公开(公告)号：US08615096B2

公开(公告)日：2013-12-24

申请号：US12719816

申请日：2010-03-08

Applicant: Liang Liu ,  Zhuo Chen ,  Kai Liu ,  Chen Feng ,  Kai-Li Jiang ,  Shou-Shan Fan

Inventor： Liang Liu ,  Zhuo Chen ,  Kai Liu ,  Chen Feng ,  Kai-Li Jiang ,  Shou-Shan Fan

IPC: H04R25/00

CPC classification number: C23C14/0005 ,  H04R23/002

Abstract: The present invention relates to a thermoacoustic device that includes an acoustic element. The acoustic element includes a substrate, a plurality of microspaces, and a metal film. The metal film is located above the substrate. A plurality of microspaces is defined between the substrate and the metal film. The metal film is partially suspended above the substrate.

Abstract translation: 本发明涉及一种包括声学元件的热声装置。 声学元件包括基底，多个微型体和金属膜。 金属膜位于基板上方。 在衬底和金属膜之间限定多个微孔。 金属膜部分悬浮在基板上方。

公开(公告)号：US08343451B2

公开(公告)日：2013-01-01

申请号：US12565890

申请日：2009-09-24

Applicant: Chen Feng ,  Kai-Li Jiang ,  Zhuo Chen ,  Yong-Chao Zhai ,  Shou-Shan Fan

Inventor： Chen Feng ,  Kai-Li Jiang ,  Zhuo Chen ,  Yong-Chao Zhai ,  Shou-Shan Fan

IPC: D01F9/12 ,  D01F9/127 ,  B29C55/00

CPC classification number: B01J35/02 ,  B01J32/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/16 ,  Y10T428/12424 ,  Y10T428/21 ,  Y10T428/24471 ,  Y10T428/2918

Abstract: A device for making a carbon nanotube film includes a substrate and a catalyst layer on the substrate. The catalyst layer has two substantially parallel sides. The present disclosure also provides a method for making a carbon nanotube film. The catalyst layer is annealed at a high temperature in air. The annealed catalyst layer is heated up to a predetermined reaction temperature in a furnace with a protective gas therein. A carbonaceous gas is supplied into the furnace to grow a carbon nanotube array having two substantially parallel side faces. A carbon nanotube film is drawn from the carbon nanotube array. A drawing direction is substantially parallel to the two substantially parallel side faces of the carbon nanotube array.

Abstract translation: 用于制造碳纳米管膜的装置包括在基板上的基板和催化剂层。 催化剂层具有两个基本平行的边。 本公开还提供了制造碳纳米管膜的方法。 催化剂层在高温下在空气中退火。 将退火的催化剂层在其中具有保护气体的炉中加热到预定的反应温度。 将碳质气体供应到炉中以生长具有两个基本上平行的侧面的碳纳米管阵列。 碳纳米管膜从碳纳米管阵列中抽出。 拉伸方向基本上平行于碳纳米管阵列的两个基本平行的侧面。

公开(公告)号：US08154721B2

公开(公告)日：2012-04-10

申请号：US12441032

申请日：2007-09-05

Applicant: Zhuo Chen ,  Liqiong Hu ,  Kai Xie

Inventor： Zhuo Chen ,  Liqiong Hu ,  Kai Xie

IPC: G01J3/00

CPC classification number: H01L21/67253

Abstract: A method of online predicting maintenance of an apparatus is disclosed. Using an optical emission spectroscopy (OES) positioned on the apparatus and the change of emission spectrum intensity detected by the OES in the process, according to the detected results, measuring the parameter in the process, the function relation between the process parameter and spectrum intensity is acquired. A control threshold is decided by the processing requirement to the apparatus. When the parameter exceeds the control threshold, maintenance to the etching apparatus is engaged in order to avoid processing error caused by frequent shutdown or deficient maintenance which is estimated by experience, and hence decreasing the cost and increasing processing efficiency of substrates (such as silicon wafers) without changing apparatus and adding other online sensor, and improving production rate by avoiding waste substrates caused by error processing results. The method is suitable for semiconductor substrate etching maintenance of the apparatus and also other maintenance of the apparatus.

