公开(公告)号：USD578606S1

公开(公告)日：2008-10-14

申请号：US29294800

申请日：2008-01-29

Applicant: James Wu ,  Alex Wu

Designer： James Wu ,  Alex Wu

公开(公告)号：US06518775B1

公开(公告)日：2003-02-11

申请号：US09712254

申请日：2000-11-15

Applicant: Hung-Hsiu Yu ,  Alex Wu ,  Ming Chih Sung

Inventor： Hung-Hsiu Yu ,  Alex Wu ,  Ming Chih Sung

IPC: C23C1600

CPC classification number: C23C16/45565 ,  C23C16/481 ,  C23C16/52

Abstract: The present invention provides a process for determining the spacing between a heater and a showerhead. First, at least one variable capacitor is placed between the heater and the showerhead, such that the spacing between the heater and the showerhead is in a predetermined relationship to the capacitance of the variable capacitor. Then, the capacitance of the variable capacitor is measured, and the spacing between the heater and the showerhead is converted from the capacitance. The determination process of the present invention can be conducted at high temperature above 350° C., and the spacing can be determined without opening the deposition chamber. This makes the entire process very convenient and the cost can be saved.

Abstract translation: 本发明提供了一种用于确定加热器和喷头之间的间距的方法。 首先，在加热器和喷头之间放置至少一个可变电容器，使得加热器和喷头之间的间隔与可变电容器的电容成预定关系。 然后，测量可变电容器的电容，并且加热器和喷头之间的间距从电容转换。 本发明的测定方法可以在高于350℃的高温下进行，并且可以在不打开沉积室的情况下确定间隔。 这使得整个过程非常方便，并且可以节省成本。