公开(公告)号：US20180017878A1

公开(公告)日：2018-01-18

申请号：US15619900

申请日：2017-06-12

申请人： Cymer, LLC

发明人： Thomas Frederick Allen Bibby, JR. ,  Omar Zurita ,  Abhishek Subramanian ,  Thomas Patrick Duffey

IPC分类号： G03F7/20 ,  G01J1/42

CPC分类号： G03F7/70516 ,  G01J1/4257 ,  G01J1/429 ,  G01J2001/4247 ,  G03F7/2004 ,  G03F7/7015 ,  G03F7/70591

摘要： Methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system. Also disclosed is a beam image and analysis tool capable of acquiring an image of a beam at any one of a number of locations.