公开(公告)号：US07104134B2

公开(公告)日：2006-09-12

申请号：US10792777

申请日：2004-03-05

Applicant: Jun Amano ,  Mark A. Unkrich

Inventor： Jun Amano ,  Mark A. Unkrich

IPC: G01L11/00

CPC classification number: H04R17/02 ,  G01L1/16 ,  G06K9/0002

Abstract: A piezoelectric cantilever pressure sensor has a substrate and a piezoelectric cantilever having a base portion attached to the substrate and a beam portion suspended over a cavity. The piezoelectric cantilever contains a piezoelectric layer sandwiched between two electrodes and generates a measurable voltage when deformed under pressure. The piezoelectric cantilever pressure sensor can be manufactured at low cost and used in various applications including fingerprint identification devices.

Abstract translation: 压电悬臂压力传感器具有基板和压电悬臂，其具有附接到基板的基部和悬挂在空腔上的梁部分。 压电悬臂包含夹在两个电极之间的压电层，并在压力下变形时产生可测量的电压。 压电悬臂压力传感器可以低成本制造，并用于各种应用中，包括指纹识别装置。

公开(公告)号：US20060072788A1

公开(公告)日：2006-04-06

申请号：US11236591

申请日：2005-09-28

Applicant: Tomoharu Suzuki ,  Kazuya Watanabe ,  Kosuke Sato ,  Jun Amano ,  Katsuhiko Umeno

Inventor： Tomoharu Suzuki ,  Kazuya Watanabe ,  Kosuke Sato ,  Jun Amano ,  Katsuhiko Umeno

IPC: G06K9/00

CPC classification number: G06T3/0081 ,  G01C11/02 ,  G06T15/20 ,  H04N7/181

Abstract: A monitoring system for monitoring surroundings of a vehicle by displaying images taken by a plurality of cameras provided at the vehicle on a display apparatus provided in a vehicle compartment includes an image processing portion. The image processing portion includes a boundary-determining portion for determining a boundary of the neighboring images taken by the plurality of cameras for synthesizing the neighboring images in a horizontal direction by approximating the boundary to an exponential curve, a horizontally normalizing portion for normalizing the neighboring images in a horizontal direction so that the boundary approximated to the exponential curve is converted into a linear vertical boundary, a vertically compensating portion for compensating a vertical displacement between the neighboring images on the linear vertical boundary, and a pixel-adjusting portion for adjusting the number of pixels of the synthesized image to the number of pixels suitable for displaying the synthesized image produced by the image processing portion on the display apparatus.

公开(公告)号：US06228541B1

公开(公告)日：2001-05-08

申请号：US09292936

申请日：1999-04-16

Applicant: Akihiko Isao ,  Susumu Kawada ,  Tsuneo Yamamoto ,  Jun Amano ,  Ryoichi Kobayashi ,  Nobuyuki Yoshioka

Inventor： Akihiko Isao ,  Susumu Kawada ,  Tsuneo Yamamoto ,  Jun Amano ,  Ryoichi Kobayashi ,  Nobuyuki Yoshioka

IPC: G03F900

CPC classification number: C23C14/0057 ,  C23C14/0676 ,  C23C14/50 ,  G03F1/32

Abstract: A uniform thin phase-shifting photomask blank can be formed by depositing a thin film on a substrate by a reactive sputtering technique while passing, at least four times, the substrate over a sputtering target. In the formation of the blank, NO gas is used as the reactive gas, a target composed of a mixture of molybdenum and silicon is used as the sputtering target and a transparent substrate is used as the thin film-forming substrate to form, on the transparent substrate, a light-transmitting film capable of transmitting light rays having an intensity, which cannot substantially contribute to the exposure. In addition, the film is formed, on the substrate, through an opening having a sufficiently enlarged length along the substrate-conveying direction so that even regions whose deposition rate of the target component is not more than 90% of the maximum level thereof also contribute to the film-formation. The phase-shifting photomask blank thus prepared is subjected to a patterning treatment to form a phase-shifting photomask.

Abstract translation: 可以通过反应溅射技术在衬底上沉积薄膜，同时在溅射靶上通过至少四次衬底来形成均匀的薄移相光掩模坯料。 在坯料的形成中，使用NO气体作为反应气体，使用由钼和硅的混合物构成的靶作为溅射靶，并且使用透明衬底作为薄膜形成衬底，以形成 透明基板，能够透射具有强度的光线的透光膜，其不能显着地有助于曝光。 此外，膜在基板上通过沿基板输送方向具有足够长的长度的开口形成，使得目标成分的沉积速率不大于其最大值的90％的均匀区域也有贡献 到电影形成。 将如此制备的相移光掩模坯料进行图案化处理以形成相移光掩模。