公开(公告)号：US20120037790A1

公开(公告)日：2012-02-16

申请号：US13282878

申请日：2011-10-27

申请人： Kasra Khazeni ,  Manish Kothari ,  Marc Mignard ,  Gang Xu ,  Russell W. Gruhlke

发明人： Kasra Khazeni ,  Manish Kothari ,  Marc Mignard ,  Gang Xu ,  Russell W. Gruhlke

IPC分类号： G02B26/02 ,  G01J1/44

CPC分类号： G02B26/001 ,  G02B5/281

摘要： Modulator devices are selectably adjustable between at least two states, wherein the transmission and/or reflection of particular wavelengths of light are modified. Certain modulator devices are substantially uniformly adjustable over a wide range of wavelengths, including visible and infrared wavelengths. Other modulator devices are adjustable over visible wavelengths without significantly affecting infrared wavelengths. In addition, the modulator devices may be used in conjunction with fixed thin film reflective structures.

摘要翻译： 调制器装置可选地在至少两种状态之间可调节，其中特定波长的光的透射和/或反射被修改。 某些调制器器件在宽范围的波长（包括可见光和红外波长）上基本均匀地可调。 其他调制器器件可在可见波长上调节，而不会显着影响红外波长。 此外，调制器装置可以与固定薄膜反射结构结合使用。

公开(公告)号：US20100085625A1

公开(公告)日：2010-04-08

申请号：US12630741

申请日：2009-12-03

申请人： Denis Endisch ,  Marc Mignard

发明人： Denis Endisch ,  Marc Mignard

IPC分类号： G02B26/08

CPC分类号： G02B26/001 ,  B81B3/0083 ,  B81B2201/047

摘要： In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.

摘要翻译： 在某些实施例中，微机电（MEMS）装置包括具有顶表面的衬底，在衬底上的可移动元件以及从反射表面横向设置的致动电极。 可移动元件包括可变形层和机械耦合到可变形层的反射元件。 反射元件包括反射表面。 可移动元件通过在大致垂直于衬底的顶表面的方向上移动来响应施加在致动电极和可移动​​元件之间的电压差。

公开(公告)号：US07550810B2

公开(公告)日：2009-06-23

申请号：US11360162

申请日：2006-02-23

申请人： Marc Mignard ,  Lior Kogut

发明人： Marc Mignard ,  Lior Kogut

IPC分类号： H01L49/00

CPC分类号： G02B26/001 ,  B81B3/0078 ,  B81B2201/047 ,  B81B2201/054 ,  B81B2203/053 ,  G09G3/3466 ,  G09G2300/06

摘要： A microelectromechanical (MEMS) device includes a substrate and a movable layer mechanically coupled to the substrate. The movable layer moves from a first position to a second position at a first rate and from the second position to the first position at a second rate faster than the first rate. The MEMS device further includes an adjustable cavity defined between the substrate and the movable layer and containing a fluid. The MEMS device further includes a fluid conductive element through which the fluid flows at a first flowrate from inside the cavity to outside the cavity upon movement of the movable layer from the second position to the first position and through which the fluid flows at a second flowrate slower than the first flowrate from outside the cavity to inside the cavity upon movement of the movable layer from the first position to the second position.

摘要翻译： 微机电（MEMS）装置包括基板和机械耦合到基板的可移动层。 可移动层以第一速率从第一位置移动到第二位置，并且以比第一速率快的第二速率从第二位置移动到第一位置。 MEMS器件还包括限定在衬底和可移动层之间并包含流体的可调节空腔。 MEMS装置还包括流体导电元件，当可移动层从第二位置移动到第一位置时，流体从腔体内部以第一流量流动到空腔外部，并且流体以第二流量流动 当从可移动层从第一位置移动到第二位置时，其比从空腔外部到腔体内部的第一流速慢。

公开(公告)号：US20110170168A1

公开(公告)日：2011-07-14

申请号：US13072160

申请日：2011-03-25

申请人： Denis Endisch ,  Marc Mignard

发明人： Denis Endisch ,  Marc Mignard

IPC分类号： G02B26/08 ,  B05D3/10

CPC分类号： G02B26/001 ,  B81B3/0083 ,  B81B2201/047

摘要： In certain embodiments, a microelectromechanical (MEMS) device includes a movable element over the substrate and an actuation electrode. The movable element includes an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The actuation electrode is under at least a portion of the deformable layer and is disposed laterally from the reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving towards the actuation electrode.

