Laser probing system for integrated circuits
    31.
    发明申请
    Laser probing system for integrated circuits 有权
    集成电路激光探测系统

    公开(公告)号:US20070002329A1

    公开(公告)日:2007-01-04

    申请号:US11169423

    申请日:2005-06-29

    CPC classification number: G01R31/308 G01R31/311

    Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

    Abstract translation: 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源,设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件,用于检测反射光束的光学检测器,收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测(PDP)光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性,光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

    Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system
    32.
    发明申请
    Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system 有权
    用于在光学探测系统中使用调制测量高带宽电信号的方法和装置

    公开(公告)号:US20070002328A1

    公开(公告)日:2007-01-04

    申请号:US11436267

    申请日:2006-05-17

    CPC classification number: G01R31/308

    Abstract: A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.

    Abstract translation: 提供了一种用于探测DUT的系统,该系统包括可调谐或CW激光源,用于调制激光源的输出的调制器,被设计为将探测光束指向DUT上的指定位置的光束光学器件,用于 检测反射光束,采集和信号处理电子元件。 系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。 在替代实施例中,激光是CW并且调制被应用于光学检测器。

    Apparatus and method for measuring characteristics of dynamic electrical signals in integrated circuits

    公开(公告)号:US20060031036A1

    公开(公告)日:2006-02-09

    申请号:US11241609

    申请日:2005-09-30

    Applicant: Steven Kasapi

    Inventor: Steven Kasapi

    CPC classification number: G01R31/31903 G01R31/31937

    Abstract: Systems and methods consistent with principles of the present invention allow contactless measurements of voltage characteristics of dynamic electrical signals in integrated circuits. The invention utilizes a signal analysis circuit, such as a voltage comparator, disposed with the circuit under test, which is optically coupled with the external timing measurement equipment. The signal analysis circuit changes its state depending on the characteristics of the measured electrical signal applied thereto. The changes in the condition of the signal analysis circuit are sensed by the external timing measurement equipment provided outside the circuit under test. To this end, the signal analysis circuit is optically coupled with the external measurement equipment registering specific changes in the condition of the signal analysis circuit. The information on the condition of the signal analysis circuit registered by the external measurement equipment is used to study the characteristics of the dynamic electrical signals within the circuit.

    Apparatus and method for measuring characteristics of dynamic electrical signals in integrated circuits
    34.
    发明授权
    Apparatus and method for measuring characteristics of dynamic electrical signals in integrated circuits 有权
    用于测量集成电路中动态电信号特性的装置和方法

    公开(公告)号:US06976234B2

    公开(公告)日:2005-12-13

    申请号:US10341721

    申请日:2003-01-13

    Applicant: Steven Kasapi

    Inventor: Steven Kasapi

    CPC classification number: G01R31/31903 G01R31/31937

    Abstract: Systems and methods consistent with principles of the present invention allow contactless measurements of voltage characteristics of dynamic electrical signals in integrated circuits. The invention utilizes a signal analysis circuit, such as a voltage comparator, disposed with the circuit under test, which is optically coupled with the external timing measurement equipment. The signal analysis circuit changes its state depending on the characteristics of the measured electrical signal applied thereto. The changes in the condition of the signal analysis circuit are sensed by the external timing measurement equipment provided outside the circuit under test. To this end, the signal analysis circuit is optically coupled with the external measurement equipment registering specific changes in the condition of the signal analysis circuit. The information on the condition of the signal analysis circuit registered by the external measurement equipment is used to study the characteristics of the dynamic electrical signals within the circuit.

    Abstract translation: 与本发明的原理一致的系统和方法允许对集成电路中的动态电信号的电压特性进行非接触式测量。 本发明利用与被测电路配置的信号分析电路,例如电压比较器,其与外部定时测量设备光耦合。 信号分析电路根据所施加的测量电信号的特性改变其状态。 信号分析电路状态的变化由设在被测电路外部的外部定时测量设备检测。 为此,信号分析电路与外部测量设备光学耦合,记录信号分析电路的状况的特定变化。 由外部测量设备登记的信号分析电路的状况信息用于研究电路内动态电信号的特性。

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