Field emission cathode device and method of forming a field emission cathode device

    公开(公告)号:US11967479B2

    公开(公告)日:2024-04-23

    申请号:US18247260

    申请日:2021-09-29

    申请人: NCX Corporation

    发明人: Jian Zhang

    IPC分类号: H01J1/304 H01J9/02

    CPC分类号: H01J1/304 H01J9/025

    摘要: A field emission cathode device and method for forming a field emission cathode device involve a cathode element having a field emission surface disposed in spaced-apart relation to a gate electrode element so as to define a gap between the field emission surface and the gate electrode element. The gate electrode element extends laterally between opposing anchored ends. The gate electrode element is arranged to deform away from the field emission surface in response to heat, so as to increase the gap between the field emission surface and the gate electrode element.

    Two-dimensional graphene cold cathode, anode, and grid

    公开(公告)号:US09805900B1

    公开(公告)日:2017-10-31

    申请号:US15145955

    申请日:2016-05-04

    摘要: In an embodiment, a method includes forming a first diamond layer on a substrate and inducing a layer of graphene from the first diamond layer by heating the substrate and the first diamond layer. The method includes forming a second diamond layer on top of the layer of graphene and applying a mask to the second diamond layer. The mask includes a shape of a cathode, an anode, and one or more grids. The method further includes forming a two-dimensional cold cathode, a two-dimensional anode, and one or more two-dimensional grids by reactive-ion electron-beam etching. Each of the two-dimensional cold cathode, the two-dimensional anode, and the one or more two-dimensional grids includes a portion of the first diamond layer, the graphene layer, and the second diamond layer such that the graphene layer is positioned between the first diamond layer and the second diamond layer.