Abstract translation: 公开了在线预测设备维护的方法。 使用位于设备上的光发射光谱（OES）和OES在该过程中检测到的发射光谱强度的变化，根据检测结果，测量过程中的参数，处理参数与光谱强度之间的函数关系 被收购。 控制阈值由对该装置的处理要求决定。 当参数超过控制阈值时，为了避免由经验估计的频繁停机或维护不足引起的处理误差，因此进行对蚀刻装置的维护，从而降低了基板（例如硅晶片）的成本和提高处理效率 ），不需要更换设备和添加其他在线传感器，并通过避免由错误处理结果引起的废弃基板来提高生产率。 该方法适用于设备的半导体衬底蚀刻维护以及设备的其他维护。

公开(公告)号：US08073165B2

公开(公告)日：2011-12-06

申请号：US12459053

申请日：2009-06-25

Applicant: Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Chen Feng ,  Shou-Shan Fan ,  Yuan-Chao Yang

Inventor： Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Chen Feng ,  Shou-Shan Fan ,  Yuan-Chao Yang

IPC: H04R25/00

CPC classification number: H04R23/002 ,  Y10S977/902 ,  Y10S977/932

Abstract: A sound wave generator includes one or more carbon nanotube film. The carbon nanotube film includes a plurality of carbon nanotubes joined end to end by van der Waals attractive force therebetween. At least part of the one or more carbon nanotube film is supported by a supporting element. The one or more carbon nanotube film produces sound by means of the thermoacoustic effect.

Abstract translation: 声波发生器包括一个或多个碳纳米管膜。 碳纳米管膜包括多个碳纳米管，它们之间以范德华力的吸引力端接到端部。 一个或多个碳纳米管膜的至少一部分由支撑元件支撑。 一个或多个碳纳米管膜通过热声效应产生声音。

公开(公告)号：US08068626B2

公开(公告)日：2011-11-29

申请号：US12459564

申请日：2009-07-02

Applicant: Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan ,  Chen Feng ,  Yuan-Chao Yang

Inventor： Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan ,  Chen Feng ,  Yuan-Chao Yang

IPC: H04R25/00

CPC classification number: H04R23/002 ,  B06B1/02

Abstract: An apparatus, the apparatus includes an electromagnetic signal device; a medium; and a sound wave generator. The sound wave generator includes a carbon nanotube structure. The carbon nanotube structure includes one or more carbon nanotube films. Each carbon nanotube film includes a plurality of carbon nanotubes substantially parallel to each other and joined side by side via van der Waals attractive force. The electromagnetic signal device transmits an electromagnetic signal to the carbon nanotube structure. The carbon nanotube structure converts the electromagnetic signal into heat. The heat transfers to the medium causing a thermoacoustic effect.

Abstract translation: 一种装置，该装置包括电磁信号装置; 一种媒介 和声波发生器。 声波发生器包括碳纳米管结构。 碳纳米管结构包括一个或多个碳纳米管膜。 每个碳纳米管膜包括基本上彼此平行并且通过范德华力吸引力并排并入的多个碳纳米管。 电磁信号装置向碳纳米管结构发送电磁信号。 碳纳米管结构将电磁信号转换成热。 热传递到介质，导致热声效应。

公开(公告)号：US08048397B2

公开(公告)日：2011-11-01

申请号：US11982674

申请日：2007-11-02

Applicant: Zhuo Chen ,  Chun-Xiang Luo ,  Kai-Li Jiang ,  Shou-Shan Fan

Inventor： Zhuo Chen ,  Chun-Xiang Luo ,  Kai-Li Jiang ,  Shou-Shan Fan

IPC: D01C5/00

CPC classification number: H01J9/025 ,  H01J2201/30469 ,  Y10S977/742 ,  Y10S977/843

Abstract: A method for making a field emission cathode includes the steps of: (a) providing a substrate having a first substrate surface and a second substrate surface opposite to the first substrate surface; (b) forming a conductive film on the first substrate surface; (c) forming a catalyst film on the conductive film, the catalyst film including carbonaceous material; (d) flowing a mixture of a carrier gas and a carbon source gas over the catalyst film; (e) focusing a laser beam on the catalyst film and/or on the second substrate surface to locally heat the catalyst to a predetermined reaction temperature; and (f) growing an array of the carbon nanotubes via the catalyst film to form a field emission cathode.

Abstract translation: 制造场发射阴极的方法包括以下步骤：（a）提供具有与第一衬底表面相对的第一衬底表面和第二衬底表面的衬底; （b）在第一基板表面上形成导电膜; （c）在导电膜上形成催化剂膜，所述催化剂膜包括含碳材料; （d）将载气和碳源气体的混合物流过催化剂膜; （e）将激光束聚焦在催化剂膜和/或第二基板表面上，以将催化剂局部加热至预定的反应温度; 和（f）经由催化剂膜生长碳纳米管的阵列以形成场致发射阴极。

公开(公告)号：US08030623B2

公开(公告)日：2011-10-04

申请号：US12459546

申请日：2009-07-02

Applicant: Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan

Inventor： Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Shou-Shan Fan

IPC: G01T1/16

CPC classification number: G10K15/04 ,  H04R23/00 ,  Y10S977/954

Abstract: A method for measuring properties of an electromagnetic signal includes following steps. An electromagnetic signal measuring device that includes a carbon nanotube structure is provided. The carbon nanotube structure has a plurality of carbon nanotubes. An electromagnetic signal is received by the carbon nanotube structure in the electromagnetic signal measuring device. The intensity of the electromagnetic signal is measured by a sound produced by the carbon nanotube structure.

