在扫描方向上均匀地产生，因此像素可以被均匀地布置在屏幕上，增加屏幕的垂直分辨率并提供高质量的图像。

公开(公告)号：US07257286B2

公开(公告)日：2007-08-14

申请号：US11136392

申请日：2005-05-25

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： G02B6/35 ,  G02B26/10

CPC分类号： G02B6/357 ,  G02B6/3518 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841

摘要： A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.

摘要翻译： 提供了一种具有用于增加由MEMS（微机电系统）结构提供的微反射镜的驱动角度的间隔的双梳电极结构和采用其的微机。 双梳电极结构包括：用于反射光的反射镜单元; 在所述反射镜单元的两侧突出的多个可动梳状电极; 以及形成在可动梳状电极上方和下方的多个上部和下部静态梳状电极，以便与形成在反射镜单元两侧的多个可动梳状电极交替，其中上部静态梳状电极和 活动梳状电极与下部静态梳状电极和可动梳状电极之间的间隔不同。

公开(公告)号：US07185994B2

公开(公告)日：2007-03-06

申请号：US11000004

申请日：2004-12-01

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho

IPC分类号： G02B7/182

CPC分类号： G02B26/0833 ,  G02B26/105

摘要： A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

摘要翻译： 微镜结构在高速驱动的同时具有增大的驱动角度。 微反射镜包括反射光的可旋转镜部分，用于支撑镜部分的一对弹簧部分，并且当镜部被旋转地驱动时用作镜部分的旋转轴线，用于连接镜部分的椭圆形邻接部分和 一对弹簧部分，以及包括设置在相邻部分上的移动梳状物的驱动部分。 在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。 根据本发明，通过存在椭圆形邻接部分，可以在不大幅度增加旋转惯性力矩的情况下增加力矩。 因此，可以提供具有增加的驱动角度的高速光学扫描仪，这是高分辨率激光电视所需要的。

公开(公告)号：US20060154704A1

公开(公告)日：2006-07-13

申请号：US11256168

申请日：2005-10-24

申请人： Dong-woo Lee ,  Young-ki Kim ,  Ki-taek Kim ,  Dong-ok Kwak ,  Seong-woon Booh ,  Jin-woo Cho

发明人： Dong-woo Lee ,  Young-ki Kim ,  Ki-taek Kim ,  Dong-ok Kwak ,  Seong-woon Booh ,  Jin-woo Cho

IPC分类号： H04B1/38 ,  H04M1/00

CPC分类号： H04M1/0237 ,  H04M1/0233

摘要： A slide opening/closing type mobile device includes a body section including a guide section that has a pair of long holes and is configured so that an interval between the pair of long holes becomes smaller at first, as it goes from one ends towards the other ends of the long holes, and then, becomes larger based on certain starting points; a slider provided with guide rollers movably inserted in the pair of long holes of the guide section in a state of being elastically biased to the outside; a rotation plate rotatably mounted on the slider; and a display section mounted on the rotation plate. The display section is slidable upward and downward with respect to the body section by the slider, and rotates at a predetermined angle by the rotation plate.

公开(公告)号：US20050128173A1

公开(公告)日：2005-06-16

申请号：US11011031

申请日：2004-12-15

申请人： Seong-woon Booh ,  Su-ho Shin ,  Su-gun Kim ,  Jin-woo Cho ,  Jong-min Wang

发明人： Seong-woon Booh ,  Su-ho Shin ,  Su-gun Kim ,  Jin-woo Cho ,  Jong-min Wang

IPC分类号： G02F1/1339 ,  G02F1/133 ,  G02F1/1333 ,  G02F1/1362 ,  H01L41/08 ,  G09G3/36

CPC分类号： G02F1/1333 ,  G02F1/133305 ,  G02F1/136277 ,  G02F2001/133368 ,  G02F2203/18

摘要： A liquid crystal on silicon (LCOS) device includes a wafer, glass, and walls formed at opposite ends of an upper surface of the wafer to define a predetermined cell gap between the glass and the wafer. A thin piezo-electric layer is attached onto a surface of the wafer and an electrode is applied with external power to expand and/or contract the thin piezo-electric layer. The LCOS device further includes a voltage detection unit for detecting a voltage generated by the deformation of the thin piezo-electric layer; and a feedback control unit for compensating for deformation of the thin piezo-electric layer according to the voltage detected by the voltage detection unit. The LCOS device achieves uniformity of the cell gap by adjusting the voltage level of the thin piezo-electric layer after bonding the wafer and the glass, and therefore, spacers are not required.

摘要翻译： 硅液晶（LCOS）器件包括在晶片的上表面的相对端形成的晶片，玻璃和壁，以限定玻璃和晶片之间的预定单元间隙。 将薄的压电层附着到晶片的表面上，并且施加外部电力的电极以使薄压电层膨胀和/或收缩。 LCOS器件还包括用于检测由薄压电层的变形产生的电压的电压检测单元; 以及反馈控制单元，用于根据由电压检测单元检测到的电压来补偿薄压电层的变形。 LCOS器件通过在晶片和玻璃结合之后调节薄压电层的电压水平来实现单元间隙的均匀性，因此不需要间隔物。