摘要:
In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.
摘要:
A light scanning type confocal optical device comprises a light source section, a light transmitting section, a light scanning section, and a processing section. The scanning section includes a movable mirror, a fixed mirror and a converging lens. The movable mirror has an opening at the center, and is supported to be swingable about at least one axis. The fixed mirror is fixedly supported by an optically transparent plate. Reflection surfaces of the movable and fixed mirrors are located opposed to each other. The transmitting section includes an optical fiber having a core, whose end face substantially functions as a confocal pinhole. The light from the end face of the core is, upon passing through the opening, reflected by the fixed mirror toward the movable mirror. The light from the fixed mirror is then reflected by the movable mirror, and is converged by the converging lens onto an object surface.