Abstract translation: 一种用于测量电磁信号的性质的方法包括以下步骤。 提供一种包括碳纳米管结构的电磁信号测量装置。 碳纳米管结构具有多个碳纳米管。 电磁信号由电磁信号测量装置中的碳纳米管结构接收。 通过碳纳米管结构产生的声音来测量电磁信号的强度。

公开(公告)号：US08019100B2

公开(公告)日：2011-09-13

申请号：US12459051

申请日：2009-06-25

Applicant: Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Chen Feng ,  Shou-Shan Fan ,  Yuan-Chao Yang

Inventor： Kai-Li Jiang ,  Lin Xiao ,  Zhuo Chen ,  Chen Feng ,  Shou-Shan Fan ,  Yuan-Chao Yang

IPC: H04R25/00

CPC classification number: H04R23/002 ,  Y10S977/902 ,  Y10S977/932

Abstract: An apparatus includes a signal device, a power amplifier, and a sound wave generator. The power amplifier is electrically connected to the signal device. The power amplifier outputs an amplified electrical signal to the sound wave generator. The sound wave generator produces sound waves by a thermoacoustic effect. The amplified electrical signal is positive or negative.

Abstract translation: 一种装置包括信号装置，功率放大器和声波发生器。 功率放大器电连接到信号装置。 功率放大器将放大的电信号输出到声波发生器。 声波发生器通过热声效应产生声波。 放大的电信号为正或负。

公开(公告)号：US07780940B2

公开(公告)日：2010-08-24

申请号：US11982669

申请日：2007-11-02

Applicant: Zhuo Chen ,  Chun-Xiang Luo ,  Kai-Li Jiang ,  Shou-Shan Fan

Inventor： Zhuo Chen ,  Chun-Xiang Luo ,  Kai-Li Jiang ,  Shou-Shan Fan

IPC: D01C5/00

CPC classification number: D01F9/12 ,  Y10S977/742 ,  Y10S977/843

Abstract: A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate having a first surface and a second surface opposite to the first surface; (b) forming a catalyst film on the first surface of the substrate; (c) flowing a mixture of a carrier gas and a carbon source gas over the catalyst film; (d) generating a laser beam using a galvanometric scanning system, directing the laser beam toward/on one of the first surface and the second surface to locally heat the catalyst film to a predetermined temperature; and (e) growing an array of the carbon nanotubes from the substrate.

Abstract translation: 制造碳纳米管阵列的方法包括以下步骤：（a）提供具有与第一表面相对的第一表面和第二表面的基底; （b）在所述基板的第一表面上形成催化剂膜; （c）将载气和碳源气体的混合物流过催化剂膜; （d）使用电流扫描系统产生激光束，将所述激光束朝向所述第一表面和所述第二表面中的一个引导，以将所述催化剂膜局部加热至预定温度; 和（e）从衬底生长碳纳米管阵列。

公开(公告)号：US07771698B2

公开(公告)日：2010-08-10

申请号：US11982517

申请日：2007-11-02

Applicant: Zhuo Chen ,  Yang Wei ,  Kai-Li Jiang ,  Shou-Shan Fan

Inventor： Zhuo Chen ,  Yang Wei ,  Kai-Li Jiang ,  Shou-Shan Fan

IPC: D01F9/12

CPC classification number: D01F9/12 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/08 ,  Y10S977/742 ,  Y10S977/843

Abstract: A method for making/growing an array of carbon nanotubes includes the steps of: (a) providing a substrate; (b) forming a light absorption film made of a light absorption material on the substrate; (c) forming a catalyst film on the light absorption film; (d) introducing a mixture of a carrier gas and a carbon source gas by flowing the mixture over/across the catalyst film; (e) focusing a laser beam on the light absorption film to locally heat the catalyst to a predetermined/reaction temperature; and (f) growing an array of the carbon nanotubes from the substrate.

Abstract translation: 制造/生长碳纳米管阵列的方法包括以下步骤：（a）提供基底; （b）在基板上形成由光吸收材料制成的光吸收膜; （c）在光吸收膜上形成催化剂膜; （d）通过使所述混合物流过/穿过所述催化剂膜引入载气和碳源气体的混合物; （e）将激光束聚焦在光吸收膜上以将催化剂局部加热至预定/反应温度; 和（f）从基底生长碳纳米管阵列。