摘要翻译： 在某些实施例中，微机电（MEMS）装置包括在基板上的可移动元件和致动电极。 可移动元件包括导电可变形层和机械耦合到可变形层的反射元件。 反射元件包括反射表面。 致动电极在可变形层的至少一部分之下，并且从反射表面横向设置。 可移动元件响应于通过向致动电极移动而施加在致动电极和可移动​​元件之间的电压差。

公开(公告)号：US07515147B2

公开(公告)日：2009-04-07

申请号：US11054703

申请日：2005-02-08

申请人： Marc Mignard

发明人： Marc Mignard

IPC分类号： G06F3/038

CPC分类号： G09G3/3466 ,  G09G2310/0218 ,  G09G2310/0275 ,  G09G2330/025

摘要： A system and method for staggered actuation of columns of interferometric modulators. In one embodiment, the method determines data for actuating two or more groups of columns in the array, each group having one or more columns, and provides the data to the array to actuate two or more group of columns so that each group is activated during a group addressing period. In another embodiment, a display includes at least one driving circuit and an array comprising a plurality of interferometric modulators disposed in a plurality of columns and rows, said array being configured to be driven by said driving circuit which is configured to stagger the actuation of the plurality of columns during an array addressing period.

摘要翻译： 用于干涉式调制器列的交错致动的系统和方法。 在一个实施例中，该方法确定用于致动阵列中的两组或多组列的数据，每组具有一个或多个列，并将数据提供给阵列以致动两组或更多组列，使得每组在 一组寻址期。 在另一个实施例中，显示器包括至少一个驱动电路和阵列，其包括设置在多个列和行中的多个干涉式调制器，所述阵列被配置为由所述驱动电路驱动，所述驱动电路被配置为错开 在阵列寻址周期期间的多个列。

公开(公告)号：US07355779B2

公开(公告)日：2008-04-08

申请号：US11327191

申请日：2006-01-06

申请人： Marc Mignard ,  Brian J. Gally ,  William J. Cummings

发明人： Marc Mignard ,  Brian J. Gally ,  William J. Cummings

IPC分类号： G02F1/01 ,  G02B26/00

CPC分类号： G09G3/3466 ,  G02B26/001 ,  G09G2300/06 ,  G09G2310/06 ,  G09G2320/029 ,  G09G2320/041

摘要： Systems and methods for driving MEMS display elements are disclosed. In one embodiment, a display comprises an array of MEMS display elements, and a driving circuit coupled to said array, wherein said driving circuit configured to provide at lease a row signal and a column signal to drive said array, and only one of said row and column signals is adjusted for temperature change. In another embodiment, a method of driving an array of MEMS display elements is disclosed, where the method comprises sensing a temperature at a predetermined location, generating one of a row signal and a column signal having a level based at least in part on the sensed temperature and the other not based on the sensed temperature, and providing said row and column signals to said array.

摘要翻译： 公开了用于驱动MEMS显示元件的系统和方法。 在一个实施例中，显示器包括MEMS显示元件的阵列和耦合到所述阵列的驱动电路，其中所述驱动电路被配置为至少提供行信号和列信号以驱动所述阵列，并且只有所述行中的一个 并调整列信号以进行温度变化。 在另一个实施例中，公开了一种驱动MEMS显示元件阵列的方法，其中所述方法包括感测在预定位置处的温度，产生行信号和列信号中的一个，其具有至少部分地基于感测到的 温度而另一个不是基于所感测的温度，并且将所述行和列信号提供给所述阵列。

公开(公告)号：US20070194630A1

公开(公告)日：2007-08-23

申请号：US11360162

申请日：2006-02-23

申请人： Marc Mignard ,  Lior Kogut

发明人： Marc Mignard ,  Lior Kogut

IPC分类号： H02N3/00

CPC分类号： G02B26/001 ,  B81B3/0078 ,  B81B2201/047 ,  B81B2201/054 ,  B81B2203/053 ,  G09G3/3466 ,  G09G2300/06

摘要： A microelectromechanical (MEMS) device includes a substrate and a movable layer mechanically coupled to the substrate. The movable layer moves from a first position to a second position at a first rate and from the second position to the first position at a second rate faster than the first rate. The MEMS device further includes an adjustable cavity defined between the substrate and the movable layer and containing a fluid. The MEMS device further includes a fluid conductive element through which the fluid flows at a first flowrate from inside the cavity to outside the cavity upon movement of the movable layer from the second position to the first position and through which the fluid flows at a second flowrate slower than the first flowrate from outside the cavity to inside the cavity upon movement of the movable layer from the first position to the second position.

摘要翻译： 微机电（MEMS）装置包括基板和机械耦合到基板的可移动层。 可移动层以第一速率从第一位置移动到第二位置，并且以比第一速率快的第二速率从第二位置移动到第一位置。 MEMS器件还包括限定在衬底和可移动层之间并包含流体的可调节空腔。 MEMS装置还包括流体导电元件，当可移动层从第二位置移动到第一位置时，流体从腔体内部以第一流量流动到空腔外部，并且流体以第二流量流动 当从可移动层从第一位置移动到第二位置时，其比从空腔外部到腔体内部的第一流速慢。

公开(公告)号：US07884989B2

公开(公告)日：2011-02-08

申请号：US11698521

申请日：2007-01-25

申请人： Brian J. Gally ,  William J. Cummings ,  Ming-Hau Tung ,  Lior Kogut ,  Marc Mignard

发明人： Brian J. Gally ,  William J. Cummings ,  Ming-Hau Tung ,  Lior Kogut ,  Marc Mignard

IPC分类号： G02B26/00

CPC分类号： G02B26/001 ,  G09G3/346

摘要： An iterferometric modulator array is configured to reflect a broad band spectrum of optical wavelengths by arranging a reflector and a partially transparent substrate in a non-parallel relationship.

摘要翻译： 干涉式调制器阵列被配置为通过将反射器和部分透明的衬底布置成非平行关系来反射光波长的宽带光谱。

公开(公告)号：US20090161192A1

公开(公告)日：2009-06-25

申请号：US12396395

申请日：2009-03-02

申请人： Marc Mignard

发明人： Marc Mignard

IPC分类号： G02F1/03

CPC分类号： G09G3/3466 ,  G09G2300/06 ,  G09G2310/0275 ,  G09G2310/066 ,  G09G2330/025

摘要： The invention comprises devices and methods for driving a MEMs pixel, and in particular, an interferometric modulator pixel. In one embodiment a device for modulating light includes a light modulator including a movable optical element positionable in two or more positions, the modulator operating interferometrically to exhibit a different predetermined optical response in each of the two or more positions, and control circuitry connected to the light modulator for controlling said interferometric modulator, where the control circuitry is controllably switchable between two circuit configurations, and where the control circuitry provides current to said light modulator when switching between the two circuit configurations to cause the movable optical element of the light modulator to move between two positions of its two or more positions. In another embodiment a method of driving an interferometric modulator pixel with a driving circuit includes providing a potential difference across the interferometric pixel, wherein the provided potential difference increases over a period of time, and changing the position of a movable reflective layer of the interferometric pixel based on the provided potential difference.

摘要翻译： 本发明包括用于驱动MEM像素的装置和方法，特别是干涉式调制器像素。 在一个实施例中，用于调制光的装置包括光调制器，其包括可定位在两个或更多个位置的可移动光学元件，所述调制器在两个或更多个位置中的每一个中以干涉方式进行工作以表现出不同的预定光学响应，以及控制电路 用于控制所述干涉式调制器的光调制器，其中所述控制电路在两个电路配置之间可控地切换，并且其中当所述两个电路配置之间切换以使所述光调制器的可移动光学元件移动时，所述控制电路向所述光调制器提供电流 其两个或多个职位的两个职位之间。 在另一个实施例中，用驱动电路驱动干涉式调制器像素的方法包括提供横跨干涉像素的电位差，其中所提供的电位差在一段时间内增加，并改变干涉像素的可移动反射层的位置 基于提供的潜在差异。

公开(公告)号：US07499208B2

公开(公告)日：2009-03-03

申请号：US11182389

申请日：2005-07-15

申请人： Marc Mignard

发明人： Marc Mignard

IPC分类号： G02F1/03 ,  G02B26/00

CPC分类号： G09G3/3466 ,  G09G2300/06 ,  G09G2310/0275 ,  G09G2310/066 ,  G09G2330/025

摘要： The invention comprises devices and methods for driving a MEMs pixel, and in particular, an interferornetric modulator pixel. In one embodiment a device for modulating light includes a light modulator including a movable optical element positionable in two or more positions, the modulator operating interferometrically to exhibit a different predetermined optical response in each of the two or more positions, and control circuitry connected to the light modulator for controlling said interferometric modulator, where the control circuitry is controllably switchable between two circuit configurations, and where the control circuitry provides a substantially constant current to said light modulator when switching between the two circuit configurations to cause the movable optical element of the light modulator to move between two positions of its two or more positions.

摘要翻译： 本发明包括用于驱动MEM像素的装置和方法，特别是干涉式调制器像素。 在一个实施例中，用于调制光的装置包括光调制器，其包括可定位在两个或更多个位置的可移动光学元件，所述调制器在两个或更多个位置中的每一个中以干涉方式进行工作以表现出不同的预定光学响应，以及控制电路 用于控制所述干涉式调制器的光调制器，其中所述控制电路在两个电路配置之间可控地切换，并且其中当所述两个电路配置之间切换以引起所述光的可移动光学元件时，所述控制电路向所述光调制器提供基本上恒定的电流 调制器在其两个或更多个位置的两个位置之间移动。